公开(公告)号：US11256113B2

公开(公告)日：2022-02-22

申请号：US16324748

申请日：2017-08-09

Applicant: University of Southampton

Inventor： Kapil Debnath ,  Graham Reed ,  Shinichi Saito

IPC: G02B6/10 ,  G02F1/025 ,  G02F1/015

Abstract: A method of fabricating an optical structure comprises providing a layer of single crystal crystalline silicon supported on an insulating surface of a silicon substrate; using etching to remove part of the silicon layer and define a side wall which is non-parallel to the insulating surface of the substrate; forming a layer of insulating material over the side wall; forming a further layer of silicon over at least the insulating material; and removing the silicon of the further layer to a level of the layer of silicon such that the layer of insulating material occupies a slot between a portion of silicon in the layer and a portion of silicon in the further layer, a thickness of the layer of insulating material defining a width of the slot.

公开(公告)号：US11874540B2

公开(公告)日：2024-01-16

申请号：US17587679

申请日：2022-01-28

Applicant: UNIVERSITY OF SOUTHAMPTON

Inventor： Weiwei Zhang ,  Graham Reed ,  David Thomson ,  Martin Ebert ,  Shinichi Saito

IPC: G02F1/025

CPC classification number: G02F1/025 ,  G02F2202/06

Abstract: A resonator modulator for modulating light in a photonic circuit, the modulator comprising: a capacitor formed of a ring-shaped insulating region sandwiched between an outer conductive region and an inner conductive region, wherein at least one of the outer conductive regions or the inner conductive regions is a polycrystalline semiconductor material.