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公开(公告)号：US11256113B2
公开(公告)日：2022-02-22
申请号：US16324748
申请日：2017-08-09
Applicant: University of Southampton
Inventor： Kapil Debnath , Graham Reed , Shinichi Saito
Abstract: A method of fabricating an optical structure comprises providing a layer of single crystal crystalline silicon supported on an insulating surface of a silicon substrate; using etching to remove part of the silicon layer and define a side wall which is non-parallel to the insulating surface of the substrate; forming a layer of insulating material over the side wall; forming a further layer of silicon over at least the insulating material; and removing the silicon of the further layer to a level of the layer of silicon such that the layer of insulating material occupies a slot between a portion of silicon in the layer and a portion of silicon in the further layer, a thickness of the layer of insulating material defining a width of the slot.
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公开(公告)号：US10571629B1
公开(公告)日：2020-02-25
申请号：US15999071
申请日：2018-08-17
Applicant: UNIVERSITY OF SOUTHAMPTON
Inventor： Harold Chong , Rafidah Petra , Graham Reed , Swe Zin Oo , Antulio Tarazona
Abstract: An integrated photonic device comprising at least a first integrated photonic component supported by a substrate extending substantially in a plane of the device and optically isolating cladding facing the first integrated photonic component, the photonic device further comprising a waveguide formed by a deposited layer of group IV semiconductor material to extend on a slope in a direction out of the plane of the substrate, the waveguide arranged to, in use, couple light from/to the integrated photonic component through the optically isolating cladding.
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Patent Agency Ranking
公开(公告)号：US12189182B2
公开(公告)日：2025-01-07
申请号：US17779436
申请日：2020-11-27
Applicant: UNIVERSITY OF SOUTHAMPTON
Inventor： David Thomson , Graham Reed , Weiwei Zhang , Martin Ebert
Abstract: A method of manufacturing a photonic chip. The method comprises providing a wafer comprising a silicon substrate, and a low refractive index layer above the silicon substrate, forming a first trench having a first height and a second trench having a second height by etching the low refractive index layer. The second height is greater than the first height and the second trench has a bottom surface that is closer to the substrate than a bottom surface of the first trench.
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公开(公告)号：US20170248760A1
公开(公告)日：2017-08-31
申请号：US15512674
申请日：2015-09-21
Applicant: University of Southampton
Inventor： Youfang Hu , Graham Reed , David Thomson
CPC classification number: G02B6/29344 , G02B6/12007 , G02B6/126 , G02B6/2813 , G02B6/2938 , G02B2006/12061 , G02B2006/1209 , G02B2006/12164
Abstract: An optical demultiplexer/multiplexer, comprising: a multimode interference waveguide; at least one first coupling waveguide which meets the multimode interference waveguide at at least one first location and a plurality of second coupling waveguides which meet the multimode interference waveguide at a plurality of second locations which are spaced in a direction of transmission in relation to the at least one first location, with the at least one first coupling waveguide and the second coupling waveguides together with the multimode interference waveguide providing a first angled multimode interferometer which operates to demultiplex a first optical signal having optical channels of a plurality of wavelengths or multiplex optical signals of a plurality of wavelengths into a first optical signal having optical channels of the plurality of wavelengths; at least one third coupling waveguide which meets the multimode interference waveguide at at least one third location and a plurality of fourth coupling waveguides which meet the multimode interference waveguide at a plurality of fourth locations which are spaced in a direction of transmission in relation to the at least one third location, with the at least one third coupling waveguide and the plurality of fourth coupling waveguides together with the multimode interference waveguide providing a second angled multimode interferometer which operates to demultiplex a second optical signal having optical channels of a plurality of wavelengths or multiplex optical signals of a plurality of wavelengths into a second optical signal having optical channels of the plurality of wavelengths; whereby the demultiplexer/multiplexer provides for the demultiplexing/multiplexing of first and second optical signals having optical channels of a plurality of wavelengths. In a further embodiment the first coupling waveguide of an optical demultiplexer/multiplexer comprising
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公开(公告)号：US11874540B2
公开(公告)日：2024-01-16
申请号：US17587679
申请日：2022-01-28
Applicant: UNIVERSITY OF SOUTHAMPTON
Inventor： Weiwei Zhang , Graham Reed , David Thomson , Martin Ebert , Shinichi Saito
IPC: G02F1/025
CPC classification number: G02F1/025 , G02F2202/06
Abstract: A resonator modulator for modulating light in a photonic circuit, the modulator comprising: a capacitor formed of a ring-shaped insulating region sandwiched between an outer conductive region and an inner conductive region, wherein at least one of the outer conductive regions or the inner conductive regions is a polycrystalline semiconductor material.
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公开(公告)号：US10578803B2
公开(公告)日：2020-03-03
申请号：US15512674
申请日：2015-09-21
Applicant: University of Southampton
Inventor： Youfang Hu , Graham Reed , David Thomson
Abstract: An optical demultiplexer/multiplexer, comprising: a multimode interference waveguide; at least one first coupling waveguide which meets the multimode interference waveguide at least one first location and a plurality of second coupling waveguides which meet the multimode interference waveguide at a plurality of second locations which are spaced in a direction of transmission in relation to the at least one first location, with the at least one first coupling waveguide and the second coupling waveguides together with the multimode interference waveguide providing a first angled multimode interferometer which operates to demultiplex a first optical signal having optical channels of a plurality of wavelengths or multiplex optical signals of a plurality of wavelengths into a first optical signal having optical channels of the plurality of wavelengths; at least one third coupling waveguide which meets the multimode interference waveguide at least one third location and a plurality of fourth coupling waveguides which meet the multimode interference waveguide at a plurality of fourth locations which are spaced in a direction of transmission in relation to the at least one third location, with the at least one third coupling waveguide and the plurality of fourth coupling waveguides together with the multimode interference waveguide providing a second angled multimode interferometer which operates to demultiplex a second optical signal having optical channels of a plurality of wavelengths or multiplex optical signals of a plurality of wavelengths into a second optical signal having optical channels of the plurality of wavelengths; whereby the demultiplexer/multiplexer provides for the demultiplexing/multiplexing of first and second optical signals having optical channels of a plurality of wavelengths. In a further embodiment the first coupling waveguide of an optical demultiplexer/multiplexer comprising a first angled multimode interferometer is stepped or tapered in order to couple a signal having a broadened spatial, or spectral, profile. In another embodiment of an optical demultiplexer/multiplexer comprising a first angled multimode interferometer a plurality of first coupling waveguides are coupled to a photonic structure which provides a plurality of output signals having substantially equal intensity and a phase difference, also in order to couple a signal or signals having a broadened spatial, or spectral, profile. In yet another embodiment of an optical demultiplexer/multiplexer comprising a first angled multimode interferometer the multimode interference waveguide includes a reflector at one end.
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公开(公告)号：US20200057197A1
公开(公告)日：2020-02-20
申请号：US15999071
申请日：2018-08-17
Applicant: UNIVERSITY OF SOUTHAMPTON
Inventor： Harold Chong , Rafidah Petra , Graham Reed , Swe Zin Oo , Antulio Tarazona
IPC: G02B6/122
Abstract: An integrated photonic device comprising at least a first integrated photonic component supported by a substrate extending substantially in a plane of the device and optically isolating cladding facing the first integrated photonic component, the photonic device further comprising a waveguide formed by a deposited layer of group IV semiconductor material to extend on a slope in a direction out of the plane of the substrate, the waveguide arranged to, in use, couple light from/to the integrated photonic component through the optically isolating cladding.
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