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1.发明授权
公开(公告)号：US4454495A
公开(公告)日：1984-06-12
申请号：US413637
申请日：1982-08-31
CPC分类号： H01C7/18 , H01C7/008 , Y10S505/881
摘要： A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
摘要翻译： 具有控制的电阻温度系数（TCR）的薄膜电阻器，其范围从负开尔文到正开尔文并且具有相对高的电阻率。 该电阻器是含有两个不同金属的多个交替的超薄层的多层超晶格晶体。 通过控制各层的厚度来改变TCR。 电阻器可以通过与薄膜电路制造技术相兼容的方法容易地制备。
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公开(公告)号：US07085300B2
公开(公告)日：2006-08-01
申请号：US10028439
申请日：2001-12-28
申请人： Thomas R. Werner , James K. Guenter
发明人： Thomas R. Werner , James K. Guenter
IPC分类号： H01S5/00
CPC分类号： H01S5/02284 , H01S5/02248 , H01S5/02272 , H01S5/183
摘要： An integral vertical cavity surface emitting laser (VCSEL) and power monitor assembly. The assembly is beneficially fabricated by anisotropically etching a silicon substrate having substantially flat top and bottom surfaces to form a cavity defined by an inwardly sloping wall that extends through the silicon substrate, beneficially to a membrane. A photodetector (light sensor) is formed adjacent the cavity (such as on a membrane), and a VCSEL is attached to the silicon substrate such that light from the VCSEL irradiates the photodetector. Beneficially, the photodetector is a metal-semiconductor-metal photodetector. An optical element (a lens) and the end of an optical fiber are beneficially located in the cavity. The optical element couples light that passes through the photodetector into the optical fiber.
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