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    Piezoelectric resonator and method for producing the same
    2.
    发明授权
    Piezoelectric resonator and method for producing the same 失效
    压电谐振器及其制造方法

    公开(公告)号：US07417360B2

    公开(公告)日：2008-08-26

    申请号：US11580032

    申请日：2006-10-13

    申请人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    发明人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    IPC分类号： H01L41/053

    CPC分类号： H03H3/02 ,  H03H9/02118 ,  H03H9/0514 ,  H03H9/132 ,  H03H9/172 ,  H03H9/564 ,  H03H9/568 ,  H03H9/706

    摘要： An upper electrode is provided on one main surface of a piezoelectric layer, and a lower electrode is provided on the other main surface thereof. A vibration section is an area in which the lower electrode, the piezoelectric layer and the upper electrode overlap in a vertical projection direction. Line electrodes for respectively connecting the lower electrode and the upper electrode to input/output electrodes are provided on the one main surface and the other main surface of the piezoelectric layer. The vibration section is placed on (connected to) the substrate via the support section. The support section is provided on an area of the piezoelectric layer excluding the area on which the vibration section is provided and the area on which the input/output electrodes and the line electrodes are provided.

    摘要翻译： 上电极设置在压电层的一个主表面上，下电极设置在另一个主表面上。 振动部是下部电极，压电体层和上部电极在垂直方向上重叠的区域。 用于将下电极和上电极分别连接到输入/输出电极的线电极设置在压电层的一个主表面和另一个主表面上。 振动部分经由支撑部分放置在（连接到）基板上。 支撑部设置在除了设置振动部的区域以外的压电层的区域和设置有输入输出电极和线电极的区域。

    Piezoelectric resonator and method for producing the same
    5.
    发明申请
    Piezoelectric resonator and method for producing the same 失效
    压电谐振器及其制造方法

    公开(公告)号：US20070090725A1

    公开(公告)日：2007-04-26

    申请号：US11580032

    申请日：2006-10-13

    申请人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    发明人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    IPC分类号： H01L41/00

    CPC分类号： H03H3/02 ,  H03H9/02118 ,  H03H9/0514 ,  H03H9/132 ,  H03H9/172 ,  H03H9/564 ,  H03H9/568 ,  H03H9/706

    摘要： An upper electrode 103 is provided on one main surface of a piezoelectric layer 101, and a lower electrode 102 is provided on the other main surface thereof. A vibration section 104 is an area in which the lower electrode 102, the piezoelectric layer 101 and the upper electrode 103 overlap in a vertical projection direction. Line electrodes 108 for respectively connecting the lower electrode 102 and the upper electrode 103 to input/output electrodes 107 are provided on the one main surface and the other main surface of the piezoelectric layer 101. The vibration section 104 is placed on (connected to) the substrate 105 via the support section 109. The support section 109 is provided on an area of the piezoelectric layer 101 excluding the area on which the vibration section 104 is provided and the area on which the input/output electrodes 107 and the line electrodes 108 are provided.

    摘要翻译： 上电极103设置在压电层101的一个主表面上，下电极102设置在其另一个主表面上。 振动部分104是下电极102，压电层101和上电极103在垂直投影方向上重叠的区域。 用于将下电极102和上电极103分别连接到输入/输出电极107的线电极108设置在压电层101的一个主表面和另一主表面上。振动部分104放置在（连接） 基板105经由支撑部109.支撑部109设置在除了设置有振动部104的区域之外的压电层101的区域以及输入/输出电极107和线电极108的区域 被提供。

    Film bulk acoustic wave resonator and method for manufacturing the same
    7.
    发明授权
    Film bulk acoustic wave resonator and method for manufacturing the same 失效
    薄膜体声波谐振器及其制造方法

    公开(公告)号：US07893793B2

    公开(公告)日：2011-02-22

    申请号：US11844809

    申请日：2007-08-24

    申请人： Tomohiro Iwasaki ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohide Kamiyama

    发明人： Tomohiro Iwasaki ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohide Kamiyama

    IPC分类号： H03H9/15 ,  H03H9/54 ,  H03H9/70

    CPC分类号： H03H9/177 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175 ,  H03H9/564 ,  H03H9/605

    摘要： A film bulk acoustic wave resonator including a piezoelectric body 1, and a first electrode 2 and a second electrode 3 that are provided respectively on the main surfaces of the piezoelectric body, the piezoelectric body being applied an electric field through the first and the second electrodes so as to generate a resonant vibration. A first mass load material portion 4 having an annular shape is provided outside the planar region of the first electrode on the main surface of the piezoelectric body, a mass load effect thereof being larger than that of the first electrode. The outer periphery of the first electrode and the inner periphery of the first mass load material portion are spaced apart from each other, whereby the first electrode and the first mass load material portion are electrically insulated from each other. The first mass load material portion has a laminated structure including a first auxiliary electrode layer 2a and a load material layer 4a formed on the auxiliary electrode layer. The first auxiliary electrode is formed with the same material to have the same thickness as the first electrode. Energy loss can be reduced, while the first mass load material portion can be formed easily with high precision.

    摘要翻译： 一种包括分别设置在压电体的主表面上的压电体1和第一电极2和第二电极3的薄膜体声波谐振器，压电体通过第一和第二电极施加电场 以产生共振振动。 具有环状的第一质量负荷材料部分4设置在压电体的主表面上的第一电极的平面区域的外侧，其质量负载效应大于第一电极的质量负载效应。 第一电极的外周和第一质量负载材料部的内周彼此间隔开，由此第一电极和第一质量负载材料部彼此电绝缘。 第一质量负载材料部分具有包括形成在辅助电极层上的第一辅助电极层2a和负载材料层4a的叠层结构。 第一辅助电极由相同的材料形成，以具有与第一电极相同的厚度。 能够容易地以高精度形成第一质量负荷材料部，能够减少能量损失。

    Dual mode piezoelectric filter, method of manufacturing the same, high frequency circuit component and communication device using the same
    8.
    发明授权
    Dual mode piezoelectric filter, method of manufacturing the same, high frequency circuit component and communication device using the same 有权
    双模式压电滤波器，其制造方法，高频电路元件及使用其的通信装置

    公开(公告)号：US07719390B2

    公开(公告)日：2010-05-18

    申请号：US12019330

    申请日：2008-01-24

    申请人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Takehiko Yamakawa ,  Tomohide Kamiyama

    发明人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Takehiko Yamakawa ,  Tomohide Kamiyama

    IPC分类号： H03H9/54 ,  H03H9/205 ,  H03H9/70 ,  H03H3/02

    CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H9/0207 ,  H03H2003/0428 ,  Y10T29/42

    摘要： A dual mode piezoelectric filter includes a piezoelectric material layer composed of a piezoelectric thin film of the high-cut type formed on a substrate, a first electrode and a second electrode formed on one of the major surfaces of the piezoelectric material layer with a gap provided therebetween, a third electrode formed on the other major surface of the piezoelectric material layer opposite to the first electrode, the second electrode, and the gap, and an interelectrode mass load element formed in the gap or at a position opposite to the gap on a surface of the piezoelectric material layer. The relationships (ρ1×h1)≦(ρa×ha) and (ρ2×h2)≦(ρa×ha) are satisfied, where h1 is the thickness and ρ1 is the density of the first electrode, h2 is the thickness and ρ2 is the density of the second electrode, and ha is the thickness and ρa is the density of the interelectrode mass load element. A filter characteristic with a smooth passband and low losses is obtained.

    摘要翻译： 双模式压电滤波器包括由形成在基板上的高切割类型的压电薄膜构成的压电材料层，第一电极和形成在压电材料层的一个主表面上的间隔设置的第二电极 其间形成在压电材料层的与第一电极，第二电极和间隙相反的另一个主表面上的第三电极，以及形成在间隙中或与间隙相对的位置处的电极间质量负载元件 压电材料层的表面。 满足关系（＆rgr; 1×h1）＆nlE;（＆rgr; a×ha）和（＆rgr; 2×h2）＆nlE;（＆rgr; a×ha），其中h1是厚度，＆rgr; 1是密度 的第一个电极，h2是厚度，＆rgr; 2是第二个电极的密度，ha是厚度，而a是电极间质量负载元件的密度。 获得具有平滑通带和低损耗的滤波器特性。

    Device including piezoelectric thin film and method for producing the same
    10.
    发明申请
    Device including piezoelectric thin film and method for producing the same 失效
    包括压电薄膜的装置及其制造方法

    公开(公告)号：US20070085633A1

    公开(公告)日：2007-04-19

    申请号：US11580139

    申请日：2006-10-13

    申请人： Hiroshi Nakatsuka ,  Keiji Onishi ,  Takehiko Yamakawa ,  Tomohiro Iwasaki ,  Tomohide Kamiyama

    发明人： Hiroshi Nakatsuka ,  Keiji Onishi ,  Takehiko Yamakawa ,  Tomohiro Iwasaki ,  Tomohide Kamiyama

    IPC分类号： H03H9/54

    CPC分类号： H03H9/173 ,  H01H57/00 ,  H01H2057/006 ,  H03H3/02 ,  H03H2003/021

    摘要： An acoustic resonator according to the present invention includes a substrate 105, a support section 104 provided on the substrate 105, a lower electrode 103 provided on the support section 104, a piezoelectric body 101 provided on the lower electrode 103, and an upper electrode 102 provided on the piezoelectric body 101. The lower electrode 103, the piezoelectric body 101 and the upper electrode 102 form a vibration section 107. The support section 104 for supporting the vibration section 107 is shaped such that at least one portion of a vertical cross-section thereof has a curvature.

    摘要翻译： 根据本发明的声谐振器包括基板105，设置在基板105上的支撑部分104，设置在支撑部分104上的下电极103，设置在下电极103上的压电体101和上电极102 设置在压电体101上。 下电极103，压电体101和上电极102形成振动部107。 用于支撑振动部分107的支撑部分104成形为使得其垂直横截面的至少一部分具有曲率。