公开(公告)号：US20230269994A1

公开(公告)日：2023-08-24

申请号：US18104353

申请日：2023-02-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Roman KOROTKOV ,  Craig Anthony OUTTEN

IPC: H10K71/13 ,  H01L21/02 ,  H01L21/302

CPC classification number: H10K71/13 ,  H01L21/02123 ,  H01L21/0223 ,  H01L21/302 ,  H10K2102/00

Abstract: Implementations of the disclosed subject matter provide an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures. The organic vapor jet print die may include at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven. At least one second aperture in each cluster of apertures may be an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures. The delivery apertures and exhaust apertures may have a uniformity that is less than 0.4%.

公开(公告)号：US20230151491A1

公开(公告)日：2023-05-18

申请号：US18099339

申请日：2023-01-20

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C14/12 ,  C23C14/24 ,  B41J2/00 ,  H10K71/13

CPC classification number: C23C16/45563 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  B41J2/00 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20220352467A1

公开(公告)日：2022-11-03

申请号：US17729465

申请日：2022-04-26

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Craig Anthony OUTTEN ,  Gregory MCGRAW ,  Matthew KING ,  Xin XU

IPC: H01L51/00 ,  C23C14/12 ,  C23C14/22 ,  C23C16/44

Abstract: Organic vapor jet printing (OVJP) devices and techniques are provided that use a solid materials sublimation source to provide material for deposition on a substrate. Carrier gas from a carrier gas source entrains vapor from the solid material within each sublimation source for transport to a print head within a deposition chamber. The sublimation source includes a sufficiently long internal flow path to achieve an acceptable level of material saturation of the carrier gas.

公开(公告)号：US20220020972A1

公开(公告)日：2022-01-20

申请号：US17361469

申请日：2021-06-29

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Igor KOZIN ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  B05B12/12 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a print head that includes a micronozzle array of depositors to deposit a material on a substrate. A reflective optical device may reflect a signal output by at least one optical sensor, and to reflect the signal from a surface of the substrate to the optical sensor. A processor may determine a distance between the optical sensor and the target surface of the substrate. The device may include one or more actuators coupled to the at least one print head to move the print head relative to an internal reference frame and adjust a position of the print head to the substrate. The sensor may be fixedly coupled with a mount to the internal reference frame. The print head may be configured to move independently of the optical sensor in at least one axis of linear or rotational motion.

公开(公告)号：US20210384429A1

公开(公告)日：2021-12-09

申请号：US17407204

申请日：2021-08-20

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/00 ,  B05B12/18 ,  H01L51/56 ,  H01L51/50

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20200291521A1

公开(公告)日：2020-09-17

申请号：US16891148

申请日：2020-06-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C14/12 ,  H01L51/00 ,  C23C14/24 ,  B41J2/00

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20180108865A1

公开(公告)日：2018-04-19

申请号：US15787117

申请日：2017-10-18

Applicant: Universal Display Corporation

Inventor： Siddharth HARIKRISHNA MOHAN ,  William E. QUINN ,  Arpit PATEL ,  James Robert KANTOR

IPC: H01L51/52 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/5256 ,  H01L51/0097 ,  H01L51/56 ,  H01L2251/5338 ,  H01L2251/558

Abstract: A hybrid permeation barrier having two complementary layers is disclosed. The barrier includes a first layer with a relatively high stress-thickness in the range of −1000 MPa-μm to −200 MPa-μm and a second layer with a relatively low stress-thickness in the range −150 MPa-μm to 300 MPa-μm. The second layer compensates for the stress caused by the first, thereby allowing for a barrier that provides good permeation without causing failure of the device due to delamination.

公开(公告)号：US20170306486A1

公开(公告)日：2017-10-26

申请号：US15492556

申请日：2017-04-20

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： William E. QUINN ,  Gregory MCGRAW

IPC: C23C16/455 ,  H01L51/00 ,  F15D1/00 ,  H01L51/56 ,  B05B7/16

CPC classification number: H01L51/56 ,  C23C16/4481 ,  C23C16/45561 ,  H01L51/0002 ,  H01L51/001

Abstract: A source of material for use in a deposition system includes one or more baffles or equivalent structures within the source. The baffles provide for increased concentration of material entrained in a carrier gas that is passed through and emitted by the source.

公开(公告)号：US20170104159A1

公开(公告)日：2017-04-13

申请号：US15291756

申请日：2016-10-12

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  William E. QUINN ,  Gregory MCGRAW ,  Siddharth HARIKRISHNA MOHAN ,  Elliot H. HARTFORD, Jr. ,  Benjamin SWEDLOVE ,  Gregg KOTTAS ,  Tomasz TROJACKI ,  Julia J. BROWN

IPC: H01L51/00 ,  H01L51/56 ,  H01L51/52 ,  H01L51/50 ,  C23C14/12 ,  C23C14/24

CPC classification number: H01L51/0013 ,  C23C14/12 ,  C23C14/228 ,  C23C14/243 ,  H01L51/008 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/5072 ,  H01L51/5088 ,  H01L51/5092 ,  H01L51/5096 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/5253 ,  H01L51/56 ,  H01L2251/5353

Abstract: Systems and arrangements of OVJP deposition devices are provided, in which one or more organic material crucibles are directly attached to an injection block and a print head without the need for external delivery components such as feedtubes. Each crucible may be hermetically sealed until it is attached to the injection block, allowing for a single device to provide for storage, transport, and deposition of the organic material.

公开(公告)号：US20150144890A1

公开(公告)日：2015-05-28

申请号：US14087940

申请日：2013-11-22

Applicant: Universal Display Corporation

Inventor： Ruiqing MA ,  Gregory MCGRAW ,  William E. QUINN ,  Siddharth HARIKRISHNA MOHAN

IPC: H01L51/52

CPC classification number: H01L51/5275

Abstract: A device having high index layers is provided. The device includes an organic light emissive device, an air interface, a first planarization layer, and a first barrier layer. The first planarization layer is disposed between the air interface and the organic light emissive device and has an index of refraction of at least 1.6. The first barrier layer is disposed between the first planarization layer and the organic emissive device and has an index of refraction of at least 1.6.

Abstract translation: 提供了具有高折射率层的装置。 该装置包括有机发光装置，空气界面，第一平坦化层和第一阻挡层。 第一平坦化层设置在空气界面和有机发光装置之间，并且具有至少1.6的折射率。 第一阻挡层设置在第一平坦化层和有机发射器件之间，并且折射率至少为1.6。