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公开(公告)号：US20060066215A1
公开(公告)日：2006-03-30
申请号：US11239215
申请日：2005-09-30
申请人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Hiroshi Kikuchi , Yasushi Sano , Nobuyuki Ushifusa , Nobuhiko Fukuoka , Etsuko Nishimura , Takuya Takahashi
发明人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Hiroshi Kikuchi , Yasushi Sano , Nobuyuki Ushifusa , Nobuhiko Fukuoka , Etsuko Nishimura , Takuya Takahashi
CPC分类号： H01J29/02 , H01J9/02 , H01J31/127
摘要： An upper bus electrode is formed as a laminated wire of a metal film lower layer, a metal film intermediate layer and a metal film upper layer. Al lower in electrode potential is used as a low resistance material for the metal film intermediate layer of the upper bus electrode, while Cr high in heat resistance and oxidation resistance and higher in electrode potential than Al is used for the metal film lower and upper layers disposed as upper and lower layers. Al and Cr are selectively etched so that the metal film lower layer projects on one side and has an undercut on the other side with respect to the metal film intermediate layer. Thus, when the upper bus electrode has a structure using a laminated wire made of metal high in heat resistance and oxidation resistance, and metal low in resistance and sandwiched in the metal high in heat resistance and oxidation resistance, so as to separate an upper electrode from upper electrodes by self-alignment, deformation of the undercut portion due to oxidization of a side surface of the low-resistance metal is suppressed to improve the self-alignment separation characteristic of the upper electrode.
摘要翻译： 上部总线电极形成为金属膜下层，金属膜中间层和金属膜上层的层叠线。 电极电位的低电位被用作上部总线电极的金属膜中间层的低电阻材料，而与Al相比，耐热性和抗氧化性高，电极电位高的Cr用于金属膜下层和上层 作为上层和下层排列。 Al和Cr被选择性地蚀刻，使得金属膜下层在一侧突出，并且在金属膜中间层的另一侧具有底切。 因此，当上部总线电极具有使用由耐热性和抗氧化性高的金属制成的层叠线的结构，并且具有低电阻的金属并且被夹在金属中的耐热性和抗氧化性高的结构时，分离上电极 通过自对准从上部电极，抑制由于低电阻金属的侧面的氧化引起的底切部分的变形，从而提高上部电极的自对准分离特性。
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公开(公告)号：US20070148464A1
公开(公告)日：2007-06-28
申请号：US11640872
申请日：2006-12-19
申请人： Etsuko Nishimura , Takuya Takahashi , Takaaki Suzuki , Toshiaki Kusunoki , Masakazu Sagawa , Naohiro Horiuchi , Nobuhiko Fukuoka , Nobuyuki Ushifusa
发明人： Etsuko Nishimura , Takuya Takahashi , Takaaki Suzuki , Toshiaki Kusunoki , Masakazu Sagawa , Naohiro Horiuchi , Nobuhiko Fukuoka , Nobuyuki Ushifusa
IPC分类号： B32B17/10
CPC分类号： H01J31/127 , H01J9/022 , H01J29/04 , Y10T428/31
摘要： Although sintered wire with lower resistance was preferable as a scan line and a signal line in conventional art in order to make a voltage drop small, there was a problem in electric connection with an electrode which constructs a cathode. In the present invention, a cathode which has an electron-emitting region 16 on a substrate 10 is constructed of a base electrode 11, a top electrode 13, and a protective insulating film 14 sandwiched by these electrodes, the base electrode 11 becomes a signal line, and sintered wire 18, used as a scan line, and the top electrode 13 are connected with an sub-electrode 17. The sub-electrode 17 includes metal included in the sintered wire 18, and metal included in the top electrode 13.
摘要翻译： 虽然以往的技术中，作为扫描线和信号线，为了降低电压降，虽然电阻较低的烧结线优选，但与构成阴极的电极的电连接存在问题。 在本发明中，在基板10上具有电子发射区16的阴极由基极11，顶电极13和被这些电极夹持的保护绝缘膜14构成，基极11成为信号 用作扫描线的线和烧结线18，并且顶电极13与子电极17连接。 子电极17包括烧结线18中包括的金属和包括在顶部电极13中的金属。
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公开(公告)号：US20060284540A1
公开(公告)日：2006-12-21
申请号：US11453331
申请日：2006-06-15
申请人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Tatsumi Hirano , Etsuko Nishimura , Yoshiro Mikami , Yoshiyuki Kaneko , Tomoki Nakamura , Katsuhide Aoto
发明人： Toshiaki Kusunoki , Masakazu Sagawa , Kazutaka Tsuji , Tatsumi Hirano , Etsuko Nishimura , Yoshiro Mikami , Yoshiyuki Kaneko , Tomoki Nakamura , Katsuhide Aoto
CPC分类号： H01J29/481 , B82Y10/00 , H01J2201/30446 , H01J2201/3125
摘要： An object of the invention is to provide a thin-film cathode having a base electrode, an upper electrode and an electron accelerator disposed therebetween and made of an insulator or a semiconductor, wherein a diode current rises with a lower threshold voltage that that in the background art, so that a diode current required for electron emission can be secured with a low voltage, and to obtain an image display device long in life and low in power consumption. Platinum-group metal (Group VIII), noble metal belonging to Group Ib, or a laminated film, a mixed film or an alloy film of those materials containing an alkali metal oxide, an alkaline earth metal compound or a compound of transition metal belonging to Group III to VII from the interface with an electron accelerator to the surface is used as an upper electrode.
摘要翻译： 本发明的目的是提供一种具有设置在其间并由绝缘体或半导体制成的基极，上电极和电子加速器的薄膜阴极，其中二极管电流以较低的阈值电压上升， 因此能够以低电压确保电子发射所需的二极管电流，并获得寿命长且功耗低的图像显示装置。 铂族金属（VIII族），属于Ib族的贵金属或层合膜，混合膜或含有碱金属氧化物，碱土金属化合物或过渡金属化合物的合金膜属于 从与电子加速器到表面的界面的III至VII族用作上电极。
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公开(公告)号：US20070216283A1
公开(公告)日：2007-09-20
申请号：US11656487
申请日：2007-01-23
CPC分类号： H01J29/04 , H01J9/022 , H01J31/127
摘要： A simple method was needed for dividing up the electron emitter electrodes into individual supply electrodes. An insulator partition wall was formed on the same layer and parallel to the supply electrode for supplying power to the electron emitter electrode, an electron emitter electrodes formed across the entire surface of the image display area, a side surface of the partition wall was sliced, condensation and solubility diffusion performed by heat treatment, ablation performed by irradiating the upper surface of the silicon partition wall with a laser, Joule thermal sealing/cutting performed by conducting electricity across the scanning lines enclosing the silicon partition wall in order to slice the electron emitter electrode.
摘要翻译： 需要一种简单的方法来将电子发射极分成单独的供电电极。 绝缘体分隔壁形成在同一层上并平行于供给电极供给电子发射电极，形成在图像显示区域的整个表面上的电子发射电极，分隔壁的侧面切片， 通过热处理进行的冷凝和溶解扩散，通过用激光照射硅分隔壁的上表面进行的烧蚀，通过在包围硅分隔壁的扫描线上传导电来进行焦耳热密封/切割，以便切割电子发射体 电极。
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公开(公告)号：US20070216279A1
公开(公告)日：2007-09-20
申请号：US11657694
申请日：2007-01-25
CPC分类号： H01J31/127 , H01J29/04
摘要： It is an object of the present invention to provide an image display using a thin film electronic source having a structure for separating picture elements in a self-alignment manner. The structure of bus wiring (scanning line) for powering the electronic source is formed by a stacked structure including a lower layer 17 made of an alloy of CrMo, an intermediate layer 18 made of Al or an alloy of Al, and an upper layer 19 made of Cr, from a cathode substrate 10. The CrMo alloy in the lower layer 17 includes 30 wt % or more of Mo. Such a stacked structure can be used to process one side of the lower layer 17 to form an undercut relative to the intermediate layer 18. The undercut serves as a picture element separating structure in sputtering of an upper electrode 13 of the electronic source and achieves picture element separation in a self-alignment manner.
摘要翻译： 本发明的目的是提供一种使用具有以自对准方式分离图像元素的结构的薄膜电子源的图像显示。 用于为电子源供电的总线布线（扫描线）的结构通过堆叠结构形成，该堆叠结构包括由AlM或Al合金制成的中间层18和CrMo的合金制成的下层17和上层19 由阴极基板10制成。 下层17中的CrMo合金包括30重量％以上的Mo。这种堆叠结构可用于处理下层17的一侧以相对于中间层18形成底切。 底切用作电子源的上电极13的溅射中的像素分离结构，以自对准的方式实现像素分离。
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公开(公告)号：US20090009054A1
公开(公告)日：2009-01-08
申请号：US12078776
申请日：2008-04-04
申请人： Toshiaki Kusunoki , Motoyuki Miyata , Takashi Naito , Mitsuharu Ikeda , Yoshiro Mikami , Etsuko Nishimura
发明人： Toshiaki Kusunoki , Motoyuki Miyata , Takashi Naito , Mitsuharu Ikeda , Yoshiro Mikami , Etsuko Nishimura
IPC分类号： H01J63/04
CPC分类号： H01J29/04 , B82Y10/00 , H01J1/312 , H01J31/127 , H01J2329/0484
摘要： An MIM electron source is comprised of a lower electrode, an insulation film and an upper electrode. By depositing a coat film on the upper electrode through a sputter process using a sputter target of alkaline glass having a modifier component of an alkaline metal oxide or alkaline earth metal oxide, the work function of the upper electrode can be lowered. As a result, the electron emission efficiency can be increased stably.
摘要翻译： MIM电子源由下电极，绝缘膜和上电极组成。 通过使用具有碱金属氧化物或碱土金属氧化物的改性剂成分的碱性玻璃的溅射靶的溅射法在上部电极上沉积涂膜，可以降低上部电极的功函数。 结果，可以稳定地提高电子发射效率。
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公开(公告)号：US20090001868A1
公开(公告)日：2009-01-01
申请号：US12153482
申请日：2008-05-20
CPC分类号： H01J9/32 , H01J29/90 , H01J31/127 , H01J2329/90
摘要： An image display device comprising a back-surface substrate (1) having a plurality of first electrodes (8), an insulating film (14), a plurality of second electrodes (9), and an electron source (10); a front-surface substrate (2) having a fluorescent layer (15), and further having an anode for the application of an acceleration voltage; a frame (3) disposed between the front-surface substrate (2) and the back-surface substrate (1); and a sealing member (5) for sealing the frame (3) and the two substrates in an airtight manner in a sealed area (52). The second electrodes (9) cover the insulating film (14) disposed beneath these second electrodes (9) in at least the sealed area (52), and place the sealing member (5) and the insulating film (14) in a non-contact state.
摘要翻译： 一种图像显示装置，包括具有多个第一电极（8），绝缘膜（14），多个第二电极（9）和电子源（10）的背面基板（1）。 具有荧光层（15）的前表面基板（2），并且还具有用于施加加速电压的阳极; 设置在前表面基板（2）和背面基板（1）之间的框架（3）; 以及密封构件（5），用于将密封区域（52）中的框架（3）和两个基板以气密的方式密封。 第二电极（9）至少在密封区域（52）中覆盖设置在这些第二电极（9）下方的绝缘膜（14），并且将密封构件（5）和绝缘膜（14） 接触状态
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公开(公告)号：US20080303406A1
公开(公告)日：2008-12-11
申请号：US12107799
申请日：2008-04-23
IPC分类号： H01J63/04
CPC分类号： H01J31/127 , H01J9/022 , H01J29/02 , H01J2329/02
摘要： The present invention provides an image display device which can lower the resistance of scanning signal lines, can ensure the enhancement of reliability of supply of electricity and conductivity and the reliability of separation of elements, can exhibit excellent display characteristic, and can possess an extremely prolonged lifetime. The scanning signal line has the stacked film structure constituted of a lower layer film formed of an aluminum film and an upper layer film formed of an aluminum alloy film containing aluminum as a main component.
摘要翻译： 本发明提供了能够降低扫描信号线的电阻的图像显示装置，能够确保电力供给和导电性的可靠性的提高以及元件分离的可靠性，能够表现出优异的显示特性，并且可以具有极长的时间 一生。 扫描信号线具有由铝膜形成的下层膜和由以铝为主要成分的铝合金膜形成的上层膜构成的叠层膜结构。
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公开(公告)号：US20080272685A1
公开(公告)日：2008-11-06
申请号：US12081738
申请日：2008-04-21
申请人： Mitsuharu Ikeda , Toshiaki Kusunoki , Etsuko Nishimura , Tatsumi Hirano , Masatomo Terakado , Takahiro Ueno , Hiroyasu Yanase , Yukio Takasaki , Takaaki Ogasa , Hideyuki Shintani
发明人： Mitsuharu Ikeda , Toshiaki Kusunoki , Etsuko Nishimura , Tatsumi Hirano , Masatomo Terakado , Takahiro Ueno , Hiroyasu Yanase , Yukio Takasaki , Takaaki Ogasa , Hideyuki Shintani
CPC分类号： G02F1/136286 , G02F2001/13629
摘要： Hillock is prevented when aluminum wiring is used in order to reduce line resistance in a display unit. The aluminum wiring is formed into multi-layer structure and each layer contains an element which is not solidly solubilized with aluminum. The element are preferably rare earth metal such as Nd, high-melting point transition metals such as Ta and noble metals such as Pd. Intermetallic compounds of aluminum and the element are educed at an interface of the multi-layer wiring and it is prevented that grains of aluminum are enlarged to form hillock.
摘要翻译： 为了减少显示单元中的线路电阻，使用铝接线时会阻止小丘。 铝布线形成多层结构，每一层都含有不能用铝固溶的元素。 该元素优选为稀土金属如Nd，高熔点过渡金属如Ta和贵金属如Pd。 铝和元素的金属间化合物在多层布线的界面处被引出，并且防止铝的晶粒扩大以形成小丘。
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公开(公告)号：US20080246387A1
公开(公告)日：2008-10-09
申请号：US12078775
申请日：2008-04-04
申请人： Toshiaki Kusunoki , Mitsuharu Ikeda , Katsuhide Aoto , Tomoki Nakamura , Yoshiro Mikami , Etsuko Nishimura , Takahiro Ueno , Mitsuaki Shiba
发明人： Toshiaki Kusunoki , Mitsuharu Ikeda , Katsuhide Aoto , Tomoki Nakamura , Yoshiro Mikami , Etsuko Nishimura , Takahiro Ueno , Mitsuaki Shiba
IPC分类号： H01J63/04
CPC分类号： H01J1/312 , B82Y10/00 , H01J29/04 , H01J31/127 , H01J2329/0484
摘要： The present invention aims to form an electron emission film containing an alkali metal compound or the like without causing alkali attack on the metal wiring. An FED display device comprises: an electron source including an electron emission film 13 on the surface thereof; and metal wirings 17, 18 and the like for supplying a signal or the like to the electron source. After forming on the surface of the metal wiring 18 an corrosion resistant film 21 comprising a reactive film or adsorption film with phosphorus, an alkali metal or the like is coated onto or added into the electron emission film 13. The addition of phosphorus is made fewer than the chemical equivalent of the alkali metal salt. Such configuration can improve the electron emission efficiency of the electron source without the metal wiring being corroded by alkali metal or the like.
摘要翻译： 本发明旨在形成含有碱金属化合物等的电子发射膜，而不会对金属布线产生碱侵蚀。 FED显示装置包括：电子源，其表面上包括电子发射膜13; 以及用于向电子源提供信号等的金属布线17,18等。 在金属布线18的表面上形成后，将含有磷，碱金属等的反应性膜或吸附膜的耐腐蚀膜21涂布在电子发射膜13上或添加到电子发射膜13中。添加磷更少 比化学当量的碱金属盐。 这种构造可以提高电子源的电子发射效率，而不会使金属布线被碱金属等腐蚀。
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