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公开(公告)号：US20090214689A1
公开(公告)日：2009-08-27
申请号：US12437368
申请日：2009-05-07
申请人： Todd C. Bailey , Stephen C. Johnson , Matthew E. Colburn , Byung-Jin Choi , Britain J. Smith , Carlton G. Willson , Sidlgata V. Sreenivasan , John G. Ekerdt
发明人： Todd C. Bailey , Stephen C. Johnson , Matthew E. Colburn , Byung-Jin Choi , Britain J. Smith , Carlton G. Willson , Sidlgata V. Sreenivasan , John G. Ekerdt
CPC分类号： B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00
摘要： One embodiment of the present invention is an imprint template for imprint lithography that comprises alignment marks embedded in bulk material of the imprint template.
摘要翻译： 本发明的一个实施例是用于压印光刻的压印模板，其包括嵌入压印模板的散装材料中的对准标记。
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公开(公告)号：US07708542B2
公开(公告)日：2010-05-04
申请号：US10747737
申请日：2003-12-29
申请人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton G. Willson , John G. Ekerdt
发明人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton G. Willson , John G. Ekerdt
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B29C35/0888 , B29C37/0053 , B29C43/003 , B29C2035/0827 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S977/887
摘要： Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.
摘要翻译： 描述了压印光刻模板，形成和使用模板的方法以及模板保持装置。 压印光刻模板可以包括在主体的表面上具有多个凹部的主体。 身体可以是对于激活光是基本上透明的材料。 多个凹部的至少一部分可以限定具有小于约250nm的特征尺寸的特征。 可以通过获得对于激活光而基本上透明并在模板的表面上形成多个或多个凹陷的材料来形成模板。 在一些实施例中，模板还可以包括至少一个对准标记。 在一些实施例中，模板还可以包括间隙感测区域。 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间，模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体，支撑板和耦合到主体的至少一个压电致动器。 压电致动器可以被配置为在使用期间改变模板的物理尺寸。
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公开(公告)号：US07229273B2
公开(公告)日：2007-06-12
申请号：US10755997
申请日：2004-01-13
申请人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton G. Willson , John G. Ekerdt
发明人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton G. Willson , John G. Ekerdt
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B29C35/0888 , B29C37/0053 , B29C43/003 , B29C2035/0827 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S977/887
摘要： The present invention includes a template comprising a plurality of protrusions and a plurality of recessions with a distance between a zenith of any of the plurality of protrusions and a nadir of any one of the plurality of recessions being less than 250 nm.
摘要翻译： 本发明包括一个模板，其包括多个突起和多个凹陷，多个凹陷之间的距离在多个突起中的任一个的顶点之间的距离和多个凹陷中的任一个的最低点之间小于250nm。
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公开(公告)号：US08033814B2
公开(公告)日：2011-10-11
申请号：US12715915
申请日：2010-03-02
申请人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton Grant Willson , John G. Ekerdt
发明人： Todd C. Bailey , Byung-Jin Choi , Matthew E. Colburn , Sidlgata V. Sreenivasan , Carlton Grant Willson , John G. Ekerdt
IPC分类号： B29C59/02
CPC分类号： G11B5/855 , B29C35/0888 , B29C37/0053 , B29C43/003 , B29C2035/0827 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S977/887
摘要： An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and an actuator system coupled to the body. The actuator system may be configured to alter a physical dimension of the template during use.
摘要翻译： 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间，模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体，支撑板和联接到主体的致动器系统。 致动器系统可以被配置为在使用期间改变模板的物理尺寸。
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公开(公告)号：US09223202B2
公开(公告)日：2015-12-29
申请号：US11774710
申请日：2007-07-09
申请人： Byung-Jin Choi , Sidlgata V. Sreenivasan , Carlton Grant Willson , Mattherw E. Colburn , Todd C. Bailey , John G. Ekerdt
发明人： Byung-Jin Choi , Sidlgata V. Sreenivasan , Carlton Grant Willson , Mattherw E. Colburn , Todd C. Bailey , John G. Ekerdt
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/16 , G03F7/164 , H01L2224/29012 , H01L2224/3003 , H01L2224/3016 , H01L2924/01067 , H01L2924/1461 , H01L2924/00
摘要： Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relative lateral motions between a fluid dispenser tip a substrate. Also described herein are methods and devices for creating a planar surface on a substrate using a substantially unpatterned planar template.
摘要翻译： 本文公开了一种用于在板状材料或基板的表面上分配流体的自动流体分配方法和系统，其包括用于压印光刻工艺的半导体晶片。 分配方法使用流体分配器和可在流体分配器尖端基底之间产生相对侧向运动的基底台。 本文还描述了使用基本上未图案化的平面模板在衬底上创建平面表面的方法和装置。
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6.发明授权公开(公告)号：US07303383B1
公开(公告)日：2007-12-04
申请号：US10864214
申请日：2004-06-09
CPC分类号： B29C35/0888 , B29C37/0053 , B29C43/003 , B29C43/021 , B29C2035/0827 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S101/36 , Y10T428/24802
摘要： The present invention includes an imprint lithography system for impinging a flux of light upon a liquid to polymerize the liquid, the system including, a source of light producing the flux of light; and a template having overlay marks being disposed between the liquid and the source of light and being opaque to the flux of light, with a pitch of the overlay marks establishing a polarization of the flux of light such that the flux of light impinges upon and polymerizes the liquid in superimposition with the overlay marks.
摘要翻译： 本发明包括一种用于将光束照射在液体上以使液体聚合的压印光刻系统，该系统包括产生光通量的光源; 并且具有覆盖标记的模板设置在液体和光源之间，并且对于光通量不透明，叠加标记的间距建立光通量的偏振，使得光束流入并聚合 液体与叠加标记叠加。
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7.发明授权公开(公告)号：US07186483B2
公开(公告)日：2007-03-06
申请号：US10805916
申请日：2004-03-22
CPC分类号： B29C35/0888 , B29C37/0053 , B29C43/003 , B29C43/021 , B29C2035/0827 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , Y10S101/36 , Y10T428/24802
摘要： The present invention includes a method of aligning a substrate and a template spaced-apart from the substrate with an activating light curable liquid disposed therebetween, the substrate having substrate alignment marks and the template having template alignment marks, the method including, reducing a distance between the substrate and the template to cause a spreading of the activating light curable liquid; and varying an overlay placement of the template with respect to the substrate such that the template alignment marks are substantially aligned with the substrate alignment marks before the spreading causes the activating light curable liquid to cover an area between the substrate alignment marks and the template alignment marks.
摘要翻译： 本发明包括一种将衬底和与衬底间隔开的模板与其间设置的活化光可固化液体对准的方法，所述衬底具有衬底对准标记，并且模板具有模板对准标记，该方法包括， 基板和模板，以引起活化光可固化液体的扩散; 并且改变模板相对于基板的覆盖布局，使得模板对准标记在扩展之前基本对准基板对准标记，使得激活光可固化液体覆盖基板对准标记和模板对准标记之间的区域 。
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公开(公告)号：US20090294059A1
公开(公告)日：2009-12-03
申请号：US12421170
申请日：2009-04-09
IPC分类号： B29C63/00
CPC分类号： G03F7/0002 , B29C43/021 , B29C43/50 , B29C2043/025 , B29C2043/5007 , B29C2043/5092 , B29C2791/008 , B82Y10/00 , B82Y40/00 , Y10T156/1168
摘要： An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.
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公开(公告)号：US07432634B2
公开(公告)日：2008-10-07
申请号：US11068526
申请日：2005-02-28
IPC分类号： H02N2/00
CPC分类号： G03F7/0002 , B29C43/021 , B29C43/50 , B29C2043/025 , B29C2043/5007 , B29C2043/5092 , B29C2791/008 , B82Y10/00 , B82Y40/00 , Y10T156/1168
摘要： An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.
摘要翻译： 用于控制与表面间隔开的物体的位移的装置包括具有限定第一旋转轴线的第一弯曲构件和限定第二旋转轴线的第二挠曲构件的挠曲系统。 身体联接到挠曲系统以围绕多个轴线移动。 致动系统联接到挠曲系统以选择性地限制身体沿着多个轴的子集的运动。
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公开(公告)号：US20110042345A1
公开(公告)日：2011-02-24
申请号：US12915298
申请日：2010-10-29
IPC分类号： C03C25/68
CPC分类号： G03F7/0002 , B29C43/021 , B29C43/50 , B29C2043/025 , B29C2043/5007 , B29C2043/5092 , B29C2791/008 , B82Y10/00 , B82Y40/00 , Y10T156/1168
摘要： Methods for manufacturing chucking systems are described. Generally, a plurality of flow holes may be provided in an optical flat. A surface of the optical flat may be masked and patterned to provide a desired feature (e.g., pins or grooves). The surface may etched to produce the desired feature on the surface of the optical flat.
摘要翻译： 描述制造夹紧系统的方法。 通常，可以在光学平面中设置多个流动孔。 光学平面的表面可以被掩模和图案化以提供期望的特征（例如，针或凹槽）。 可以蚀刻表面以在光学平面的表面上产生所需的特征。
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