公开(公告)号：US20180340253A1

公开(公告)日：2018-11-29

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Edwin VAN DEN TILLAART ,  William E. QUINN ,  Sven PEKELDER ,  Matthew KING

IPC: C23C14/24 ,  B05D1/00 ,  H01L51/50 ,  H01L51/52 ,  C23C14/12

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US20240150885A1

公开(公告)日：2024-05-09

申请号：US18416088

申请日：2024-01-18

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  Edwin VAN DEN TILLAART ,  William E. QUINN ,  Sven PEKELDER ,  Matthew KING

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/22 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/60

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.