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    Robot-guidance assembly for providing a precision motion of an object
    3.
    发明申请
    Robot-guidance assembly for providing a precision motion of an object 有权
    用于提供物体的精确运动的机器人引导组件

    公开(公告)号：US20050183533A1

    公开(公告)日：2005-08-25

    申请号：US11062154

    申请日：2005-02-18

    申请人： Ralf Tillmann

    发明人： Ralf Tillmann

    IPC分类号： B25J19/00 ,  B25J9/06 ,  B25J9/10 ,  B65G49/07 ,  H01L21/677 ,  B25J17/00

    CPC分类号： B25J9/1015 ,  B25J15/0095 ,  H01L21/67766 ,  Y10T74/20305 ,  Y10T74/20317

    摘要： There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.

    摘要翻译： 提供了一种用于提供物体的精确运动的机器人引导组件，特别是用于提供包括具有至少一个机器人手臂的机器人的诸如晶片的盘状构件的精确运动。 所述至少一个机器人臂具有自由端和固定端。 机器人可以在至少一个移动平面中移动至少一个机器人手臂的自由端。 组件还包括用于精确地引导至少一个移动平面中的至少一个机器人臂的自由端的引导装置。 还提供了用于检查物体表面的方法。

    Apparatus for handling of a disklike member, especially for handling of a wafer
    4.
    发明授权
    Apparatus for handling of a disklike member, especially for handling of a wafer 有权
    用于处理盘状构件的装置，特别是用于处理晶片

    公开(公告)号：US07400392B2

    公开(公告)日：2008-07-15

    申请号：US11093472

    申请日：2005-03-30

    申请人： Ralf Tillmann

    发明人： Ralf Tillmann

    IPC分类号： G01N21/00

    CPC分类号： G01N21/9501 ,  G01N21/8803 ,  G01N21/9506 ,  H01L21/67742

    摘要： There is provided an apparatus for handling a disklike member having a surface, especially for handling of a wafer, including a robot for carrying out at least an angular motion in a defined moving plane, an end-effector for holding the disklike member, and a wrist member operatively interconnecting said robot with said end-effector. The wrist member provides at least a motion of the end-effector about an axis in a plane of the surface of the disklike member. An inclining motion of said disklike member is achieved by combining the angular motion of the robot and the motion about the axis in the plane of the surface.

    摘要翻译： 提供了一种用于处理具有表面的盘形构件的装置，特别是用于处理晶片，包括用于在限定的移动平面中执行至少一个角运动的机器人，用于保持盘状构件的端部执行器，以及 手腕构件将所述机器人与所述末端执行器操作地相互连接。 手腕构件至少提供端部执行器围绕盘状构件的表面的平面中的轴线的运动。 所述盘状构件的倾斜运动通过组合机器人的角运动和围绕表面的平面中的轴线的运动来实现。

    Method and apparatus for receiving and/or transporting substrates
    5.
    发明申请
    Method and apparatus for receiving and/or transporting substrates 审中-公开
    用于接收和/或传送基底的方法和装置

    公开(公告)号：US20080091297A2

    公开(公告)日：2008-04-17

    申请号：US11677895

    申请日：2007-02-22

    申请人： Ralf Tillmann ,  Hans-Juergen Maas ,  Ingo Weiske ,  Martin Kraus

    发明人： Ralf Tillmann ,  Hans-Juergen Maas ,  Ingo Weiske ,  Martin Kraus

    IPC分类号： G06F7/00

    CPC分类号： H01L21/67265 ,  H01L21/67259

    摘要： The invention relates to a method for receiving and/or transporting substrates, wherein, by means of at least one sensor, a deviation of the position of a substrate, in particular of a substrate arranged in a slot of a container, is detected at least with respect to one degree of freedom and a movement course of at least one receiving device and/or transporting device is determined with the inclusion of said deviation.

    摘要翻译： 本发明涉及一种用于接收和/或传送衬底的方法，其中，借助于至少一个传感器，至少检测到衬底的位置，特别是布置在容器的槽中的衬底的位置的偏差 相对于一个自由度，并且通过包括所述偏差来确定至少一个接收装置和/或输送装置的运动过程。

    Robot-guidance assembly for providing a precision motion of an object
    6.
    发明授权
    Robot-guidance assembly for providing a precision motion of an object 有权
    用于提供物体的精确运动的机器人引导组件

    公开(公告)号：US07264436B2

    公开(公告)日：2007-09-04

    申请号：US11062154

    申请日：2005-02-18

    申请人： Ralf Tillmann

    发明人： Ralf Tillmann

    IPC分类号： B25J18/02

    CPC分类号： B25J9/1015 ,  B25J15/0095 ,  H01L21/67766 ,  Y10T74/20305 ,  Y10T74/20317

    摘要： There is provided a robot-guidance assembly for providing a precision motion of an object, especially for providing a precision motion of a disklike member such as a wafer, including a robot having at least one robot arm. The at least one robot arm has a free end and a fixed end. The robot can move the free end of the at least one robot arm in at least one moving plane. The assembly also includes a guiding apparatus for precisely guiding the free end of the at least one robot arm in the at least one moving plane. There is also provided a method for inspecting a surface of an object.

    摘要翻译： 提供了一种用于提供物体的精确运动的机器人引导组件，特别是用于提供包括具有至少一个机器人手臂的机器人的诸如晶片的盘状构件的精确运动。 所述至少一个机器人臂具有自由端和固定端。 机器人可以在至少一个移动平面中移动至少一个机器人手臂的自由端。 组件还包括用于精确地引导至少一个移动平面中的至少一个机器人臂的自由端的引导装置。 还提供了用于检查物体表面的方法。

    Fast swapping station for wafer transport
    7.
    发明申请
    Fast swapping station for wafer transport 有权
    快速交换台用于晶圆运输

    公开(公告)号：US20050129496A1

    公开(公告)日：2005-06-16

    申请号：US10810361

    申请日：2004-03-26

    申请人： Peter Heiland ,  Ralf Tillmann

    发明人： Peter Heiland ,  Ralf Tillmann

    IPC分类号： B25J15/08 ,  B65G49/07 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687 ,  B65F3/02

    CPC分类号： H01L21/68707 ,  Y10S414/141

    摘要： An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.

    摘要翻译： 提供一种用于接收和传送至少一个盘状构件的装置。 该装置包括拾取和放置机构，包括夹持装置。 实际上，该机构适于提供拾取和/或放置循环，其在操作期间提供所述夹持装置在上下位置之间的运动，反之亦然，由此，在向下位置，所述夹持装置 从装载位置拾取盘状构件，或将盘状构件放置在装载位置上。

    Fast swapping station for wafer transport
    10.
    发明授权
    Fast swapping station for wafer transport 有权
    快速交换台用于晶圆运输

    公开(公告)号：US07234913B2

    公开(公告)日：2007-06-26

    申请号：US10810361

    申请日：2004-03-26

    申请人： Peter Heiland ,  Ralf Tillmann

    发明人： Peter Heiland ,  Ralf Tillmann

    IPC分类号： B65H5/00

    CPC分类号： H01L21/68707 ,  Y10S414/141

    摘要： An apparatus for accepting and transferring at least one disk-like member is provided. The apparatus includes a pick- and place-mechanism including gripping means. In effect, the mechanism is adapted to provide pick- and/or place-cycles, which during operation provides a movement of said gripping means between an up and a down position and vice versa, whereby, in the down position, said gripping means either picks the disk-like member from a load position or places the disk-like member onto the load position.

    摘要翻译： 提供一种用于接收和传送至少一个盘状构件的装置。 该装置包括拾取和放置机构，包括夹持装置。 实际上，该机构适于提供拾取和/或放置循环，其在操作期间提供所述夹持装置在上下位置之间的运动，反之亦然，由此，在向下位置，所述夹持装置 从装载位置拾取盘状构件，或将盘状构件放置在装载位置上。