公开(公告)号：US09551938B2

公开(公告)日：2017-01-24

申请号：US13366829

申请日：2012-02-06

申请人： Tomoyuki Matsuyama ,  Naonori Kita

发明人： Tomoyuki Matsuyama ,  Naonori Kita

IPC分类号： G03B27/68 ,  G03F7/20

CPC分类号： G03F7/70116 ,  G03F7/70125 ,  G03F7/705 ,  G03F7/70625

摘要： Disclosed is a light source optimizing method wherein: a light source shape obtained as the result of SMO is set as a target, the SMO being an optimizing calculation method for optimizing a mask pattern and illumination light source, a spatial light modulator is controlled such that a deviation from the target is within an acceptable range, and the shape of the illumination light source is set; the image of the pattern obtained as the results of the SMO is formed on a wafer, using illumination light emitted from the illumination light source having the set light source shape, an OPE is evaluated as image-forming performance using the detection results obtained by detecting the image of the pattern thus formed; and the light source shape is optimized.

摘要翻译： 公开了一种光源优化方法，其中将作为SMO的结果获得的光源形状设置为目标，SMO是用于优化掩模图案和照明光源的优化计算方法，空间光调制器被控制为使得 与目标的偏差在可接受的范围内，照明光源的形状被设定， 使用从具有设定光源形状的照明光源发射的照明光，在晶片上形成作为SMO的结果获得的图案的图像，使用通过检测获得的检测结果将OPE评价为图像形成性能 由此形成的图案的图像; 光源形状优化。

公开(公告)号：US20060181690A1

公开(公告)日：2006-08-17

申请号：US11403922

申请日：2006-04-14

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G03B27/42

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

公开(公告)号：US20060166142A1

公开(公告)日：2006-07-27

申请号：US11352263

申请日：2006-02-13

申请人： Mitsunori Toyoda ,  Naonori Kita

发明人： Mitsunori Toyoda ,  Naonori Kita

IPC分类号： G03C5/00

CPC分类号： G03F7/70075 ,  G01M11/0207

摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.

公开(公告)号：US20100103398A1

公开(公告)日：2010-04-29

申请号：US12529614

申请日：2008-03-11

申请人： Naonori Kita

发明人： Naonori Kita

IPC分类号： G03B27/54 ,  G02B27/10

CPC分类号： G02B27/0905 ,  G02B27/0966 ,  G03F7/70075 ,  G03F7/70566

摘要： An optical integrator has a plurality of wavefront dividing elements two-dimensionally arrayed, and is so configured that a ray group obliquely incident to an optical-axis center of an entrance face of each wavefront dividing element is emitted in parallel with the optical axis from the wavefront dividing element. In each of a required number of wavefront dividing elements out of the plurality of wavefront dividing elements, at least one curved optical face of the wavefront dividing element is formed as inclined around an axis along a predetermined direction passing an optical-axis center of an entrance face of the wavefront dividing element and being perpendicular to the optical axis AXe.

摘要翻译： 光学积分器具有二维排列的多个波阵面分割元件，并且被配置为使得倾斜入射到每个波阵面元素的入射面的光轴中心的射线组从光轴平行地发射 波前分割元素。 在多个波阵面分割元件中的所需数量的波前分割元件中的每一个中，波前分割元件的至少一个弯曲光学面形成为沿着通过入口的光轴中心的预定方向的轴线倾斜 并且垂直于光轴ax。

公开(公告)号：US07618767B2

公开(公告)日：2009-11-17

申请号：US11352263

申请日：2006-02-13

申请人： Mitsunori Toyoda ,  Naonori Kita

发明人： Mitsunori Toyoda ,  Naonori Kita

IPC分类号： H01L21/00

CPC分类号： G03F7/70075 ,  G01M11/0207

摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.

摘要翻译： 公开了一种使用多项式来评价一维照明分布的评价方法，所述方法包括以下步骤：设置在闭合间隔中正交的一维多项式作为多项式; 并用功率多项式逼近一维照明分布，以获得功率多项式的各项的系数。

公开(公告)号：US08638420B2

公开(公告)日：2014-01-28

申请号：US12529614

申请日：2008-03-11

申请人： Naonori Kita

发明人： Naonori Kita

IPC分类号： G03B27/54

CPC分类号： G02B27/0905 ,  G02B27/0966 ,  G03F7/70075 ,  G03F7/70566

摘要： An optical integrator has a plurality of wavefront dividing elements two-dimensionally arrayed, and is so configured that a ray group obliquely incident to an optical-axis center of an entrance face of each wavefront dividing element is emitted in parallel with the optical axis from the wavefront dividing element. In each of a required number of wavefront dividing elements out of the plurality of wavefront dividing elements, at least one curved optical face of the wavefront dividing element is formed as inclined around an axis along a predetermined direction passing an optical-axis center of an entrance face of the wavefront dividing element and being perpendicular to the optical axis AXe.

摘要翻译： 光学积分器具有二维排列的多个波阵面分割元件，并且被配置为使得倾斜入射到每个波阵面元素的入射面的光轴中心的射线组从光轴平行地发射 波前分割元素。 在多个波阵面分割元件中的所需数量的波前分割元件中的每一个中，波前分割元件的至少一个弯曲光学面形成为沿着通过入口的光轴中心的预定方向的轴线倾斜 并且垂直于光轴ax。

公开(公告)号：US08139198B2

公开(公告)日：2012-03-20

申请号：US11403922

申请日：2006-04-14

申请人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

发明人： Hisashi Nishinaga ,  Ikuo Hikima ,  Mitsunori Toyoda ,  Masahiro Nakagawa ,  Tsuneyuki Hagiwara ,  Yasushi Mizuno ,  Naonori Kita ,  Osamu Tanitsu ,  Nozomu Emura

IPC分类号： G03B27/42 ,  G03B27/58

CPC分类号： G03F7/7015 ,  G03F7/70058 ,  G03F7/70341 ,  G03F7/706 ,  G03F7/7085

摘要： A part of exposure beam through a liquid via a projection optical system enters a light-transmitting section, enters an optical member without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.

摘要翻译： 通过投影光学系统通过液体的曝光束的一部分进入透光部分，而不通过气体进入光学部件并被聚焦。 即使投影光学系统的数值孔径增加，曝光装置接收来自投影光学系统的曝光光也进行各种测量。

公开(公告)号：US07706072B2

公开(公告)日：2010-04-27

申请号：US11793448

申请日：2005-12-09

申请人： Naonori Kita

发明人： Naonori Kita

IPC分类号： G02B27/10

CPC分类号： G02B27/0927 ,  G02B27/0961 ,  G03F7/70075

摘要： An optical integrator has characteristics to suppress influence of relative positioning error of a pair of optical members on an illuminance distribution and on a shape of an illumination field. The optical integrator is a wavefront splitting type optical integrator having a first optical member and a second optical member in order from the entrance side of light. The first optical member has first entrance surfaces having a refractive power in a first direction and substantially no refractive power in a second direction, and first exit surfaces having a refractive power in the first direction and substantially no refractive power in the second direction. The second optical member has second entrance surfaces having a refractive power in the second direction and substantially no refractive power in the first direction, and second exit surfaces having a refractive power in the second direction and substantially no refractive power in the first direction.

摘要翻译： 光学积分器具有抑制一对光学构件的相对定位误差对照度分布和照明场的形状的影响的特性。 光学积分器是从光入射侧起依次具有第一光学构件和第二光学构件的波前分割型光学积分器。 第一光学构件具有在第一方向上具有折射力并且在第二方向上基本上不具有折光力的第一入射表面，以及在第一方向上具有折射力并且在第二方向上基本上没有折射光焦度的第一出射表面。 第二光学构件具有在第二方向上具有屈光力并且在第一方向上基本上没有折光力的第二入射表面，并且第二出射表面在第二方向上具有折射光焦度，并且在第一方向上基本上没有折射光焦度。

公开(公告)号：US09389519B2

公开(公告)日：2016-07-12

申请号：US13011320

申请日：2011-01-21

申请人： Naonori Kita

发明人： Naonori Kita

IPC分类号： G01B9/00 ,  G03B27/32 ,  G03B27/54 ,  G03B27/74 ,  G03F7/20 ,  G01M11/02

CPC分类号： G03F7/70941 ,  G01M11/02 ,  G03F7/70133 ,  G03F7/70591 ,  G03F7/706

摘要： A measuring apparatus for measuring a pupil transmittance distribution of an optical system to be examined has a diffraction grating mounted on a first surface in an optical Fourier transform relation with a pupil of the optical system, an illumination optical system which makes a beam inclined relative to the optical axis, incident to a predetermined position on the first surface so that a +first-order diffracted beam, generated through the diffraction grating, passes through a first pupil partial region in an effective region of the pupil and so that a −first-order diffracted beam, generated through the diffraction grating, passes through a second pupil partial region, and a measuring unit which measures an intensity of the +first-order diffracted beam, and an intensity of the −first-order diffracted beam, and determines a ratio of a pupil transmittance in the first and second pupil partial region regions.

摘要翻译： 用于测量待检光学系统的光瞳透射率分布的测量装置具有安装在与光学系统的光瞳的光学傅立叶变换关系的第一表面上的衍射光栅，照明光学系统，其使光束相对于 光轴入射到第一表面上的预定位置，使得通过衍射光栅产生的+一级衍射光束通过瞳孔的有效区域中的第一光瞳部分区域，并且使得第一 - 通过衍射光栅产生的次级衍射光束通过第二光瞳部分区域，测量单位测量+一级衍射光束的强度和一级衍射光束的强度，并确定 瞳孔透射率在第一和第二光瞳部分区域中的比率。

公开(公告)号：US20080225257A1

公开(公告)日：2008-09-18

申请号：US12068828

申请日：2008-02-12

申请人： Naonori Kita

发明人： Naonori Kita

IPC分类号： G03B27/54 ,  G02B27/30

CPC分类号： G03F7/70075 ,  G02B5/045 ,  G02B27/0927 ,  G02B27/0966 ,  G02B27/0972 ,  G03F7/7015

摘要： An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.

摘要翻译： 一种光学积分器系统包括：第一光学积分器，包括沿预定方向并列布置的多个第一波前分割元件;以及第二光学积分器，包括沿着预定方向并置布置的多个第二波阵面分割元件， 从灯的入口侧订购。 第一波前分割元件被构造成使得倾斜入射到入射表面的光轴上的中心的光线与光轴平行地发射。 第二波前分割元件被构造成使得倾斜入射到入射表面的光轴上的中心的光线相对于光轴倾斜地发射。