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公开(公告)号：US10233533B2
公开(公告)日：2019-03-19
申请号：US15109884
申请日：2015-01-07
发明人： Joseph A. DePalma , Mladen F. Trubelja , David A. Litton , Dmitri L. Novikov , Sergei F. Burlatsky
摘要： A method for use in a coating process includes pre-heating a substrate in the presence of a coating material and shielding the substrate during the pre-heating from premature deposition of the coating material by establishing a gas screen between the substrate and the coating material. An apparatus for use in a coating process includes a chamber, a crucible that is configured to hold a coating material in the chamber, an energy source operable to heat the interior of the chamber, a coating envelope situated with respect to the crucible, and at least one gas manifold located near the coating envelope. The at least one gas manifold is configured to provide a gas screen between the coating envelope and the crucible. A second manifold provides gas during a later coating deposition to compress a vapor plume of the coating material and focus the plume on the substrate to increase deposition rate.
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公开(公告)号：US20190211440A1
公开(公告)日：2019-07-11
申请号：US16355893
申请日：2019-03-18
发明人： Joseph A. DePalma , Mladen F. Trubelja , David A. Litton , Dmitri L. Novikov , Sergei F. Burlatsky
CPC分类号： C23C14/228 , C23C14/02 , C23C14/083 , C23C14/243 , C23C14/30
摘要： An apparatus for use in a coating process includes a chamber, a crucible configured to hold a coating material in the chamber, an energy source operable to heat the interior of the chamber, a coating envelope situated with respect to the crucible, and at least one gas manifold located near the coating envelope. The at least one gas manifold is configured to provide a gas screen between the coating envelope and the crucible.
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公开(公告)号：US11866816B2
公开(公告)日：2024-01-09
申请号：US16355893
申请日：2019-03-18
发明人： Joseph A. DePalma , Mladen F. Trubelja , David A. Litton , Dmitri L. Novikov , Sergei F. Burlatsky
CPC分类号： C23C14/228 , C23C14/02 , C23C14/083 , C23C14/24 , C23C14/243 , C23C14/30
摘要： An apparatus for use in a coating process includes a chamber, a crucible configured to hold a coating material in the chamber, an energy source operable to heat the interior of the chamber, a coating envelope situated with respect to the crucible, and at least one gas manifold located near the coating envelope. The at least one gas manifold is configured to provide a gas screen between the coating envelope and the crucible.
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公开(公告)号：US20160326628A1
公开(公告)日：2016-11-10
申请号：US15109884
申请日：2015-01-07
发明人： Joseph A. DePalma , Mladen F. Trubelja , David A. Litton , Dmitri L. Novikov , Sergei F. Burlatsky
CPC分类号： C23C14/228 , C23C14/02 , C23C14/083 , C23C14/243 , C23C14/30
摘要： A method for use in a coating process includes pre-heating a substrate in the presence of a coating material and shielding the substrate during the pre-heating from premature deposition of the coating material by establishing a gas screen between the substrate and the coating material. An apparatus for use in a coating process includes a chamber, a crucible that is configured to hold a coating material in the chamber, an energy source operable to heat the interior of the chamber, a coating envelope situated with respect to the crucible, and at least one gas manifold located near the coating envelope. The at least one gas manifold is configured to provide a gas screen between the coating envelope and the crucible. A second manifold provides gas during a later coating deposition to compress a vapor plume of the coating material and focus the plume on the substrate to increase deposition rate.
摘要翻译： 用于涂布方法的方法包括在涂料存在下预热基材，并且在预加热期间屏蔽基材以防止涂料过早沉积，从而在基材和涂料之间建立气体筛网。 一种用于涂覆工艺的设备包括：腔室，构造成将涂层材料保持在腔室中的坩埚，可操作以加热腔室内部的能量源，相对于坩埚定位的涂层壳体，以及位于 位于涂层外壳附近的至少一个气体歧管。 至少一个气体歧管被配置成在涂层包封和坩埚之间提供气体筛网。 第二歧管在稍后的涂层沉积期间提供气体以压缩涂层材料的蒸气羽流并将羽流聚焦在基底上以增加沉积速率。
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