利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

31 条记录 (耗时 0.039 秒)

    Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
    7.
    发明授权
    Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method 失效
    照明分布评价方法，光学构件制造方法，照明光学装置，曝光装置和曝光方法

    公开(公告)号：US07618767B2

    公开(公告)日：2009-11-17

    申请号：US11352263

    申请日：2006-02-13

    申请人： Mitsunori Toyoda ,  Naonori Kita

    发明人： Mitsunori Toyoda ,  Naonori Kita

    IPC分类号： H01L21/00

    CPC分类号： G03F7/70075 ,  G01M11/0207

    摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.

    摘要翻译： 公开了一种使用多项式来评价一维照明分布的评价方法，所述方法包括以下步骤：设置在闭合间隔中正交的一维多项式作为多项式; 并用功率多项式逼近一维照明分布，以获得功率多项式的各项的系数。

    Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
    8.
    发明申请
    Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method 审中-公开
    照明分布评价方法，光学构件制造方法，照明光学装置，曝光装置和曝光方法

    公开(公告)号：US20100002219A1

    公开(公告)日：2010-01-07

    申请号：US12585211

    申请日：2009-09-08

    申请人： Mitsunori Toyoda ,  Naonori Kita

    发明人： Mitsunori Toyoda ,  Naonori Kita

    IPC分类号： G03B27/72 ,  G01J1/42

    CPC分类号： G03F7/70075 ,  G01M11/0207

    摘要： There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.

    摘要翻译： 公开了一种使用多项式来评价一维照明分布的评价方法，所述方法包括以下步骤：设置在闭合间隔中正交的一维多项式作为多项式; 并用功率多项式逼近一维照明分布，以获得功率多项式的各项的系数。

    Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method
    9.
    发明授权
    Diffractive optical device, refractive optical device, illumination optical system, exposure apparatus and exposure method 失效
    衍射光学装置，折射光学装置，照明光学系统，曝光装置和曝光方法

    公开(公告)号：US07095560B2

    公开(公告)日：2006-08-22

    申请号：US10860161

    申请日：2004-06-04

    申请人： Mitsunori Toyoda ,  Osamu Tanitsu

    发明人： Mitsunori Toyoda ,  Osamu Tanitsu

    IPC分类号： G02B5/18 ,  G02B27/10 ,  G03B27/54

    CPC分类号： G03F7/701 ,  G03F7/70108 ,  G03F7/70158

    摘要： An illumination optical system having a more simplified structure forms various quadrupole-shaped secondary light sources with two-time rotational symmetry with respect to an optical axis. The apparatus can provide illumination conditions that differ in two perpendicular directions on a radiation-receiving plane. In order to form a secondary light source with a quadrupole-shaped light intensity distribution on an illumination pupil plane, a diffractive optical device is provided in which an entrance light beam is converted into four light beams, and a light beam having a shape of four points centered about the optical axis is formed in a far field. The diffractive optical device is provided with a first diffractive optical member that is rotatable about a first axis parallel to the optical axis, and a second diffractive optical member that is rotatable about a second axis parallel to the optical axis, and that is arranged adjacent to the first diffractive optical member. A refractive optical device having first and second refractive optical members accomplishes similar results.

    摘要翻译： 具有更简化的结构的照明光学系统形成相对于光轴具有两次旋转对称性的各种四极形二次光源。 该装置可以提供在辐射接收平面上在两个垂直方向上不同的照明条件。 为了在照明光瞳平面上形成具有四极形光强度分布的二次光源，提供了一种衍射光学器件，其中入射光束被转换为四个光束，并且具有四个形状的光束 以远轴为中心的点形成在远场中。 衍射光学装置设置有可围绕平行于光轴的第一轴线旋转的第一衍射光学构件和可绕平行于光轴的第二轴线旋转的第二衍射光学构件，并且其被布置为 第一衍射光学构件。 具有第一和第二折射光学构件的折射光学装置也实现了类似的结果。

    Optical illumination device, exposure device and exposure method
    10.
    发明授权
    Optical illumination device, exposure device and exposure method 有权
    光学照明装置，曝光装置和曝光方法

    公开(公告)号：US06913373B2

    公开(公告)日：2005-07-05

    申请号：US10445022

    申请日：2003-05-27

    申请人： Hirohisa Tanaka ,  Osamu Tanitsu ,  Mitsunori Toyoda

    发明人： Hirohisa Tanaka ,  Osamu Tanitsu ,  Mitsunori Toyoda

    IPC分类号： G02B19/00 ,  G02B3/00 ,  G02B3/06 ,  G03F7/20 ,  H01L21/027 ,  G02B27/10 ,  F21V5/00

    CPC分类号： G03F7/70075 ,  G03F7/70158

    摘要： The present invention provides an optical illumination device that permits an increase in the fill of a multiplicity of light sources that constitute a secondary source formed on an illuminated pupil plane. A fly's eye lens that forms a multiplicity of light sources from a light beam emitted by an optical integrator is disposed in the optical path between the optical integrator and an irradiation surface. The fly's eye lens comprises, in order from the light-source side, a first fly's eye member and a second fly's eye member. A cylindrical lens group arranged in a first direction is formed on each of the light source-side surface of a first fly's eye member and the light source-side surface of a second fly's eye member, and a cylindrical lens is group arranged in a second direction orthogonal to the first direction is formed on each of the irradiation surface side surface of the first fly's eye member and the irradiation surface side surface of the second fly's eye member.

    摘要翻译： 本发明提供了一种光学照明装置，其允许增加构成在照明瞳孔平面上形成的次级光源的多个光源的填充。 从光学积分器发射的光束形成多个光源的飞眼镜片设置在光学积分器和照射表面之间的光路中。 蝇眼透镜从光源侧依次包括第一蝇眼部件和第二蝇眼部件。 在第一飞眼构件的光源侧表面和第二蝇眼构件的光源侧表面的每一个上形成沿第一方向布置的柱面透镜组，并且在第二方向上布置有圆柱形透镜 在第一蝇眼部件的照射面侧面和第二蝇眼部件的照射面侧面的每一个上形成与第一方向正交的方向。