摘要:
To obtain a flow sensor having excellent responsibility, sensitivity and reliability and high flow detection accuracy by suppressing the deformation of a diaphragm, first additional patterns are formed on a side opposite to connection patterns of a heating element so that thin film patterns formed on the diaphragm become almost symmetrical, thereby suppressing the deformation of the diaphragm caused by internal stress between a base film or protective film and a platinum film forming the thin film patterns and the differences of mechanical or thermal properties therebetween.
摘要:
A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.
摘要:
Gas temperature detection wiring is provided with a first wiring portion disposed parallel to and in close proximity to a flow rate detector portion for a length substantially equivalent to a length of the flow rate detector portion; and a second wiring portion disposed so as to extend from the first wiring portion to an end portion of a pectinate pattern of a gas temperature detector portion. The gas temperature detection wiring is formed so as to connect electrode terminals and the gas temperature detector portion. A high-thermal-resistance portion having increased thermal resistance is constructed by reducing a width of a portion of the second wiring portion.
摘要:
A flow rate-measuring device capable of measuring accurately a flow rate of fluid to be measured containing a drift or eddy as compared with a conventional device is provided. A flow rate-measuring passage 11 for measuring a flow rate of the fluid to be measured is constructed so that its opening area in an upstream region communicating to an inlet 111 gradually decreases from upstream to downstream. A flow rate-detecting element 31 is disposed near an outlet in the flow rate-measuring passage 11. The device is provided with a leak flow passage 18 allowing a part of the fluid which has flown in from the inlet 111 of the flow rate-measuring passage 11 to leak out of the flow rate-measuring passage 11 at a portion upstream from an outlet 112 of the flow rate-measuring passage 11, in particular upstream from a position where the flow rate-detecting element 31 is disposed.
摘要:
A flow rate measuring device includes a flow rate measuring duct for placement in a primary passage for a fluid, extending substantially parallel to the primary passage, and a flow rate detector in the flow rate measuring duct for measuring a flow rate of the fluid in the primary passage, the flow rate measuring duct having a downstream wall including a notch or a through hole. The downstream wall may include an air-permeable member. The flow rate measuring device may include a projection on an outer wall of the flow rate measuring duct upstream of the notch, through hole, or air-permeable member, the projection extending in a circumferential direction with respect to the flow rate measuring duct.
摘要:
A flow rate sensor comprises a fluid passage for a fluid to flow therealong; a main body structure arranged so as to turn its front end to the upstream side of the fluid and coaxially positioned within the fluid passage; and a detecting element disposed between the main body structure and the internal surface of the fluid passage. The main body structure is formed such that its cross section perpendicular to its central axis, at first becomes gradually larger from its front end towards its rear end and then becomes gradually smaller. The detecting element includes a ceramic substrate coated with a film made of a thermo-sensitive electrically resistant material. The film is formed into a meander pattern so as to form a flow rate detecting resistance. The detecting element further includes a fluid temperature compensating resistance.
摘要:
A thermosensitive flow rate detecting element having a flat substrate is provided with a gap having an opening on at least one side thereof for the flow of a fluid, an insulating support film provided on the one side of the substrate, a sensor unit which has a heating element for heating the fluid and a thermosensitive element for detecting temperature of the fluid provided in the upper position of the opening on the insulating support film, and a fluid temperature measuring element, provided at a distance from the sensor unit on the one side of the flat substrate, for detecting temperature of the fluid. The thermosensitive flow rate detecting element measures flow rate or flow velocity of the fluid on the basis of a temperature detected by the thermosensitive element, by keeping heating temperature of the heating element at a level higher than a temperature detected by the fluid temperature measuring element by a prescribed difference in temperature. A first notch is provided on the flat substrate near the fluid temperature measuring element and is formed by removing a part of the flat substrate from either side thereof so as not to reach the remaining side thereof.
摘要:
A heat-sensitive flow rate sensor in which a fluid shield is provided so as to cover at least part of a flow velocity probe disposed in a detecting tube, thereby preventing part of heat-sensitive resistor from being directly subjected to change in the flow velocity of a fluid. Temperature of the heat-sensitive resistor is maintained substantially constant even when the fluid flow rate has been drastically changed, thus providing good response characteristic of the flow rate sensor.
摘要:
A post in a fluid passage for passing a fluid flow extends across a part of the fluid flow; a measuring duct in the post extends through the post; and a flow rate detector is located in the measuring duct. The measuring duct has a fluid introduction port with an elongated shape, the measuring duct is constricted and has at least a portion located between the fluid introduction port and the flow rate detector, substantially smoothly narrowing toward a downstream direction of the flow in a longitudinal direction of the elongated shape.
摘要:
A diversion passage is constructed into an inverted U shape in which an upstream diversion passage and a downstream diversion passage each having a passage direction in a direction of projection of a detector flow tube communicate by means of a curved portion. An inflow port is constructed by removing a portion of a wall of the upstream diversion passage on an upstream side in the main direction of flow, and removing a portion of first and second side walls of the upstream diversion passage facing each other in a direction perpendicular to the main direction of flow and the direction of projection of the detector flow tube. In addition, a wall surface on a downstream side of the upstream diversion passage in the main direction of flow at the inflow port is formed into a curved surface shape that is gradually displaced upstream relative to the direction of projection of the detector flow tube to constitute an air lead-in surface.