公开(公告)号：US09062996B2

公开(公告)日：2015-06-23

申请号：US13143409

申请日：2010-01-27

申请人： Toshiyuki Nakagawa ,  Takamitsu Shigemoto ,  Yoshio Uetake ,  Masahiro Kimoto ,  Tetsuro Shigeno ,  Masaaki Muro ,  Naoyuki Nakamoto

发明人： Toshiyuki Nakagawa ,  Takamitsu Shigemoto ,  Yoshio Uetake ,  Masahiro Kimoto ,  Tetsuro Shigeno ,  Masaaki Muro ,  Naoyuki Nakamoto

IPC分类号： G01F11/28 ,  B67D7/02 ,  C23C16/448 ,  G01F23/14

CPC分类号： G01F11/28 ,  B67D7/0272 ,  C23C16/4482 ,  G01F11/284 ,  G01F23/14

摘要： Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.

摘要翻译： 公开了用于供应液体并控制其在容器内部的水平的方法和装置。 特别地，容器内部的液体可以是适合用于化学气相沉积工艺的液体材料，其中以最小化杂质引入的方式控制和供应液体。

公开(公告)号：US08365779B2

公开(公告)日：2013-02-05

申请号：US12095871

申请日：2006-11-30

申请人： Toshiyuki Nakagawa ,  Masaaki Muro ,  Tetsuro Shigeno ,  Naoyuki Nakamoto

发明人： Toshiyuki Nakagawa ,  Masaaki Muro ,  Tetsuro Shigeno ,  Naoyuki Nakamoto

IPC分类号： B65B31/00

CPC分类号： G01F22/02

摘要： The present invention is aimed at providing a method for simply measuring the liquid quantity of liquid material in a receptacle. A liquid quantity measuring apparatus for use in a liquid material supplying system comprising a receptacle for storing liquid material, a first pipe for feeding feeder gas into said receptacle, a first shutoff valve provided in said first pipe, a second shutoff valve provided in said first pipe downstream of said first shutoff valve and a second pipe for supplying the liquid material from said receptacle to supplier's destinations, and for measuring the liquid quantity of the liquid material in said receptacle, the measuring apparatus comprising: —a first pressure detection means for detecting the pressure of feeder gas in said pipe between said first shutoff valve and said second shutoff valve; —a second pressure detection means for detecting the pressure of gas in said receptacle; and —an arithmetic processing means for seeking by arithmetic calculation the liquid quantity of the liquid material in said receptacle on the basis of the detection results of said first pressure detection means and said second pressure detection means.

摘要翻译： 本发明的目的在于提供简单地测量容器中的液体材料的液体量的方法。 一种用于液体材料供给系统的液体量测量装置，包括用于储存液体材料的容器，用于将进料气体进料到所述容器中的第一管，设置在所述第一管中的第一截止阀，设置在所述第一管中的第二截止阀 所述第一截止阀下游的管道和用于将液体材料从所述容器供应到供应商的目的地的第二管，并且用于测量所述容器中的液体材料的液体量，所述测量装置包括： - 第一压力检测装置， 在所述第一截流阀和所述第二截止阀之间的管道中的进料气体的压力; - 用于检测所述容器中的气体的压力的第二压力检测装置; 以及 - 算术处理装置，用于根据所述第一压力检测装置和所述第二压力检测装置的检测结果通过算术计算来求解所述容器中的液体物质的液体量。

公开(公告)号：US20120018037A1

公开(公告)日：2012-01-26

申请号：US13143409

申请日：2010-01-27

申请人： Toshiyuki Nakagawa ,  Takamitsu Shigemoto ,  Yoshio Uetake ,  Masahiro Kimoto ,  Tetsuro Shigeno ,  Masaaki Muro ,  Naoyuki Nakamoto

发明人： Toshiyuki Nakagawa ,  Takamitsu Shigemoto ,  Yoshio Uetake ,  Masahiro Kimoto ,  Tetsuro Shigeno ,  Masaaki Muro ,  Naoyuki Nakamoto

IPC分类号： B65B1/16

CPC分类号： G01F11/28 ,  B67D7/0272 ,  C23C16/4482 ,  G01F11/284 ,  G01F23/14

摘要： Disclosed are methods and apparatuses for supplying a liquid and controlling its level inside of a container. In particular, the liquid inside of the container may be a liquid material suitable for use in a chemical vapor deposition process, wherein the liquid is controlled and supplied in a manner which minimizes the introduction of impurities.

摘要翻译： 公开了用于供应液体并控制其在容器内部的水平的方法和装置。 特别地，容器内部的液体可以是适合用于化学气相沉积工艺的液体材料，其中以最小化杂质引入的方式控制和供应液体。

公开(公告)号：US20090308484A1

公开(公告)日：2009-12-17

申请号：US12095871

申请日：2006-11-30

申请人： Toshiyuki Nakagawa ,  Masaaki Muro ,  Tetsuro Shigeno ,  Naoyuki Nakamoto

发明人： Toshiyuki Nakagawa ,  Masaaki Muro ,  Tetsuro Shigeno ,  Naoyuki Nakamoto

IPC分类号： B65B1/04 ,  G01L7/00

CPC分类号： G01F22/02

摘要： The present invention is aimed at providing a method for simply measuring the liquid quantity of liquid material in a receptacle. A liquid quantity measuring apparatus for use in a liquid material supplying system comprising a receptacle for storing liquid material, a first pipe for feeding feeder gas into said receptacle, a first shutoff valve provided in said first pipe, a second shutoff valve provided in said first pipe downstream of said first shutoff valve and a second pipe for supplying the liquid material from said receptacle to supplier's destinations, and for measuring the liquid quantity of the liquid material in said receptacle, the measuring apparatus comprising: —a first pressure detection means for detecting the pressure of feeder gas in said pipe between said first shutoff valve and said second shutoff valve; —a second pressure detection means for detecting the pressure of gas in said receptacle; and —an arithmetic processing means for seeking by arithmetic calculation the liquid quantity of the liquid material in said receptacle on the basis of the detection results of said first pressure detection means and said second pressure detection means.

摘要翻译： 本发明的目的在于提供简单地测量容器中的液体材料的液体量的方法。 一种用于液体材料供给系统的液体量测量装置，包括用于储存液体材料的容器，用于将进料气体进料到所述容器中的第一管，设置在所述第一管中的第一截止阀，设置在所述第一管中的第二截止阀 所述第一截止阀下游的管道和用于将液体材料从所述容器供应到供应商的目的地的第二管，并且用于测量所述容器中的液体材料的液体量，所述测量装置包括： - 第一压力检测装置， 在所述第一截流阀和所述第二截止阀之间的管道中的进料气体的压力; - 用于检测所述容器中的气体压力的第二压力检测装置; 以及 - 算术处理装置，用于根据所述第一压力检测装置和所述第二压力检测装置的检测结果通过算术计算来求解所述容器中的液体物质的液体量。

公开(公告)号：US08348248B2

公开(公告)日：2013-01-08

申请号：US12721441

申请日：2010-03-10

申请人： Yoichi Sakata ,  Kazutaka Yanagita ,  Toshiyuki Nakagawa ,  Naoyuki Nakamoto

发明人： Yoichi Sakata ,  Kazutaka Yanagita ,  Toshiyuki Nakagawa ,  Naoyuki Nakamoto

IPC分类号： B01F3/04

CPC分类号： H01L21/02 ,  C23C16/4482 ,  C23C16/52 ,  Y10T137/0318

摘要： Embodiments of the invention generally provide apparatus and methods for vaporizing liquid precursors. In one embodiment, a bubbling system for supplying a vapor of liquid precursor is provided including a gas flow conduit having a first end and a second end, a nozzle structure connected to the second end of the gas flow conduit, and comprising one or more perforated conduits fluidly coupled with the second end of the gas flow conduit, and a plate disposed around the gas flow conduit and in a spaced relationship from the nozzle structure, wherein both the one or more perforated conduits and the plate extend radially from an axis of the gas flow conduit.

摘要翻译： 本发明的实施方案通常提供用于蒸发液体前体的装置和方法。 在一个实施例中，提供了用于供应液体前体蒸气的鼓泡系统，其包括具有第一端和第二端的气体流动管道，连接到气体流动管道的第二端的喷嘴结构，并且包括一个或多个穿孔 与气体流动管道的第二端流体耦合的导管，以及围绕气体流动导管设置并且与喷嘴结构间隔的关系的板，其中一个或多个穿孔导管和板沿着 气流管道。

公开(公告)号：US07334708B2

公开(公告)日：2008-02-26

申请号：US10064220

申请日：2002-06-21

申请人： Mindi Xu ,  Tay Sayasane ,  Joseph E. Paganessi ,  Gregory M. Jursich ,  Naoyuki Nakamoto ,  Yukinobu Nishikawa ,  Herve E. Dulphy ,  Guillaume Rameau ,  Lorrin Honda

发明人： Mindi Xu ,  Tay Sayasane ,  Joseph E. Paganessi ,  Gregory M. Jursich ,  Naoyuki Nakamoto ,  Yukinobu Nishikawa ,  Herve E. Dulphy ,  Guillaume Rameau ,  Lorrin Honda

IPC分类号： B67D5/58

CPC分类号： B08B9/032 ,  C03B19/1415 ,  C03B37/01413 ,  C03B2207/32 ,  C23C16/448 ,  C23C16/45561 ,  F17C9/02 ,  F17C2205/0332 ,  F17C2205/0338 ,  F17C2221/014 ,  F17C2221/016 ,  F17C2221/017 ,  F17C2221/05 ,  F17C2223/0123 ,  F17C2223/033 ,  F17C2227/044 ,  F17C2227/045 ,  F17C2270/0518

摘要： Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of applications. In particular, the invention may be used in electronics fabrication, optical fiber manufacture or semiconductor manufacture.

摘要翻译： 提供了一体化块，化学传递系统和将超纯化学品输送到使用点或另一整体块的方法。 更具体地，积分块包括再充电容器块，加压气体块，吹扫气体块，废物回收块，真空块，溶剂供应块，脱气块，控制块和过滤块。 可以选择各种积分块以形成特别适用于给定应用的化学物质输送系统。 化学品输送系统通常将包括化学容器块，化学物质输送块和符合化学容器块和化学物质输送块的使用点以及一个或多个整体块。 本发明还涉及通过将含有超纯化学品的化学容器块连接到化学物质输送块并将超纯化学品引入到使用点，将超纯化学品从化学容器输送到使用点的方法。 所述方法还可以包括使用一个或多个积分块。 本发明的化学输送系统和方法可以用于各种应用中。 特别地，本发明可用于电子制造，光纤制造或半导体制造。