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公开(公告)号：US07129727B2
公开(公告)日：2006-10-31
申请号：US11258041
申请日：2005-10-26
申请人： Tsutomu Saito , Osamu Yamada , Eiichi Hazaki , Yasuhiko Nara , Hirofumi Sato , Yoshikazu Inada , Yoshinori Numata
发明人： Tsutomu Saito , Osamu Yamada , Eiichi Hazaki , Yasuhiko Nara , Hirofumi Sato , Yoshikazu Inada , Yoshinori Numata
CPC分类号： G01R31/307 , G01R31/2891
摘要： A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
摘要翻译： 用于测量包括精细布线图案的样品的电特性的多个探针与带电粒子束单元组合的缺陷检查装置包括简单地控制多个探针的图形用户界面（GUI）。 该装置包括：探针图像处理单元，用于在显示器上显示多个探针; 选择单元，从显示器上显示的探针中选择要被操作的探针; 以及显示单元，用于同时显示探针选择单元和指示所选择的探针是可操作探针的信息，或探针处于未选择状态。
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公开(公告)号：US20060087330A1
公开(公告)日：2006-04-27
申请号：US11258041
申请日：2005-10-26
申请人： Tsutomu Saito , Osamu Yamada , Eiichi Hazaki , Yasuhiko Nara , Hirofumi Sato , Yoshikazu Inada , Yoshinori Numata
发明人： Tsutomu Saito , Osamu Yamada , Eiichi Hazaki , Yasuhiko Nara , Hirofumi Sato , Yoshikazu Inada , Yoshinori Numata
IPC分类号： G01R31/302
CPC分类号： G01R31/307 , G01R31/2891
摘要： A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
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公开(公告)号：US07372283B2
公开(公告)日：2008-05-13
申请号：US11397677
申请日：2006-04-05
CPC分类号： G01R31/307 , G01R31/2887
摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.
摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。
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公开(公告)号：US07598755B2
公开(公告)日：2009-10-06
申请号：US12118421
申请日：2008-05-09
CPC分类号： G01R31/307 , G01R31/2887
摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.
摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。
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公开(公告)号：US20050140379A1
公开(公告)日：2005-06-30
申请号：US11018356
申请日：2004-12-22
IPC分类号： G01R31/302 , G01R31/28 , G01R31/307 , H01L21/66 , G01R31/02
CPC分类号： G01R31/307 , G01R31/2887
摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.
摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。
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公开(公告)号：US20060192574A1
公开(公告)日：2006-08-31
申请号：US11397677
申请日：2006-04-05
IPC分类号： G01R31/302
CPC分类号： G01R31/307 , G01R31/2887
摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.
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公开(公告)号：US07071713B2
公开(公告)日：2006-07-04
申请号：US11018356
申请日：2004-12-22
IPC分类号： G01R31/02
CPC分类号： G01R31/307 , G01R31/2887
摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.
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公开(公告)号：US20130317718A1
公开(公告)日：2013-11-28
申请号：US13984337
申请日：2011-02-16
申请人： Hirofumi Sato
发明人： Hirofumi Sato
IPC分类号： G06F17/00
CPC分类号： G06F17/00 , F02D11/105 , F02D2200/602 , F02D2200/606
摘要： A vehicle control system configured to change a control amount exponentially with respect to an operating amount of the driver in a manner to reduce a gap between an intended feeling of the driver and an actual feeling resulting from the operation, irrespective of changes in circumstances surrounding the vehicle.The vehicle control system is configured to calculate a control amount in accordance with an operating amount of the driver to control the vehicle based on the calculated control amount. The vehicle control system is provided with a calculation means that calculates the control amount by exponentiating the operating amount in a manner to increase a climb gradient of the control amount in accordance with an increase in the operating amount in a first range where the operating amount is small, and to decrease the climb gradient of the control amount in accordance with an increase in the operating amount in a second range where the operating amount is large. The calculation means is configured to exponentiate the control amount using a power index, which is determined in a manner to keep a difference between the calculated control amount and a control amount determined for a reference vehicle whose maximum control amount is different within a predetermined range, from a minimum operating amount to a maximum operating amount.
摘要翻译： 一种车辆控制系统，其被配置为以减少驾驶员的预期感觉和由操作产生的实际感觉之间的间隙的方式相对于驾驶员的操作量以指数方式改变控制量，而不管周围环境的变化如何 车辆。 车辆控制系统被配置为基于所计算的控制量来计算根据驾驶员的操作量来控制车辆的控制量。 车辆控制系统具有计算装置，该计算装置根据操作量的增加，以操作量的运算量的增加为基础，通过以操作量的乘积量乘以运算量的乘积来增加控制量的爬升梯度， 并且根据操作量大的第二范围内的操作量的增加来减小控制量的爬升梯度。 计算装置被配置为使用功率指数来取值控制量，该功率指数以保持所计算的控制量与对于最大控制量在预定范围内不同的参考车辆确定的控制量之间的差来确定， 从最小操作量到最大操作量。
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公开(公告)号：US5867819A
公开(公告)日：1999-02-02
申请号：US722948
申请日：1996-09-27
申请人： Hiroyuki Fukuchi , Hirofumi Sato
发明人： Hiroyuki Fukuchi , Hirofumi Sato
摘要： An audio decoder which can reduce a memory circuit capacity necessary for performing a series of decoding processes and can perform a down mixing. The audio decoder decodes audio data of a plurality of channels encoded in a frequency domain by using a time base to frequency base conversion. After a down mixing process was performed to the audio data of the frequency domain by frequency domain down mixing circuit, it is converted into audio data of a time domain by frequency base to time base converting circuit, thereby reducing memories by the number corresponding to the reduced number of channels. Further, by executing an inverse quantizing process of each channel and a frequency base to time base converting process of each channel by pipeline processes, a work buffer can be shared in both of the processes.
摘要翻译： 一种音频解码器，其可以减少执行一系列解码处理所需的存储器电路容量并且可以执行下混合。 音频解码器通过使用时基到频率转换来解码在频域中编码的多个频道的音频数据。 在通过频域降混电路对频域的音频数据进行了下混合处理之后，通过频域到时基转换电路将其转换成时域的音频数据，从而通过对应于 减少通道数。 此外，通过每个信道的逆量化处理和每个信道的时基转换处理通过流水线处理，可以在两个处理中共享工作缓冲区。
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公开(公告)号：US5737997A
公开(公告)日：1998-04-14
申请号：US694407
申请日：1996-08-12
申请人： Hirofumi Sato , Tomoji Tarutani , Norikazu Deto , Masanobu Yokoi
发明人： Hirofumi Sato , Tomoji Tarutani , Norikazu Deto , Masanobu Yokoi
CPC分类号： F04B27/1063 , Y10T74/18336
摘要： A cam plate type compressor includes a cam plate having a boss and the cam plate is located in a crank chamber formed within a pair of casings. The cam plate is rotatable with a drive shaft. The compressor also has two-part bearing structure for supporting the cam plate. The bearing has a buffer structure for absorbing an axial load applied to the cam plate. One of the bearing parts is constituted by a rolling bearing and the other is constituted by a flat sliding bearing.
摘要翻译： 凸轮板式压缩机包括具有凸台的凸轮板，并且凸轮板位于形成在一对壳体内的曲柄室中。 凸轮板可以用驱动轴旋转。 压缩机还具有用于支撑凸轮板的两部分轴承结构。 轴承具有用于吸收施加到凸轮板的轴向载荷的缓冲结构。 其中一个轴承部件由滚动轴承构成，另一个由平滑滑动轴承构成。
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