Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
    4.
    发明授权
    Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor 有权
    监控和/或控制半导体制造装置的方法及其系统

    公开(公告)号:US07058470B2

    公开(公告)日:2006-06-06

    申请号:US10999006

    申请日:2004-11-30

    IPC分类号: G06F19/00

    摘要: A semiconductor processing apparatus for processing a semiconductor wafer includes a sensor for monitoring a processing state of the semiconductor processing apparatus, a processing result input unit which inputs measured values for processing results of a semiconductor wafer processed by the semiconductor processing apparatus, and a model equation generation unit relying on sensed data acquired by the sensor and the measured values to generate a model equation for predicting a processing result using the sensed data as an explanatory variable. The apparatus includes a processing result prediction unit which predicts a processing result based on the model equation and the sensed data, and a process recipe control unit which compares the predicted processing result with a previously set value to control a processing condition or input parameter. The process recipe control unit includes a controller which controls at least one of a plurality of different processing performances for processing of the semiconductor wafer.

    摘要翻译: 用于处理半导体晶片的半导体处理装置包括:用于监视半导体处理装置的处理状态的传感器;输入由半导体处理装置处理的半导体晶片的处理结果的测量值的处理结果输入单元;以及模型方程 依赖于由传感器获取的感测数据和测量值,以产生用于使用感测数据作为解释变量来预测处理结果的模型方程。 该装置包括:处理结果预测单元,其基于模型方程和感测数据预测处理结果;以及处理配方控制单元,其将预测的处理结果与预先设定的值进行比较,以控制处理条件或输入参数。 处理配方控制单元包括控制器,用于控制用于处理半导体晶片的多个不同处理性能中的至少一个。

    Telescope main body and telescope
    6.
    发明申请
    Telescope main body and telescope 审中-公开
    望远镜主体和望远镜

    公开(公告)号:US20050098706A1

    公开(公告)日:2005-05-12

    申请号:US10981780

    申请日:2004-11-05

    摘要: A telescope main body, which includes an objective optical system, a focusing system, an imaging device which captures an object image, and a beam splitter. Further, the telescope main body includes a calibration system that performs a calibration operation for calibrating a position shift between an image forming position of the object image and a receiving surface of the imaging device caused by diopter variation of a user. The calibration system includes a focus driving system, a focus detecting system, and a controller. The calibration system performs the calibration operation based on a detection result by the focus detecting system in a situation where the user has achieved focusing of a visual image by manipulating a focus adjusting member.

    摘要翻译: 望远镜主体,其包括物镜光学系统,聚焦系统,拍摄物体图像的成像装置和分束器。 此外,望远镜主体包括校准系统,其执行校准操作,用于校准由用户的屈光度变化引起的对象图像的图像形成位置和成像装置的接收表面之间的位置偏移。 校准系统包括聚焦驱动系统,焦点检测系统和控制器。 在用户通过操纵焦点调节构件来实现视觉图像的聚焦的情况下,校准系统基于焦点检测系统的检测结果执行校准操作。

    Data processing apparatus for semiconductor processing apparatus
    8.
    发明授权
    Data processing apparatus for semiconductor processing apparatus 有权
    半导体处理装置的数据处理装置

    公开(公告)号:US06776872B2

    公开(公告)日:2004-08-17

    申请号:US10087982

    申请日:2002-03-05

    IPC分类号: H05H100

    摘要: A data processing apparatus for a semiconductor manufacturing apparatus includes a semiconductor manufacturing apparatus for executing processing for a wafer, a data collecting semiconductor device for collecting processing data generated in association with the processing, and a data copying semiconductor device for extracting the processing data collected in the data collecting semiconductor device and for producing a copy of the processing data. The apparatus may include a data analyzer for analyzing the data copy produced by the data copying semiconductor device and for diagnosing a processing state of the processing apparatus.

    摘要翻译: 一种半导体制造装置的数据处理装置包括:用于执行晶片处理的半导体制造装置,用于收集与该处理相关联地生成的处理数据的数据收集半导体装置;以及数据复制半导体装置,用于提取收集的处理数据 数据采集​​半导体器件和用于产生处理数据的副本。 该装置可以包括用于分析由数据复制半导体器件产生的数据副本并用于诊断处理装置的处理状态的数据分析器。

    Body structure for motor vehicle
    9.
    发明授权
    Body structure for motor vehicle 失效
    汽车车身结构

    公开(公告)号:US5782525A

    公开(公告)日:1998-07-21

    申请号:US795865

    申请日:1997-02-06

    IPC分类号: B62D21/15 B62D25/02 B62D25/20

    摘要: A side body structure of a motor vehicle includes a first and second crash boxes at the connecting portion of a side sill and a rear wheel arch. The first crash box is provided outside of a side sill reinforcement and the second crash box is inside the side sill reinforcement. The second crash box is connected with a cross member extended in a transversal direction of the vehicle. In the event of a side impact, first the first crash box collapses and then the second crash box does. Finally, the impact energy is transferred to and absorbed by other body structures through the cross member. The side sill portion and the rear wheel arch portion can be prevented from intruding into a rear compartment so as to save passengers from serious injury.

    摘要翻译: 机动车辆的侧体结构包括在下纵梁和后轮拱的连接部分处的第一和第二碰撞箱。 第一个碰撞箱设置在侧梁加强件外侧,第二个碰撞箱位于下梁架内。 第二碰撞箱与在车辆的横向方向上延伸的横梁连接。 在发生侧面碰撞的情况下,首先碰撞盒第一个崩溃,然后是第二个碰撞盒。 最后,撞击能量通过横梁转移到其他身体结构并被其吸收。 可以防止下纵梁部分和后轮拱形部分进入后隔间,以免乘客受到严重伤害。