利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

188 条记录 (耗时 0.048 秒)

    Device for holding a template for use in imprint lithography
    2.
    发明授权
    Device for holding a template for use in imprint lithography 有权
    用于保存用于压印光刻的模板的装置

    公开(公告)号：US07708542B2

    公开(公告)日：2010-05-04

    申请号：US10747737

    申请日：2003-12-29

    申请人： Todd C. Bailey ,  Byung-Jin Choi ,  Matthew E. Colburn ,  Sidlgata V. Sreenivasan ,  Carlton G. Willson ,  John G. Ekerdt

    发明人： Todd C. Bailey ,  Byung-Jin Choi ,  Matthew E. Colburn ,  Sidlgata V. Sreenivasan ,  Carlton G. Willson ,  John G. Ekerdt

    IPC分类号： B29C59/02

    CPC分类号： G11B5/855 ,  B29C35/0888 ,  B29C37/0053 ,  B29C43/003 ,  B29C2035/0827 ,  B29C2043/025 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F9/00 ,  Y10S977/887

    摘要： Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.

    摘要翻译： 描述了压印光刻模板，形成和使用模板的方法以及模板保持装置。 压印光刻模板可以包括在主体的表面上具有多个凹部的主体。 身体可以是对于激活光是基本上透明的材料。 多个凹部的至少一部分可以限定具有小于约250nm的特征尺寸的特征。 可以通过获得对于激活光而基本上透明并在模板的表面上形成多个或多个凹陷的材料来形成模板。 在一些实施例中，模板还可以包括至少一个对准标记。 在一些实施例中，模板还可以包括间隙感测区域。 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间，模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体，支撑板和耦合到主体的至少一个压电致动器。 压电致动器可以被配置为在使用期间改变模板的物理尺寸。

    Apparatus to control displacement of a body spaced-apart from a surface
    8.
    发明授权
    Apparatus to control displacement of a body spaced-apart from a surface 有权
    用于控制与表面间隔开的主体的位移的装置

    公开(公告)号：US07098572B2

    公开(公告)日：2006-08-29

    申请号：US10806956

    申请日：2004-03-23

    申请人： Byung Jin Choi ,  Sidlgata V. Sreenivasan ,  Stephen C. Johnson

    发明人： Byung Jin Choi ,  Sidlgata V. Sreenivasan ,  Stephen C. Johnson

    IPC分类号： H02N2/00

    CPC分类号： G03F9/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    摘要： An apparatus to control displacement of a body spaced-apart from a surface includes a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system to move about a plurality of axes. An actuation system is coupled to the flexure system to selectively constrain movement of the body along a subset of the plurality of axes.

    摘要翻译： 用于控制与表面间隔开的物体的位移的装置包括具有限定第一旋转轴线的第一弯曲构件和限定第二旋转轴线的第二挠曲构件的挠曲系统。 身体联接到挠曲系统以围绕多个轴线移动。 致动系统联接到挠曲系统以选择性地限制身体沿着多个轴的子集的运动。

    Apparatus to orientate a body with respect to a surface
    10.
    发明授权
    Apparatus to orientate a body with respect to a surface 有权
    使身体相对于表面定向的装置

    公开(公告)号：US06922906B2

    公开(公告)日：2005-08-02

    申请号：US10775707

    申请日：2004-02-10

    申请人： Byung Jin Choi ,  Sidlgata V. Sreenivasan ,  Stephen C. Johnson

    发明人： Byung Jin Choi ,  Sidlgata V. Sreenivasan ,  Stephen C. Johnson

    IPC分类号： G03F7/20 ,  G03F7/00 ,  G03F9/00 ,  H01L21/027 ,  H02N2/00 ,  G01B2/25

    CPC分类号： G03F9/00 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002

    摘要： An apparatus to orientate a body with respect to a surface spaced-apart from the body. The apparatus comprises a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system, and an actuation system is coupled to the flexure system. The body is coupled to the flexure system to rotate about the first and the second axes in response to movement caused by the actuation system. The movement of the body about the first axis being decoupled from movement of the body about the second axis.

    摘要翻译： 使身体相对于与身体间隔开的表面定向的装置。 该装置包括具有限定第一旋转轴线的第一弯曲构件和限定第二旋转轴线的第二挠曲构件的挠曲系统。 身体联接到挠曲系统，并且致动系统联接到挠曲系统。 身体耦合到挠曲系统以响应于由致动系统引起的移动而围绕第一和第二轴线旋转。 身体围绕第一轴线的运动与身体围绕第二轴线的移动分离。