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公开(公告)号：US20230175839A1
公开(公告)日：2023-06-08
申请号：US18074066
申请日：2022-12-02
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
CPC classification number: G01B11/2441 , G01B11/2518 , G03F1/84
Abstract: A method for inspecting a photomask includes scanning the photomask with an interferometric fringe pattern generated by an interferometer, generating an interferogram associated with the photomask in response to scanning the photomask using the interferometer, and detecting one or more geometric parameters of the photomask using the generated interferogram.
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Patent Agency Ranking
公开(公告)号：US12266501B2
公开(公告)日：2025-04-01
申请号：US17780422
申请日：2020-11-27
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
Abstract: A nanoscale positioning system for positioning a positionable component includes a motion platform including a first end, a second end, a shuttle positioned between the first end and the second end and configured to support the positionable component, a flexure member, and a fluid passage extending through the flexure member from the first end to the second end of the motion platform, and a pressure controller coupled to the motion platform and fluidically connected to the fluid passage, wherein the pressure controller is configured to selectably provide a fluid pressure in the fluid passage to flex the flexure member whereby the shuttle is displaced along a motion axis of the motion platform.
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公开(公告)号：US20250030824A1
公开(公告)日：2025-01-23
申请号：US18906582
申请日：2024-10-04
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
IPC: H04N13/156 , H04N13/167 , H04N13/239 , H04N13/254
Abstract: A method for reconstructing a three-dimensional (3D) of a sample includes displacing an outer surface of the sample at a desired sample, repeatedly activating an ultraviolet stroboscopic illuminator to produce ultraviolet excitation light at a frequency that is based on the speed of the sample, repeatedly activating a pair of laterally spaced cameras of a stereoscopic imaging unit as the outer surface of the sample is displaced to capture a plurality of 2D images of different sections of the outer surface of the sample, and reconstructing a 3D image of the sample from the plurality of 2D images of the different sections captured by the pair of cameras.
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公开(公告)号：US12137200B2
公开(公告)日：2024-11-05
申请号：US17944384
申请日：2022-09-14
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
IPC: H04N13/156 , H04N13/167 , H04N13/239 , H04N13/254
Abstract: A 3D strobo-stereoscopic imaging system includes a rotary drive configured to couple to a sample to be imaged by the system, wherein the rotary drive is configured to rotate the sample about a rotational axis when coupled to the rotary drive, a stroboscopic illuminator, a stroboscopic control module coupled to the rotary drive and the stroboscopic illuminator, wherein the stroboscopic control module is configured to repeatedly activate the stroboscopic illuminator at a frequency that is based on a rotational speed of the sample about the rotational axis, a stereoscopic imaging unit including a pair of laterally spaced cameras orientable in the direction of the sample, and an image reconstruction module coupled to the stereoscopic imaging unit and configured to reconstruct a 3D image of the sample from images produced by the pair of cameras of the stereoscopic imaging unit.
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公开(公告)号：US20230082607A1
公开(公告)日：2023-03-16
申请号：US17944384
申请日：2022-09-14
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
IPC: H04N13/156 , H04N13/239 , H04N13/254 , H04N13/167
Abstract: A 3D strobo-stereoscopic imaging system includes a rotary drive configured to couple to a sample to be imaged by the system, wherein the rotary drive is configured to rotate the sample about a rotational axis when coupled to the rotary drive, a stroboscopic illuminator, a stroboscopic control module coupled to the rotary drive and the stroboscopic illuminator, wherein the stroboscopic control module is configured to repeatedly activate the stroboscopic illuminator at a frequency that is based on a rotational speed of the sample about the rotational axis, a stereoscopic imaging unit including a pair of laterally spaced cameras orientable in the direction of the sample, and an image reconstruction module coupled to the stereoscopic imaging unit and configured to reconstruct a 3D image of the sample from images produced by the pair of cameras of the stereoscopic imaging unit.
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公开(公告)号：US20230009873A1
公开(公告)日：2023-01-12
申请号：US17780422
申请日：2020-11-27
Applicant: The Texas A&M University System
Inventor： ChaBum Lee
Abstract: A nanoscale positioning system for positioning a positionable component includes a motion platform including a first end, a second end, a shuttle positioned between the first end and the second end and configured to support the positionable component, a flexure member, and a fluid passage extending through the flexure member from the first end to the second end of the motion platform, and a pressure controller coupled to the motion platform and fluidically connected to the fluid passage, wherein the pressure controller is configured to selectably provide a fluid pressure in the fluid passage to flex the flexure member whereby the shuttle is displaced along a motion axis of the motion platform.
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