公开(公告)号：US06673161B2

公开(公告)日：2004-01-06

申请号：US09898693

申请日：2001-07-03

申请人： Tuan T. Ha ,  Hakan Elmali

发明人： Tuan T. Ha ,  Hakan Elmali

IPC分类号： B08B704

CPC分类号： B08B9/0321 ,  H01L21/6838

摘要： A substrate handling end effector is provided. The substrate handling end effector has a vacuum chuck to support a semiconductor substrate thereon. A vacuum passage and a liquid passage are located in the vacuum chuck. The vacuum passage is adapted to be connected to a vacuum source and the liquid passage is adapted to be connected to a liquid source. The liquid passage is connected to the vacuum passage.

摘要翻译： 提供了基板处理端部执行器。 基板处理端部执行器具有用于在其上支撑半导体基板的真空卡盘。 真空吸盘中设有真空通道和液体通道。 真空通道适于连接到真空源，并且液体通道适于连接到液体源。 液体通道连接到真空通道。

公开(公告)号：US06567711B1

公开(公告)日：2003-05-20

申请号：US09649374

申请日：2000-08-28

申请人： Martin Hosek ,  Jairo Terra Moura ,  Hakan Elmali

发明人： Martin Hosek ,  Jairo Terra Moura ,  Hakan Elmali

IPC分类号： G05B1302

CPC分类号： G05B13/021

摘要： A system for extracting a signal component from an output signal of a dynamic system. The system comprises a state observer and a corrector filter. The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

摘要翻译： 一种用于从动态系统的输出信号中提取信号分量的系统。 该系统包括状态观察器和校正滤波器。 状态观察器适于跟踪表示动态系统的输出信号中的主要动力学的信号分量，并且提供表示动态系统的输出信号中的估计信号分量的估计信号。 校正滤波器适于补偿估计信号和表示输出信号中的主要动力学的实际信号分量之间的失配。 估计信号与校正滤波器的输出信号的组合可以提供包括表示输出信号中的主要动力学的信号分量的合成信号。

公开(公告)号：US5934424A

公开(公告)日：1999-08-10

申请号：US742381

申请日：1996-11-01

申请人： Martin Hosek ,  Hakan Elmali ,  Nejat Olgac

发明人： Martin Hosek ,  Hakan Elmali ,  Nejat Olgac

IPC分类号： B64C27/00 ,  F16F15/14 ,  F16F15/31 ,  F16F7/00

CPC分类号： B64C27/001 ,  F16F15/145 ,  F16F15/31

摘要： Torsional vibrations in a rotating structure having a relatively large mass and subject to varying frequencies of torsional excitation are damped by determining the frequency of torsional excitation of the rotating structure and coupling to the rotating structure a damping pendulum of smaller mass to provide an absorber unit rotating therewith. The angular displacement of the damping pendulum relative to the rotating structure is continuously monitored, and the frequency of excitation is determined. The monitored displacement of the damping pendulum together with the mass damper characteristics of the absorber unit are processed to output a signal which produces a control torque on the damping pendulum proportional to the monitored displacement of the damping pendulum with a controlled time delay to produce control torque on the damping pendulum substantially equal to the torsional excitation of the rotating structure. This produces resonance of the damping pendulum substantially at the torsional excitation of the rotating structure which is effective to damp the vibrations of the rotating structure.

摘要翻译： 通过确定旋转结构的扭转激励的频率和耦合到旋转结构的较小质量的阻尼摆来减小具有相对较大质量且经受变化的扭转激励频率的旋转结构中的扭转振动，以提供吸收体单元旋转 随之而来。 连续监测阻尼摆相对于旋转结构的角位移，确定激励频率。 阻尼摆的监测位移与吸收器单元的质量阻尼器特性一起被处理以输出一个信号，该信号产生与阻尼摆的监控位移成比例的阻尼摆的控制扭矩，并以受控的时间延迟产生控制扭矩 在阻尼摆上基本上等于旋转结构的扭转激励。 这产生了基本上在旋转结构的扭转激励下的阻尼摆的共振，其有效地抑制了旋转结构的振动。

公开(公告)号：US06643563B2

公开(公告)日：2003-11-04

申请号：US10196685

申请日：2002-07-15

申请人： Martin Hosek ,  Hakan Elmali

发明人： Martin Hosek ,  Hakan Elmali

IPC分类号： G06F1900

CPC分类号： B25J9/1664 ,  G05B2219/39246 ,  G05B2219/40513 ,  H01L21/67739 ,  Y10S700/90 ,  Y10T74/20317

摘要： A method for moving a substrate to a predetermined location with a specified orientation with a robotic manipulator, the robotic manipulator having a plurality of joint actuators and an end-effector for holding the substrate, wherein the end-effector is independently rotatable with respect to the remaining robotic manipulator. The method can select a reference point on the end-effector for determining a position of the end-effector, wherein the reference point is offset from a wrist of the robotic manipulator, determining a motion path for movement of the end-effector of robotic arm toward predetermined location with specified orientation, and generating motion profiles for translational and rotational components of movement of the end-effector of robotic manipulator along the motion path. The motion profiles are converted into joint motion profiles for each of the joint actuators of the robotic manipulator for implementing the movement of the end-effector to predetermined location with the specified orientation.

摘要翻译： 一种用于利用机器人操纵器将衬底移动到具有指定取向的预定位置的方法，所述机器人操纵器具有多个关节致动器和用于保持所述衬底的端部执行器，其中所述端部执行器可独立地相对于 剩余机器人操纵器。 该方法可以选择末端执行器上的参考点以确定末端执行器的位置，其中参考点偏离机器人操纵器的手腕，确定用于机器臂的末端执行器的移动的运动路径 朝向具有指定取向的预定位置，以及生成用于机器人操纵器的末端执行器沿着运动路径运动的平移和旋转分量的运动曲线。 运动轮廓被转换成机器人操纵器的每个关节致动器的关节运动轮廓，用于实现末端执行器到具有指定方向的预定位置的运动。

公开(公告)号：US06216058B1

公开(公告)日：2001-04-10

申请号：US09322858

申请日：1999-05-28

申请人： Martin Hosek ,  Hakan Elmali

发明人： Martin Hosek ,  Hakan Elmali

IPC分类号： G06F1900

CPC分类号： B25J9/1664 ,  G05B2219/40395 ,  G05B2219/40454 ,  G05B2219/40519 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137

摘要： A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single- and multi-arm robotic manipulators, such as an extension and retraction move along a straight line or a rotary move following a circular arc, with velocity, acceleration, jerk, and jerk rate constraints. A time-optimum trajectory is the set of the position, velocity, and acceleration profiles which describe the move of a selected end effector along a given path in the shortest time possible without violating given constraints, with a special case being an optimum abort trajectory, which brings the moving arm into complete rest in the shortest time. The invention involves firstly identifying the set of fundamental trajectory shapes which cover all possible combinations of constraints for a given category of moves, e.g., a move along a straight line or along a circular arc; next, decomposing the fundamental shapes into segments where a single constraint is active; and, then, determining the time optimum paths in the segments. As a result, a unique design of time-optimum trajectories is produced based on a set of pre-defined trajectory shapes. The invention also involves the blending of simple moves into a single trajectory by decomposing trajectories of the individual moves into their orthogonal components and overlapping them for a given time interval, which results in a non-stop move along a smooth transfer path.

摘要翻译： 一种用于为单臂和多臂机器人操纵器的简单和混合移动提供易于轨道或连续加速曲线的可靠和数字有效地生成时间最优轨迹的系统，例如沿着直线的延伸和缩回移动 线或旋转移动跟随圆弧，具有速度，加速度，加加速度和加加速度约束。 时间最佳轨迹是位置，速度和加速度分布的集合，其描述了所选择的末端执行器沿着给定路径在最短时间内移动而不违反给定约束，特殊情况是最佳中止轨迹， 这使得移动臂在最短的时间内完全休息。 本发明涉及首先识别基本轨迹形状的集合，其覆盖给定类别的移动的所有可能的约束组合，例如沿着直线或沿着圆弧的移动; 接下来，将基本形状分解成单个约束有效的段; 然后，确定段中的时间最优路径。 结果，基于一组预定义的轨迹形状产生了时间优化轨迹的独特设计。 本发明还涉及通过将各个移动的轨迹分解为它们的正交分量并将其重叠在给定的时间间隔上，将简单移动混合到单个轨迹中，这导致沿着平滑传送路径的不间断移动。