公开(公告)号：US09677934B2

公开(公告)日：2017-06-13

申请号：US14470875

申请日：2014-08-27

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen Hartwell ,  Nigel Cooper Bailey

IPC: G01J3/36 ,  G01J3/02 ,  G01J3/443 ,  G01J3/28

CPC classification number: G01J3/0297 ,  G01J3/28 ,  G01J3/443

Abstract: A method for deriving a background-corrected portion of a measured optical emission spectrum comprising the steps of identifying two or more background correction points from the portion of the measured emission spectrum; deriving a background correction function fitted to the identified background correction points, and applying the background correction function to the portion of the measured emission spectrum so as to produce a background-corrected portion of the emission spectrum, wherein the background correction points are identified from the measured data points by consideration of the gradients between the measured data points.

公开(公告)号：US08822948B1

公开(公告)日：2014-09-02

申请号：US14074824

申请日：2013-11-08

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen Hartwell

IPC: C23C14/54 ,  C23C8/36 ,  H01L21/203

CPC classification number: H01J37/244 ,  G01J3/443 ,  G01J2003/4435 ,  H01J27/16 ,  H01J37/08 ,  H01J37/32972 ,  H01J37/3299 ,  H01J49/105 ,  H01J49/26 ,  H05H1/0037

Abstract: A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.

Abstract translation: 用于控制用于光发射光谱或质谱的电感耦合或微波感应等离子体的温度的方法和装置，其中测量由等离子体发射的两束辐射谱线的强度，并且提供用于维持等离子体的功率为 调节使得强度比保持基本恒定。