公开(公告)号：US4123655A

公开(公告)日：1978-10-31

申请号：US827307

申请日：1977-08-24

申请人： Uwe Maixner ,  Dieter Milferstadt

发明人： Uwe Maixner ,  Dieter Milferstadt

IPC分类号： G01N23/227 ,  G01N23/00 ,  G21K1/02 ,  H01J3/40 ,  H01J5/02 ,  H01J37/09 ,  H01J37/30 ,  H01J49/44 ,  H01J49/48 ,  H01J39/00

CPC分类号： H01J3/40 ,  G21K1/025 ,  H01J37/09 ,  H01J37/3002 ,  H01J49/482

摘要： An arrangement relating to the prevention of the alteration of the primaryeam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes, and to the resulting local improvement in the operational vacuum in electron-beam devices, ion-beam devices and in electron-energy analyzers and ion-mass analyzers using only three-dimensional metallic microstructures known as particle traps. Substantially all the flat parts of the components of the instrument seen by the beams, such as electrodes, diaphragms, screening plates, housing walls and the like, consist of a metal having a low atomization rate and a very low desorption rate, such as titanium or zirconium or similar substances and their alloys. Apertures of less than 0.5 mm in diameter, situated close beside one another and extending substantially perpendicular to the surface, are provided in the surfaces of the components of the instrument, between which apertures a lattice structure remains located in the surface, the depth of the apertures being equal to or larger than their opening cross-section and the total cross-sectional area of the apertures corresponding to at least half the metal surface occupied thereby.

摘要翻译： 与防止由不需要的颗粒（例如溅射产物，带电离子和电子）及其次要过程的主要束的改变以及由此导致的电子束装置中的操作真空的局部改进，离子束 器件和电子能量分析仪和离子质量分析仪仅使用三维金属微结构称为颗粒捕集阱。 基本上由梁观察到的仪器部件的所有平面部分，例如电极，隔膜，筛板，壳体壁等都由具有低雾化速率和非常低的解吸速率的金属组成，例如钛 或锆或类似物质及其合金。 在仪器部件的表面中设置直径小于0.5mm的孔径，彼此靠近并且基本上垂直于表面延伸，在孔的表面中，格子结构保持位于表面中，孔的深度 孔径等于或大于其开口横截面，并且孔的总横截面积对应于由此占据的金属表面的至少一半。

公开(公告)号：US5298333A

公开(公告)日：1994-03-29

申请号：US688380

申请日：1991-04-19

申请人： Uwe Maixner ,  Dieter Milferstadt

发明人： Uwe Maixner ,  Dieter Milferstadt

IPC分类号： H01L41/04 ,  H01L37/02 ,  H01L41/047 ,  H01L41/22 ,  H03H9/13 ,  H01L41/08

CPC分类号： H01L41/0478 ,  H01L37/02 ,  H01L2924/0002

摘要： A conductive surface layer, for example to form an electrode. For piezoelectric, pyroelectric, and ferroelectric components, as well as for piezoceramic components, the layer is formed of at least one electrically conductive hard product of at least one of the metals of at least the groups III to VIII of the periodic table of the elements.

摘要翻译： 导电表面层，例如形成电极。 对于压电，热电和铁电组分以及压电陶瓷组分，该层由至少一种元素周期表的III至VIII族的至少一种金属的导电硬产物形成 。

公开(公告)号：US4205232A

公开(公告)日：1980-05-27

申请号：US937729

申请日：1978-08-29

申请人： Uwe Maixner ,  Dieter Milferstadt

发明人： Uwe Maixner ,  Dieter Milferstadt

IPC分类号： G01Q30/02 ,  G01Q30/16 ,  H01H1/021 ,  H01J37/02 ,  H01J49/48 ,  H05F3/02 ,  H01J35/16 ,  G01K1/08

CPC分类号： H05F3/02 ,  H01H1/021 ,  H01J37/02 ,  H01J49/482

摘要： An arrangement relating to the prevention of the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes, and to the resulting local improvement in the operational vacuum in electron-beam devices, ion-beam devices and in electron-energy analyzers and ion-mass analyzers using only three-dimensional metallic microstructures known as particle traps. Substantially, all the flat parts of the components of the instrument seen by the beams, such as electrodes, diaphragms, screening plates, housing walls and the like, consist of a metal having a low atomization rate and a very low desorption rate, such as titanium or zirconium or similar substances and their alloys. Apertures of less than 0.5 mm in diameter, situated close beside one another and extending substantially perpendicular to the surface, are provided in the surfaces of the components of the instrument, between which apertures a lattice structure remains located in the surface, the depth of the apertures being equal to or larger than their opening cross-section and the total cross-sectional area of the apertures corresponding to at least half the metal surface occupied thereby.

摘要翻译： 与防止由不需要的颗粒（例如溅射产物，带电离子和电子）及其次要过程的主要束的改变以及由此导致的电子束装置中的操作真空的局部改进，离子束 器件和电子能量分析仪和离子质量分析仪仅使用三维金属微结构称为颗粒捕集阱。 基本上，梁所观察到的仪器部件的所有平面部分，例如电极，隔膜，筛板，壳体壁等都由具有低雾化速率和非常低的解吸速率的金属组成，例如 钛或锆或类似物质及其合金。 在仪器部件的表面中设置直径小于0.5mm的孔径，彼此靠近并且基本上垂直于表面延伸，在孔的表面中，格子结构保持位于表面中，孔的深度 孔径等于或大于其开口横截面，并且孔的总横截面积对应于由此占据的金属表面的至少一半。