利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

162 条记录 (耗时 0.04 秒)

    Scanning probe microscope and method of observing sample using the same
    3.
    发明授权
    Scanning probe microscope and method of observing sample using the same 有权
    扫描探针显微镜及使用其的观察样品的方法

    公开(公告)号：US08407811B2

    公开(公告)日：2013-03-26

    申请号：US12712745

    申请日：2010-02-25

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Makoto Okai ,  Motoyuki Hirooka

    IPC分类号： G01Q60/24

    CPC分类号： G01Q60/22 ,  G01Q70/12

    摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

    摘要翻译： 在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元 增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息 分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

    Scanning probe microscope and sample observing method using the same
    5.
    发明授权
    Scanning probe microscope and sample observing method using the same 有权
    扫描探针显微镜及使用其的样品观察方法

    公开(公告)号：US08695110B2

    公开(公告)日：2014-04-08

    申请号：US13586754

    申请日：2012-08-15

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    IPC分类号： G01Q70/00 ,  G01Q70/16 ,  G01N13/00

    CPC分类号： G01Q60/18 ,  G01Q60/22

    摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

    摘要翻译： 在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。 在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。 此外，通过探针的损伤或磨损，测量再现性被严重降低。 可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品 通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

    SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME
    6.
    发明申请
    SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME 有权
    扫描探针显微镜和使用其的样品观察方法

    公开(公告)号：US20100064396A1

    公开(公告)日：2010-03-11

    申请号：US12523369

    申请日：2008-02-26

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    IPC分类号： G01Q60/18 ,  G01Q60/24

    CPC分类号： G01Q60/18 ,  G01Q60/22

    摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

    摘要翻译： 在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。 在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。 此外，通过探针的损伤或磨损，测量再现性被严重降低。 可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品 通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

    Scanning probe microscope and sample observing method using the same
    7.
    发明授权
    Scanning probe microscope and sample observing method using the same 有权
    扫描探针显微镜及使用其的样品观察方法

    公开(公告)号：US08272068B2

    公开(公告)日：2012-09-18

    申请号：US12523369

    申请日：2008-02-26

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Takashi Inoue ,  Kishio Hidaka ,  Motoyuki Hirooka

    IPC分类号： G01N13/00 ,  G01B11/30

    CPC分类号： G01Q60/18 ,  G01Q60/22

    摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

    摘要翻译： 在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。 在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。 此外，通过探针的损伤或磨损，测量再现性被严重降低。 可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品 通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

    Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
    8.
    发明授权
    Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope 失效
    位移测量方法及其装置，平台装置和探针显微镜

    公开(公告)号：US08629985B2

    公开(公告)日：2014-01-14

    申请号：US13605395

    申请日：2012-09-06

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

    IPC分类号： G01B9/02

    CPC分类号： G01Q20/02 ,  G01B9/02014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/02076 ,  G01B2290/45 ,  G01B2290/70 ,  G01S17/50

    摘要： A displacement measurement method, an apparatus thereof, and a probe microscope. which enable stable measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air and mechanical vibration. A pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. An optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

    摘要翻译： 位移测量方法，其装置和探针显微镜。 这使得能够以亚纳米级或更低的精度稳定地测量被测物体的位移量和移动距离，而不受诸如空气波动和机械振动之类的扰动的影响。 脉冲束被分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束在相对的方向上通过相同的延迟光路被发送到被测物体的一个脉冲周期的延迟，然后被测量对象反射。 通过对两束脉冲光束进行干涉而获得由测量对象的运动引起的光学相位变化。

    Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope
    9.
    发明授权
    Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope 失效
    位移测量方法及其装置，平台装置和探针显微镜

    公开(公告)号：US08284406B2

    公开(公告)日：2012-10-09

    申请号：US12063860

    申请日：2006-08-09

    申请人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

    发明人： Toshihiko Nakata ,  Masahiro Watanabe ,  Shuichi Baba ,  Mineo Nomoto

    IPC分类号： G01B9/02

    CPC分类号： G01Q20/02 ,  G01B9/02014 ,  G01B9/02057 ,  G01B9/02058 ,  G01B9/02076 ,  G01B2290/45 ,  G01B2290/70 ,  G01S17/50

    摘要： The present invention provides a displacement measurement method, an apparatus thereof, a probe microscope. which make it possible to stably measure an amount of displacement and a moving distance of an object under measurement with an accuracy of the sub-nanometer order or below without being affected by disturbances such as fluctuations of air, mechanical vibration.Specifically, with the present invention, a pulsed beam is split into two; one beam is reflected by an object under measurement and then inputted to a delay optical path equivalent to one pulse period; and the other beam is sent through the same delay optical path in the opposite direction up to the object under measurement with a delay of one pulse period, and then reflected by the object under measurement. Then, an optical phase variation caused by the movement of the object under measurement is obtained by subjecting the two pulsed beams to interference.

    摘要翻译： 本发明提供一种位移测量方法，其装置，探针显微镜。 这使得可以在不受空气波动，机械振动等干扰的影响的情况下以亚纳米级或更低的精度来稳定地测量被测物体的位移量和移动距离。 具体地说，利用本发明，将脉冲光束分成两部分; 一个光束被测量对象反射，然后输入到等于一个脉冲周期的延迟光路; 并且另一个光束以相同的方向通过相同的延迟光路，直到被测物体的延迟为一个脉冲周期，然后被测量对象反射。 然后，通过对两个脉冲光束进行干涉来获得由测量对象的运动引起的光学相位变化。