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1.发明授权Controlled deposition of metal and metal cluster ions by surface field patterning in soft-landing devices 有权通过软着陆装置中的表面场图案控制金属和金属簇离子的沉积公开(公告)号：US09574263B2
公开(公告)日：2017-02-21
申请号：US14077911
申请日：2013-11-12
Applicant: University of North Texas
Inventor： Guido Fridolin Verbeck, IV , Stephen Davila
CPC classification number: C23C14/221 , B81C2201/112 , B82B3/00 , B82Y30/00 , B82Y40/00 , C23C14/04 , C23C14/12 , C23C14/28 , C23C14/54
Abstract: A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.
Abstract translation: 本文描述了使用激光烧蚀源将离子沉积到衬底上的软着陆（SL）仪器。 本发明的仪器设计有用于分离选定离子的定制漂移管和分离环离子光学器件。 漂移管允许通过与允许离子以低于1eV的能量降落到基底上的惰性浴气碰撞在激光烧蚀之后形成的离子的分离和热化。 分裂环离子光学器件能够将离子引向检测器或用于选定部件的着陆衬底。 本发明人进一步进行原子力显微镜（AFM）和漂移管测量以表征仪器的性能特征。
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2.发明申请公开(公告)号：US20180002806A1
公开(公告)日：2018-01-04
申请号：US15686864
申请日：2017-08-25
Applicant: University of North Texas
Inventor： Guido Fridolin Verbeck, IV , Stephen Davila
CPC classification number: C23C14/221 , B81C2201/112 , B82B3/00 , B82Y30/00 , B82Y40/00 , C23C14/04 , C23C14/12 , C23C14/14 , C23C14/28 , C23C14/52 , C23C14/54 , H01J37/30
Abstract: A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions and is capable of operating at atmospheric pressure. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components.
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3.发明申请Controlled Deposition of Metal and Metal Cluster Ions by Surface Field Patterning in Soft-Landing Devices 有权通过软着陆装置中的表面场图案控制金属和金属簇离子的沉积公开(公告)号：US20150045205A1
公开(公告)日：2015-02-12
申请号：US14077911
申请日：2013-11-12
Applicant: UNIVERSITY OF NORTH TEXAS
Inventor： Guido Fridolin Verbeck, IV , Stephen Davila
CPC classification number: C23C14/221 , B81C2201/112 , B82B3/00 , B82Y30/00 , B82Y40/00 , C23C14/04 , C23C14/12 , C23C14/28 , C23C14/54
Abstract: A soft-landing (SL) instrument for depositing ions onto substrates using a laser ablation source is described herein. The instrument of the instant invention is designed with a custom drift tube and a split-ring ion optic for the isolation of selected ions. The drift tube allows for the separation and thermalization of ions formed after laser ablation through collisions with an inert bath gas that allow the ions to be landed at energies below 1 eV onto substrates. The split-ring ion optic is capable of directing ions toward the detector or a landing substrate for selected components. The inventors further performed atomic force microscopy (AFM) and drift tube measurements to characterize the performance characteristics of the instrument.
Abstract translation: 本文描述了使用激光烧蚀源将离子沉积到衬底上的软着陆（SL）仪器。 本发明的仪器设计有用于分离选定离子的定制漂移管和分离环离子光学器件。 漂移管允许通过与允许离子以低于1eV的能量降落到基底上的惰性浴气碰撞在激光烧蚀之后形成的离子的分离和热化。 分裂环离子光学器件能够将离子引向检测器或用于选定部件的着陆衬底。 本发明人进一步进行原子力显微镜（AFM）和漂移管测量以表征仪器的性能特征。
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