Copper and copper alloy etching solutions and process
    4.
    发明授权
    Copper and copper alloy etching solutions and process 失效
    铜和铜合金蚀刻解决方案及工艺

    公开(公告)号:US3936332A

    公开(公告)日:1976-02-03

    申请号:US510535

    申请日:1974-09-30

    CPC分类号: H05K3/067 C23F1/18

    摘要: This invention provides cooper and copper alloy etching solutions comprising a mixed aqueous solution of a peroxysulfate with a diazine compound and a halogen compound added as the catalyst. There is also provided a process for etching copper and copper alloys with said etching solutions.

    摘要翻译: 本发明提供了包含过氧硫酸盐与二嗪化合物的混合水溶液和作为催化剂加入的卤素化合物的铜和铜合金蚀刻溶液。 还提供了用所述蚀刻溶液蚀刻铜和铜合金的工艺。