METHOD AND SYSTEM FOR DISPENSING RESIST SOLUTION
    1.
    发明申请
    METHOD AND SYSTEM FOR DISPENSING RESIST SOLUTION 审中-公开
    用于分配电阻溶液的方法和系统

    公开(公告)号:US20090317546A1

    公开(公告)日:2009-12-24

    申请号:US12534922

    申请日:2009-08-04

    CPC分类号: H01L21/6715 G03F7/162

    摘要: An apparatus and method for dispensing a solution on a substrate is described in which the solution is dispensed through a solution nozzle assembly while the substrate is rotated. As the solution is dispensed, the solution on the substrate forms a wave front that radially spreads from the substrate center to the substrate edge. The dispensing of the solution is performed in such a way that the solution is dispensed at a radial location substantially equivalent to or less than the radial location of the wave front at any instant in time.

    摘要翻译: 描述了一种在基板上分配溶液的装置和方法,其中溶液在基板旋转时通过溶液喷嘴组件分配。 当溶液被分配时,衬底上的溶液形成从衬底中心径向扩散到衬底边缘的波前。 以这样的方式进行溶液的分配,使得溶液在任何时刻基本上等于或小于波前的径向位置的径向位置分配。

    Method and system for dispensing resist solution
    2.
    发明授权
    Method and system for dispensing resist solution 失效
    分配抗蚀剂溶液的方法和系统

    公开(公告)号:US07670643B2

    公开(公告)日:2010-03-02

    申请号:US10880556

    申请日:2004-07-01

    IPC分类号: B05D1/02 B05D3/12

    CPC分类号: H01L21/6715 G03F7/162

    摘要: An apparatus and method for dispensing a solution on a substrate is described in which the solution is dispensed through a solution nozzle assembly while the substrate is rotated. As the solution is dispensed, the solution on the substrate forms a wave front that radially spreads from the substrate center to the substrate edge. The dispensing of the solution is performed in such a way that the solution is dispensed at a radial location substantially equivalent to or less than the radial location of the wave front at any instant in time.

    摘要翻译: 描述了一种在基板上分配溶液的装置和方法,其中溶液在基板旋转时通过溶液喷嘴组件分配。 当溶液被分配时,衬底上的溶液形成从衬底中心径向扩散到衬底边缘的波前。 以这样的方式进行溶液的分配,使得溶液在任何时刻基本上等于或小于波前的径向位置的径向位置分配。

    Method and system for dispensing resist solution
    3.
    发明申请
    Method and system for dispensing resist solution 失效
    分配抗蚀剂溶液的方法和系统

    公开(公告)号:US20060013953A1

    公开(公告)日:2006-01-19

    申请号:US10880556

    申请日:2004-07-01

    CPC分类号: H01L21/6715 G03F7/162

    摘要: An apparatus and method for dispensing a solution on a substrate is described in which the solution is dispensed through a solution nozzle assembly while the substrate is rotated. As the solution is dispensed, the solution on the substrate forms a wave front that radially spreads from the substrate center to the substrate edge. The dispensing of the solution is performed in such a way that the solution is dispensed at a radial location substantially equivalent to or less than the radial location of the wave front at any instant in time.

    摘要翻译: 描述了一种在基板上分配溶液的装置和方法,其中溶液在基板旋转时通过溶液喷嘴组件分配。 当溶液被分配时,衬底上的溶液形成从衬底中心径向扩散到衬底边缘的波前。 以这样的方式进行溶液的分配,使得溶液在任何时刻基本上等于或小于波前的径向位置的径向位置分配。

    Wireless transmission device and wireless reception device
    4.
    发明授权
    Wireless transmission device and wireless reception device 有权
    无线传输设备和无线接收设备

    公开(公告)号:US09281880B2

    公开(公告)日:2016-03-08

    申请号:US14239088

    申请日:2012-08-13

    摘要: A wireless reception device is notified of whether a multi-user MIMO signal transmitted from a wireless transmission device has undergone linear precoding or non-linear precoding without increasing the amount of control information. A wireless transmission device having a plurality of transmit antennas 303, for transmitting spatially multiplexed signals to a plurality of wireless reception devices includes a group construction unit 307 configured to classify the wireless reception devices into a plurality of groups and to determine a precoding scheme for each of the groups, a selection unit 315 configured to select one group from among the groups, and a precoding unit 323 configured to precode transmit data addressed to each of wireless reception devices belonging to the selected group, using a precoding scheme determined for the selected group.

    摘要翻译: 从无线发送装置发送的多用户MIMO信号是否已经经历了线性预编码或非线性预编码,而不增加控制信息量,通知无线接收装置。 具有用于将空间复用信号发送到多个无线接收装置的多个发送天线303的无线发送装置包括:组构建单元307,被配置为将无线接收装置分类为多个组,并且确定每个 组成的选择单元315,被配置为从组中选择一组;以及预编码单元323,被配置为使用为所选择的组确定的预编码方案来对寻址到​​属于所选择的组的无线接收装置中的每一个的发送数据进行预编码 。

    Wireless transmission apparatus, wireless reception apparatus, wireless communication system, control program and integrated circuit
    5.
    发明授权
    Wireless transmission apparatus, wireless reception apparatus, wireless communication system, control program and integrated circuit 有权
    无线发送装置,无线接收装置,无线通信系统,控制程序和集成电路

    公开(公告)号:US09209874B2

    公开(公告)日:2015-12-08

    申请号:US13882556

    申请日:2011-10-24

    摘要: The present invention switches an interference suppression system between a linear precoding and a nonlinear precoding in accordance with a communication environment. A wireless transmission apparatus is provided with a plurality of transmission antenna units (303), and multiplexes spatially and transmits a plurality of series of data with respect to at least one wireless reception apparatus, and includes a selection unit (307) configured to select any one precoding system from a plurality of types of precoding systems and a precoding unit (315) configured to carry out precoding with respect to the plurality of series of data using the selected precoding system. In addition, the selection unit selects either of a first precoding system carrying out linear processing with respect to the plurality of series of data or a second precoding system carrying out nonlinear processing with respect to the plurality of series of data.

    摘要翻译: 本发明根据通信环境在线性预编码和非线性预编码之间切换干扰抑制系统。 一种无线发送装置具备多个发送天线单元(303),在空间上进行多路复用,并相对于至少一个无线接收装置发送多个数据序列,并具有选择单元(307) 一种来自多种类型的预编码系统的预编码系统和预编码单元(315),其被配置为使用所选择的预编码系统对多个数据系列进行预编码。 此外,选择单元选择对多个数据系列进行线性处理的第一预编码系统或对多个数据系列执行非线性处理的第二预编码系统。

    Transmission apparatus, reception apparatus, wireless communication system, control program and integrated circuit
    6.
    发明授权
    Transmission apparatus, reception apparatus, wireless communication system, control program and integrated circuit 有权
    发送装置,接收装置,无线通信系统,控制程序和集成电路

    公开(公告)号:US09185577B2

    公开(公告)日:2015-11-10

    申请号:US13700754

    申请日:2011-05-13

    摘要: To realize transmission performances equivalent to those of an MU-MIMO BLAST ZF-THP system without increasing a signal processing amount in a base station apparatus in a downlink MU-MIMO transmission system. A transmission apparatus is provided with a plurality of transmission antennas, generates a transmission signal addressed to each reception apparatus based on information indicating spatial correlation of channels to and from a plurality of reception apparatuses, space-multiplexes the generated each transmission signal in the same wireless resource, and transmits it to each reception apparatus. The transmission apparatus includes: an ordering determination part 601 which determines an order in which a transmission signal addressed to each reception apparatus is generated based on information indicating spatial correlation of channels; a linear filter generation part 603 which generates a linear filter based on the determined order; a THP part 605 which performs a THP process by using the determined order and the linear filter; and a linear filter multiplication part 607 which multiplies an output of the THP part 605 by the linear filter.

    摘要翻译: 实现与MIMO-MIMO BLAST ZF-THP系统相当的传输性能,而不增加下行MU-MIMO传输系统中的基站装置中的信号处理量。 发送装置具有多个发送天线,基于表示与多个接收装置的频道的频道的空间相关性的信息,生成发往各接收装置的发送信号,对同一无线电中产生的各发送信号进行空间复用 资源,并将其发送到每个接收装置。 传输装置包括:排序确定部分601,其基于指示信道的空间相关性的信息来确定寻址到每个接收装置的发送信号的顺序; 线性滤波器生成部603,其基于所确定的次序生成线性滤波器; 通过使用确定的顺序执行THP处理的THP部件605和线性滤波器; 线性滤波器乘法部607,其将THP部605的输出与线性滤波器相乘。

    Base station device, terminal device, and wireless communication system using the base station device and the terminal device
    7.
    发明授权
    Base station device, terminal device, and wireless communication system using the base station device and the terminal device 有权
    基站装置,终端装置以及使用基站装置和终端装置的无线通信系统

    公开(公告)号:US09166658B2

    公开(公告)日:2015-10-20

    申请号:US13877368

    申请日:2011-10-03

    IPC分类号: H04W4/00 H04B7/04 H04B7/06

    摘要: A wireless communication system in which a base station apparatus having a plurality of transmission antennas and one or more terminal apparatuses communicate with each other is provided with at least two methods of a first feedback method and a second feedback method regarding propagation path information at the time of reception. In accordance with a communication condition between the base station apparatus and the terminal apparatus, or the function of the terminal apparatus, the terminal apparatus performs feedback by one of the two methods of the first feedback method and the second feedback method. The base station apparatus performs spatial multiplexing transmission on the basis of the propagation path information that has been fed back. Thus, in a system in which CSI is fed back for MIMO transmission, desired transmission characteristics can be efficiently obtained.

    摘要翻译: 具有多个发送天线和一个以上的终端装置的基站装置相互通信的无线通信系统具备关于该时刻的传播路径信息的第一反馈方法和第二反馈方法的至少两种方法 的接待。 根据基站装置与终端装置之间的通信条件或终端装置的功能,终端装置通过第一反馈方法和第二反馈方法的两种方法之一进行反馈。 基站装置根据反馈的传播路径信息进行空间复用传输。 因此,在反馈用于MIMO传输的系统中,可以有效地获得期望的传输特性。

    Receiver apparatus, communication system, reception method and communication method
    8.
    发明授权
    Receiver apparatus, communication system, reception method and communication method 有权
    接收装置,通信系统,接收方式和通信方式

    公开(公告)号:US08644424B2

    公开(公告)日:2014-02-04

    申请号:US13201234

    申请日:2010-02-12

    IPC分类号: H03D3/00

    摘要: A receiver apparatus receiving a quadrature-modulated, modulated wave, includes: a real-zero signal generator for adding a sinusoidal wave to the modulated wave to generate a real-zero signal; an in-phase and quadrature component detector for extracting an in-phase component signal and a quadrature component signal from the real-zero signal; a real-zero sequence generator for generating a real-zero sequence as a sequence of time points at which the in-phase component and quadrature component signals become zero; and a signal reconstruction unit for reproducing the in-phase component and quadrature component from the real-zero sequence. It is possible to provide a receiving apparatus that enables decoding of a received signal with high precision even when sufficient linearity cannot be secured in the analog circuit of the receiver apparatus.

    摘要翻译: 一种接收正交调制调制波的接收机装置,包括:实零信号发生器,用于将正弦波加到调制波上以产生实零信号; 同相和正交分量检测器,用于从实零信号中提取同相分量信号和正交分量信号; 用于产生实零序列作为同相分量和正交分量信号变为零的时间点序列的实零序列发生器; 以及信号重建单元,用于从实零序列再现同相分量和正交分量。 即使在接收装置的模拟电路中不能确保足够的线性度的情况下,也能够提供能够高精度地对接收信号进行解码的接收装置。

    BASE STATION APPARATUS, TERMINAL APPARATUS AND WIRELESS COMMUNICATION SYSTEM USING THEM
    9.
    发明申请
    BASE STATION APPARATUS, TERMINAL APPARATUS AND WIRELESS COMMUNICATION SYSTEM USING THEM 有权
    基站设备,终端设备和无线通信系统

    公开(公告)号:US20130121277A1

    公开(公告)日:2013-05-16

    申请号:US13700756

    申请日:2011-05-27

    IPC分类号: H04B7/06

    CPC分类号: H04B7/0697 H04B7/0617

    摘要: When signals received by receiving antennas included in each terminal are subjected to MMSE combining, it is configured that each terminal is able to grasp position of desired signal in signal vector obtained after combining. A base station 100 receives by a receiving antenna 23 from the terminal apparatus channel state information between a transmitting antenna 16 and spatial multiplexing object antennas included in each terminal apparatus. A transmit weight calculation unit 19 calculates a transmit weight for performing spatial multiplexing transmission to the terminal apparatus based on the channel state information. Transmit weight multiplication unit s 12 and 18 multiplies an information signal addressed to each terminal apparatus to be performed spatial multiplexing by the transmit weight. A signal multiplexing unit 13 multiplexes the information signal multiplied by the transmit weight and an information to specify the information signal that needs to be demodulated by each terminal apparatus.

    摘要翻译: 当通过每个终端中包含的接收天线接收到的信号进行MMSE组合时,配置为每个终端能够在组合后获得的信号向量中掌握期望信号的位置。 基站100由发送天线16和各终端装置中包含的空间复用对象天线之间的终端装置信道状态信息由接收天线23接收。 发送权重计算单元19基于信道状态信息计算用于对终端装置执行空间复用传输的发送权重。 发送权重乘法单元12和18将寻址到每个终端设备的信息信号乘以发送权重进行空间复用。 信号复用单元13将乘以发送权重的信息信号和用于指定每个终端装置需要解调的信息信号的信息进行复用。

    Method of manufacturing circuit board
    10.
    发明授权
    Method of manufacturing circuit board 有权
    电路板制造方法

    公开(公告)号:US08110118B2

    公开(公告)日:2012-02-07

    申请号:US11874286

    申请日:2007-10-18

    IPC分类号: H01B13/00

    摘要: An adhesive layer, an insulating layer and a copper foil are laminated together on both surfaces of a metallic base material by way of for example thermal press molding. In this case, openings (window holes) are formed in opposed positions on a portion of the adhesive layer. A circuit pattern is formed by etching on the copper foil in this state, followed by an external shape machining step of executing separation treatment reaching the metallic base material in predetermined positions including the openings. After that, a part of the insulating layer is cut off along the edge of the opening to obtain a circuit board with the end of the metallic base material exposed.

    摘要翻译: 粘合剂层,绝缘层和铜箔通过例如热压成型层叠在金属基材的两面上。 在这种情况下,在粘合剂层的一部分的相对位置上形成开口(窗孔)。 在该状态下通过对铜箔进行蚀刻而形成电路图案,接着进行外部形状加工步骤,在包括开口的预定位置执行到达金属基材的分离处理。 之后,绝缘层的一部分沿着开口的边缘被切除,以获得露出金属基材端部的电路板。