公开(公告)号：US20160372463A1

公开(公告)日：2016-12-22

申请号：US15255311

申请日：2016-09-02

Applicant: Texas Instruments Incorporated

Inventor： Yufei XIONG ,  Yunlong LIU ,  Hong YANG ,  Jianxin LIU

IPC: H01L27/088 ,  H01L23/528 ,  H01L29/49 ,  H01L29/78 ,  H01L29/423

CPC classification number: H01L27/088 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/2652 ,  H01L21/26586 ,  H01L21/28185 ,  H01L21/28202 ,  H01L21/2822 ,  H01L21/28238 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/308 ,  H01L23/5283 ,  H01L27/0629 ,  H01L28/40 ,  H01L29/4236 ,  H01L29/42364 ,  H01L29/4916 ,  H01L29/66181 ,  H01L29/7827 ,  H01L29/945

Abstract: An integrated circuit including a trench in the substrate with a high quality trench oxide grown on the sidewalls and the bottom of the trench where the ratio of the thickness of the high quality trench oxide formed on the sidewalls to the thickness formed on the bottom is less than 1.2. An integrated circuit including a trench with high quality oxide is formed by first growing a sacrificial oxide in dilute oxygen at a temperature in the range of 1050° C. to 1250° C., stripping the sacrificial oxide, growing high quality oxide in dilute oxygen plus trans 1,2 dichloroethylene at a temperature in the range of 1050° C. to 1250° C., and annealing the high quality oxide in an inert ambient at a temperature in the range of 1050° C. to 1250° C.

Abstract translation: 一种集成电路，其包括在衬底中的沟槽，其具有在沟槽的侧壁和底部上生长的高质量沟槽氧化物，其中形成在侧壁上的高质量沟槽氧化物的厚度与形成在底部上的厚度之比较小 超过1.2。 包括具有高质量氧化物的沟槽的集成电路通过首先在1050℃至1250℃的温度范围内在稀释氧中生长牺牲氧化物而形成，剥离牺牲氧化物，在稀释氧中生长高质量的氧化物 在1050℃至1250℃的温度下加入反式1,2-二氯乙烯，并在1050℃至1250℃的温度范围内在惰性环境中退火高品质氧化物。