公开(公告)号：US10759175B2

公开(公告)日：2020-09-01

申请号：US16278937

申请日：2019-02-19

申请人： Toshiaki Masuda ,  Tsutoh Aoyama ,  Takahiko Kuroda ,  Masaki Kato

发明人： Toshiaki Masuda ,  Tsutoh Aoyama ,  Takahiko Kuroda ,  Masaki Kato

IPC分类号： B41J2/175 ,  B41J2/145 ,  B41J2/16 ,  B41J2/14

摘要： A liquid discharge head includes a plurality of nozzles to discharge a liquid, a plurality of pressure chambers communicating with the plurality of nozzles, respectively, a plurality of individual supply channels communicating with the plurality of pressure chambers, respectively, a plurality of common-supply branch channels each having a side face and a bottom face and communicating with two or more of the plurality of individual supply channels, respectively, and a common-supply main channel communicating with the plurality of common-supply branch channels. The plurality of common-supply branch channels includes a curved portion on a corner between the side face and the bottom face of each of the plurality of common-supply branch channels along a direction of liquid flow in the plurality of common-supply branch channels.

公开(公告)号：US09362478B2

公开(公告)日：2016-06-07

申请号：US14572930

申请日：2014-12-17

申请人： Toshiaki Masuda ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

发明人： Toshiaki Masuda ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

IPC分类号： B41J2/015 ,  B41J2/045 ,  B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H04R17/00 ,  H01L41/053 ,  H01L41/23 ,  H01L41/08 ,  H01L41/09

CPC分类号： H01L41/0533 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/23

摘要： A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.

摘要翻译： 一种制造机电换能器元件的方法包括在基底和底涂层之一上形成第一公共电极; 在所述第一电极上形成机电换能器膜; 在所述机电换能器膜上形成第二电极; 在第二电极的上表面，机电换能器膜和第二电极的侧壁上形成第一保护膜，并且在保护机电换能器膜的第一保护膜的一部分上选择性地形成第二保护膜， 第二电极的侧壁。

公开(公告)号：US20150171307A1

公开(公告)日：2015-06-18

申请号：US14572930

申请日：2014-12-17

申请人： Toshiaki MASUDA ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

发明人： Toshiaki MASUDA ,  Keishi Miwa ,  Keisuke Hayashi ,  Takahiko Kuroda

IPC分类号： H01L41/053 ,  H01L41/23 ,  H01L41/29 ,  B41J2/14 ,  H01L41/047

CPC分类号： H01L41/0533 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/23

摘要： A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.

摘要翻译： 一种制造机电换能器元件的方法包括在基底和底涂层之一上形成第一公共电极; 在所述第一电极上形成机电换能器膜; 在所述机电换能器膜上形成第二电极; 在第二电极的上表面，机电换能器膜和第二电极的侧壁上形成第一保护膜，并且在保护机电换能器膜的第一保护膜的一部分上选择性地形成第二保护膜， 第二电极的侧壁。

公开(公告)号：US20120206545A1

公开(公告)日：2012-08-16

申请号：US13365352

申请日：2012-02-03

申请人： Masaki Kato ,  Kiyoshi Yamaguchi ,  Takahiko Kuroda ,  Satoshi Mizukami

发明人： Masaki Kato ,  Kiyoshi Yamaguchi ,  Takahiko Kuroda ,  Satoshi Mizukami

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491

摘要： Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode;and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.

摘要翻译： 公开了一种喷墨头，其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极，压电材料和上电极而形成的压电元件，其中下电极是公共电极，上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线，其中驱动信号被单独输入到相应的单独电极布线。 喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。 中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。

公开(公告)号：US08454133B2

公开(公告)日：2013-06-04

申请号：US13422136

申请日：2012-03-16

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

IPC分类号： B41J2/045

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491

摘要： An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

摘要翻译： 公开了一种喷墨头。 在喷墨头中，在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中，在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中，设置有非成膜区域; 并且在包括压电元件形成部的区域中，在非成膜区域中形成第一绝缘膜和第四绝缘膜，或者在非成膜区域中形成第四绝缘膜。

公开(公告)号：US08919926B2

公开(公告)日：2014-12-30

申请号：US13408073

申请日：2012-02-29

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/16 ,  B41J2/14

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1646 ,  B41J2002/14491

摘要： A disclosed inkjet head includes a liquid chamber formed by a space between a vibrating plate and a nozzle substrate and separated by partitions; a piezoelectric element formed by sequentially laminating a common electrode, a piezoelectric substance and an individual electrode over the space; first to fourth insulating films respectively having first to fourth openings; and a first wiring connected to the individual electrode and pulled through the first and second openings over the common electrode, wherein the first wiring passes through the third opening over the third insulating film, the first wiring is exposed from the fourth opening so as to be externally connected, and the third insulating film and the fourth insulating film are not partly formed above the liquid chamber and formed above the first wiring.

摘要翻译： 所公开的喷墨头包括由振动板和喷嘴基板之间的空间形成并由分隔件分隔的液体室; 通过在该空间上依次层叠公共电极，压电体和单个电极而形成的压电元件; 分别具有第一至第四开口的第一至第四绝缘膜; 以及第一布线，其连接到所述单独电极并且在所述公共电极上被拉动通过所述第一和第二开口，其中所述第一布线穿过所述第三绝缘膜上的所述第三开口，所述第一布线从所述第四开口露出， 外部连接，并且第三绝缘膜和第四绝缘膜不部分地形成在液体室的上方并形成在第一布线的上方。

公开(公告)号：US08777382B2

公开(公告)日：2014-07-15

申请号：US13365352

申请日：2012-02-03

申请人： Masaki Kato ,  Kiyoshi Yamaguchi ,  Takahiko Kuroda ,  Satoshi Mizukami

发明人： Masaki Kato ,  Kiyoshi Yamaguchi ,  Takahiko Kuroda ,  Satoshi Mizukami

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2002/14491

摘要： Disclosed is an inkjet head that includes individual liquid chambers having liquid droplet discharging holes; an oscillation plate; piezoelectric elements formed by laminating a lower electrode, a piezoelectric material, and upper electrodes on the oscillation plate, wherein the lower electrode is a common electrode and the upper electrode is an individual electrode; a common electrode wiring connected to the lower electrode; and individual electrode wirings connected to the corresponding upper electrodes of the piezoelectric elements, wherein driving signals are individually input to the corresponding individual electrode wirings. The inkjet head further includes an upper layer insulator film; an intermediate layer insulator film; and a lower layer insulator film. The intermediate layer insulator film and the upper layer insulator film have openings for exposing the piezoelectric elements.

摘要翻译： 公开了一种喷墨头，其包括具有液滴排出孔的各个液室; 振荡板; 通过在振荡板上层叠下电极，压电材料和上电极而形成的压电元件，其中下电极是公共电极，上电极是单独电极; 连接到下电极的公共电极布线; 以及连接到压电元件的相应上电极的单独电极配线，其中驱动信号被单独输入到相应的单独电极布线。 喷墨头还包括上层绝缘膜; 中间层绝缘膜; 和下层绝缘膜。 中间层绝缘膜和上层绝缘膜具有用于使压电元件露出的开口。

公开(公告)号：US20120212545A1

公开(公告)日：2012-08-23

申请号：US13396830

申请日：2012-02-15

申请人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  B41J2202/08

摘要： An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

摘要翻译： 喷墨头包括具有喷嘴的喷嘴板，喷嘴板上的振动板，由分隔壁隔开的空间形成的液体室，具有公共电极的压电元件，压电体和单独的电极，按此顺序分层 所述振动板的表面，具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜，经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线， 第三绝缘膜，在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线，其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中，并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。

公开(公告)号：US08602530B2

公开(公告)日：2013-12-10

申请号：US13396830

申请日：2012-02-15

申请人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

发明人： Satoshi Mizukami ,  Masaki Kato ,  Takahiko Kuroda ,  Yoshikazu Akiyama ,  Kanshi Abe

IPC分类号： B41J2/14

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  B41J2202/08

摘要： An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.

摘要翻译： 喷墨头包括具有喷嘴的喷嘴板，喷嘴板上的振动板，由分隔壁隔开的空间形成的液体室，具有公共电极的压电元件，压电体和单独的电极，按此顺序分层 所述振动板的表面，具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜，经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线， 第三绝缘膜，在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线，其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中，并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。

公开(公告)号：US20120236083A1

公开(公告)日：2012-09-20

申请号：US13422136

申请日：2012-03-16

申请人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

发明人： Satoshi MIZUKAMI ,  Masaki Kato ,  Takahiko Kuroda ,  Kanshi Abe ,  Yoshikazu Akiyama

IPC分类号： B41J2/045

CPC分类号： B41J2/1612 ,  B41J2/14274 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14491

摘要： An inkjet head is disclosed. In the inkjet head a vibrating plate is formed on a liquid chamber substrate on which multiple dedicated liquid chambers are aligned; a first insulating film and a second insulating film are formed between a dedicated electrode wiring and a lower electrode in an area in which the dedicated electrode wiring and the lower electrode overlap; a third insulating film and a fourth insulating film are stacked in an area which includes a forming area of the dedicated electrode wiring; in at least a portion of a forming area of the dedicated liquid chamber, there is provided a non-film forming area; and, in an area including a piezoelectric element forming section, either the first insulating film and the fourth insulating film are formed in the non-film forming area, or the fourth insulating film is formed in the non-film forming area.

摘要翻译： 公开了一种喷墨头。 在喷墨头中，在多个专用液体室对准的液体室基板上形成振动板; 在专用电极布线和下电极重叠的区域中，在专用电极布线和下电极之间形成第一绝缘膜和第二绝缘膜; 在包括专用电极布线的形成区域的区域中堆叠第三绝缘膜和第四绝缘膜; 在专用液体室的形成区域的至少一部分中，设置有非成膜区域; 并且在包括压电元件形成部的区域中，在非成膜区域中形成第一绝缘膜和第四绝缘膜，或者在非成膜区域中形成第四绝缘膜。