公开(公告)号：US08348583B2

公开(公告)日：2013-01-08

申请号：US10036802

申请日：2001-12-21

申请人： Toshiaki Fujii ,  Osamu Horita ,  Koji Ohyama ,  Toshiya Nakayama ,  Fumio Sakiya ,  Mineo Kinpara

发明人： Toshiaki Fujii ,  Osamu Horita ,  Koji Ohyama ,  Toshiya Nakayama ,  Fumio Sakiya ,  Mineo Kinpara

IPC分类号： B65G49/07

CPC分类号： H01L21/67772

摘要： A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.

摘要翻译： 提供一种装载机，其设置在低洁净室和低洁净室之间的边界的低洁净室中，用于在容纳无尘物品的容器的内部和高洁净室之间运送无尘物品， 包括用于安装所述容器的可移动台; 开口部分，无尘物品通过该开口部分在容器和高洁净室之间输送; 用于打开和关闭开口部分的门; 用于当容器接近门时统一容器和门的盖的统一装置; 以及驱动装置，用于将盖和门一体地移动到装载机内，以打开和关闭开口部分和容器。

公开(公告)号：US06395240B1

公开(公告)日：2002-05-28

申请号：US09555381

申请日：2000-05-30

申请人： Toshiaki Fujii ,  Osamu Horita

发明人： Toshiaki Fujii ,  Osamu Horita

IPC分类号： B01J1908

CPC分类号： H01L21/67393 ,  H01L21/67017

摘要： A carrier box 21 for a semiconductor substrate, including an opening and closing mechanism for taking the semiconductor in or out of the box 21. The box 21 is provided with a gas cleaning device A-2 which uses a photo-electron or the photo-catalyst actuated by light irradiation for cleaning an inside of the box, or a gas cleaning unit including the gas cleaning device and a rechargeable battery for supplying the gas cleaning device with electricity and integrated into the gas cleaning unit, and thereby providing a practically efficient function to remove particles or gaseous harmful components.

摘要翻译： 一种用于半导体衬底的载体盒21，包括用于将半导体插入或取出盒21的开闭机构。盒21设置有使用光电子或光电子的气体净化装置A-2， 通过光照射来驱动以清洁盒子内部的催化剂，或包括气体清洁装置的气体净化单元和用于向气体净化装置供电并集成到气体净化单元中的可再充电电池，从而提供实际有效的功能 去除颗粒或气体有害成分。

公开(公告)号：US5721428A

公开(公告)日：1998-02-24

申请号：US579633

申请日：1995-12-26

申请人： Yoshihiko Naito ,  Kazutoshi Nagai ,  Osamu Horita

发明人： Yoshihiko Naito ,  Kazutoshi Nagai ,  Osamu Horita

IPC分类号： G01N27/62 ,  H01J49/30 ,  B01D59/44 ,  H01J49/00

CPC分类号： H01J49/30

摘要： A magnetic field type mass spectrometer having an ion source, an ion accelerator, a mass separation magnet forming an analyzing part which changes the trajectory of ions by a magnetic field of the mass separation magnet, and a current detector, wherein the mass separation magnet is installed so that ions move along a trajectory which turns several times in the analyzing part, and repelling electrodes are installed at turning points of the ions, whereby ions generated from the ion source are caused to move along a trajectory which turns several times in the analyzing part. Mass separation is carried out along each trajectory, which provides high resolution.

摘要翻译： 一种磁场型质谱仪，具有离子源，离子加速器，形成通过质量分离磁体的磁场改变离子轨迹的分析部的质量分离磁体和电流检测器，其中质量分离磁体为 安装成使得离子沿着在分析部分中转动多次的轨迹移动，并且排斥电极安装在离子的转折点处，从而使离子源产生的离子沿着在分析中转动多次的轨迹移动 部分。 沿着每个轨迹进行质量分离，提供高分辨率。

公开(公告)号：US20060068173A1

公开(公告)日：2006-03-30

申请号：US11113244

申请日：2005-04-25

申请人： Masaaki Kajiyama ,  Osamu Horita

发明人： Masaaki Kajiyama ,  Osamu Horita

IPC分类号： B32B15/04 ,  B41M5/00 ,  B05D1/36 ,  B05D1/18 ,  C23C16/00 ,  B05B5/025 ,  B21D39/00

CPC分类号： B05C3/10 ,  C23C18/14 ,  C23C18/1608 ,  C23C18/1612 ,  C23C18/165 ,  C23C18/1692 ,  C23C18/206 ,  C23C18/2066 ,  C23C18/30 ,  C25D7/123 ,  C25D17/001 ,  H05K3/185 ,  H05K3/387 ,  H05K2201/0129 ,  H05K2203/092 ,  H05K2203/107 ,  Y10T428/12556 ,  Y10T428/24802 ,  Y10T428/31678

摘要： A solvent containing an organic or inorganic metal compound containing a metal catalyst that serves as a plating seed is applied to a plastic substrate and dried, thereby forming a metal compound film, and then, the metal compound film is irradiated with an energy beam, such as an electron beam, to precipitate the metal catalyst. By irradiating a local area of the metal compound film with the energy beam, the chemical reaction of metal catalyst precipitation can be caused locally in the irradiated area, and thus, a patterned metal catalyst film can be formed. Once the substrate is irradiated with the energy beam, the surface may be molten to trap the metal catalyst to an extremely shallow depth, so that the bonding between the substrate and the metal catalyst is enhanced. Thus, the metal catalyst film becomes harder to peel off the substrate.

摘要翻译： 将含有含有作为电镀种子的金属催化剂的有机或无机金属化合物的溶剂涂布在塑料基板上并干燥，形成金属化合物膜，然后用能量束照射金属化合物膜 作为电子束，以沉淀金属催化剂。 通过用能量束照射金属化合物膜的局部区域，可以在照射区域局部引起金属催化剂沉淀的化学反应，从而可以形成图案化的金属催化剂膜。 一旦基板被能量束照射，表面可以被熔化，以将金属催化剂捕获到非常浅的深度，从而增强了基板和金属催化剂之间的结合。 因此，金属催化剂膜变得难以从基板剥离。

公开(公告)号：US5565680A

公开(公告)日：1996-10-15

申请号：US517793

申请日：1995-08-22

申请人： Yoshihiko Naito ,  Osamu Horita ,  Kazutoshi Nagai

发明人： Yoshihiko Naito ,  Osamu Horita ,  Kazutoshi Nagai

IPC分类号： H01J49/36 ,  B01D59/44 ,  H01J49/00

CPC分类号： H01J49/401

摘要： A compact mass spectrometer apparatus is presented to enable accurate qualitative and quantitative analyses of target ions. The apparatus can operate in a relatively poor vacuum in the range of 10.sup.-2 to 10.sup.-3 torr compared with the conventional requirement of 10.sup.-6 to 10.sup.-8 torr while providing precision results with lesser number of electrodes than the conventional mass spectrometer. The separation of the ionic species is achieved through two effects: flight time differentials produced by varying mass/charge ratios of the sample ions; as well as high frequency resonance separation by synchronizing the injection of ions with high frequency electric field applied to an electrode system having equi-potential space and high frequency space. The resulting dispersion in the wide energy spectra of the sample ions serves to accurately identify the sample ions both qualitatively and quantitatively. The spectra dispersion is achieved by modulating the ion beam with application of suitable magnitude and phase angle of the high frequency voltage, and allowing only those ions having the maximum kinetic energy to pass through to a collector electrode. The analyses are based on measurements of the maximum ion current flowing in the collector electrode.

摘要翻译： 提出了一种紧凑的质谱仪装置，以实现目标离子的准确定性和定量分析。 该设备可以在10-2至10-3托的范围内的相对较差的真空中操作，与传统的10-6至10-8托的要求相比，同时提供比常规质谱仪更少数量的电极的精确结果。 离子物质的分离通过两种效应来实现：通过改变样品离子的质量/电荷比产生的飞行时间差; 以及通过使离子注入与施加到具有等势空间和高频空间的电极系统的高频电场同步的高频谐振分离。 在样品离子的宽能谱中产生的分散物用于在定性和定量上准确地鉴定样品离子。 通过施加适当的高频电压幅度和相位角调制离子束，并且只允许具有最大动能的那些离子通过到集电极来实现光谱色散。 分析基于在集电极中流动的最大离子电流的测量。