公开(公告)号：US20120106583A1

公开(公告)日：2012-05-03

申请号：US12917553

申请日：2010-11-02

申请人： Christopher Watson ,  Kirill Pimenov ,  Valery Tolstikhin ,  Fang Wu ,  Yury Logvin

发明人： Christopher Watson ,  Kirill Pimenov ,  Valery Tolstikhin ,  Fang Wu ,  Yury Logvin

IPC分类号： H01S5/22 ,  H01L33/58 ,  H01L21/302

CPC分类号： H01S5/2232 ,  H01S5/0208 ,  H01S5/0422 ,  H01S5/1231 ,  H01S5/2018 ,  H01S5/2081 ,  H01S5/22

摘要： A VCSEG-DFB laser, fully compatible with MGVI design and manufacturing methodologies, for single growth monolithic integration in multi-functional PICs is presented. It comprises a laser PIN structure, in mesa form, etched from upper emitter layer top surface through the active, presumably MQW, gain region, down to the top surface of the lower emitter. Lower electrical contacts sit adjacent the mesa disposed on the lower emitter layer with upper strip contacts disposed atop the upper emitter layer on the mesa top. An SEG is defined/etched from mesa top surface, between the upper strip contacts, through upper emitter layer down to or into the SCH layers. Vertical confinement is provided by the SCH structure and the lateral profile in the bottom portion of the mesa provides lateral confinement. The guided mode interacts with the SEG by the vertical tail penetrating the SEG and evanescent field coupling to the SEG.

摘要翻译： 提出了一种与MGVI设计和制造方法完全兼容的VCSEG-DFB激光器，用于多功能PIC中的单次增长单片集成。 它包括台面形式的激光PIN结构，从上部发射极层顶表面通过有源，大概是MQW，增益区域，到下部发射极的顶部表面蚀刻。 较低的电触头位于设置在下部发射极层上的台面附近，上部带状触点设置在台面顶部的上部发射极层顶部。 SEG由台面顶面，上部条状接触件之间，通过上部发射极层向下或向SCH层定义/蚀刻。 垂直限制由SCH结构提供，台面底部的侧向轮廓提供横向限制。 引导模式通过穿过SEG的垂直尾翼和耦合到SEG的渐逝场与SEG相互作用。

公开(公告)号：US08098969B2

公开(公告)日：2012-01-17

申请号：US12632933

申请日：2009-12-08

申请人： Valery Tolstikhin ,  Fang Wu ,  Christopher Watson ,  Yury Logvin ,  Kirill Pimenov

发明人： Valery Tolstikhin ,  Fang Wu ,  Christopher Watson ,  Yury Logvin ,  Kirill Pimenov

IPC分类号： G02B6/12

CPC分类号： H01S5/5018 ,  G02B2006/12121 ,  G02B2006/12123 ,  G02B2006/12195 ,  H01S5/0262 ,  H01S5/1014

摘要： The invention describes an integrated-photonics arrangement, implementable in a multi-guide vertical integration (MGVI) structure composed from III-V semiconductors and grown in one epitaxial growth run, allowing for the integration of semiconductor optical amplifier (SOA) and PIN photodetector (PIN) structures within a common wavelength-designated waveguide of the plurality of the vertically integrated wavelength-designated waveguides forming the MGVI structure. The integration includes a wavelength filter integrated between the SOA and PIN to reduce noise within the PIN arising from ASE generated by the SOA. In exemplary embodiments of the invention, the wavelength filter is integrated into MGVI structure either within a common wavelength designated waveguide or within the wavelength-designated waveguide. Further in other embodiments the wavelength filter is provided by a thin-film filter abutting a facet of the integrated-photonics arrangement wherein optical signals are coupled by optical waveguides and/or additional optical elements such as a multimode interference device.

摘要翻译： 本发明描述了一种集成光子学布置，其可以在由III-V半导体组成并在一个外延生长运行中生长的多导向垂直积分（MGVI）结构中实现，允许将半导体光放大器（SOA）和PIN光电检测器 PIN）结构，其构成了形成MGVI结构的多个垂直集成的波长指定波导的公共波长指定波导。 集成包括集成在SOA和PIN之间的波长滤波器，以减少由SOA产生的ASE产生的PIN内的噪声。 在本发明的示例性实施例中，波长滤波器在公共波长指定波导内或波长指定波导内集成到MGVI结构中。 此外，在其它实施例中，波长滤波器由抵靠集成光子学装置的小平面的薄膜滤光器提供，其中光信号通过光波导耦合，和/或诸如多模干涉装置的附加光学元件耦合。

公开(公告)号：US20110135314A1

公开(公告)日：2011-06-09

申请号：US12632933

申请日：2009-12-08

申请人： Valery Tolstikhin ,  Fang Wu ,  Christopher Watson ,  Yury Logvin ,  Kirill Pimenov

发明人： Valery Tolstikhin ,  Fang Wu ,  Christopher Watson ,  Yury Logvin ,  Kirill Pimenov

IPC分类号： H04B10/12

CPC分类号： H01S5/5018 ,  G02B2006/12121 ,  G02B2006/12123 ,  G02B2006/12195 ,  H01S5/0262 ,  H01S5/1014

摘要： The invention describes an integrated-photonics arrangement, implementable in a multi-guide vertical integration (MGVI) structure composed from III-V semiconductors and grown in one epitaxial growth run, allowing for the integration of semiconductor optical amplifier (SOA) and PIN photodetector (PIN) structures within a common wavelength-designated waveguide of the plurality of the vertically integrated wavelength-designated waveguides forming the MGVI structure. The integration includes a wavelength filter integrated between the SOA and PIN to reduce noise within the PIN arising from ASE generated by the SOA. In exemplary embodiments of the invention, the wavelength filter is integrated into MGVI structure either within a common wavelength designated waveguide or within the wavelength-designated waveguide. Further in other embodiments the wavelength filter is provided by a thin-film filter abutting a facet of the integrated-photonics arrangement wherein optical signals are coupled by optical waveguides and/or additional optical elements such as a multimode interference device.

摘要翻译： 本发明描述了一种集成光子学布置，其可以在由III-V半导体组成并在一个外延生长运行中生长的多导向垂直积分（MGVI）结构中实现，允许将半导体光放大器（SOA）和PIN光电检测器 PIN）结构，其构成了形成MGVI结构的多个垂直集成的波长指定波导的公共波长指定波导。 集成包括集成在SOA和PIN之间的波长滤波器，以减少由SOA产生的ASE产生的PIN内的噪声。 在本发明的示例性实施例中，波长滤波器在公共波长指定波导内或波长指定波导内集成到MGVI结构中。 此外，在其它实施例中，波长滤波器由抵靠集成光子学装置的小平面的薄膜滤光器提供，其中光信号通过光波导耦合，和/或诸如多模干涉装置的附加光学元件耦合。

公开(公告)号：US20090136173A1

公开(公告)日：2009-05-28

申请号：US11984922

申请日：2007-11-26

申请人： Yury Logvin ,  Fang Wu ,  Kirill Pimenov ,  Valery Tolstikhin

发明人： Yury Logvin ,  Fang Wu ,  Kirill Pimenov ,  Valery Tolstikhin

IPC分类号： G02B6/12 ,  H01L21/00

CPC分类号： G02B6/12004 ,  G02B6/131 ,  G02B6/14

摘要： The invention describes method and apparatus for a mode converter enabling an adiabatic transfer of a higher order mode into a lower order optical mode within a photonic integrated circuit exploiting integrated semiconductor ridge waveguide techniques. As disclosed by the invention, such a mode conversion is achievable by using an asymmetric coupler methodology. In an exemplary embodiment of the invention, the invention is used to provide a low insertion loss optical connection between laterally-coupled DFB laser operating in first order mode and passive waveguide operating in the zero order optical mode. The integrated arrangement fabricated by using one-step epitaxial growth allows for a launch of the laser's light into the waveguide circuitry operating in the zero order lateral mode or efficiently coupling it to single-mode fiber, an otherwise high loss interface due to the difference in laser and optical fiber modes.

摘要翻译： 本发明描述了一种用于模式转换器的方法和装置，该模式转换器使得能够在利用集成半导体脊波导技术的光子集成电路内将较高阶模式绝热转移到低阶光学模式。 如本发明所公开的，通过使用不对称耦合器方法可以实现这种模式转换。 在本发明的示例性实施例中，本发明用于提供以一阶模式工作的横向耦合的DFB激光器和以零阶光学模式操作的无源波导之间的低插入损耗光学连接。 通过使用一步外延生长制造的集成布置允许将激光的光发射到以零级横向模式操作的波导电路中，或者将其有效地耦合到单模光纤，否则由于差的 激光和光纤模式。

公开(公告)号：US07539373B1

公开(公告)日：2009-05-26

申请号：US11984922

申请日：2007-11-26

申请人： Yury Logvin ,  Fang Wu ,  Kirill Pimenov ,  Valery Tolstikhin

发明人： Yury Logvin ,  Fang Wu ,  Kirill Pimenov ,  Valery Tolstikhin

IPC分类号： G02B6/26

CPC分类号： G02B6/12004 ,  G02B6/131 ,  G02B6/14

摘要： The invention describes method and apparatus for a mode converter enabling an adiabatic transfer of a higher order mode into a lower order optical mode within a photonic integrated circuit exploiting integrated semiconductor ridge waveguide techniques. As disclosed by the invention, such a mode conversion is achievable by using an asymmetric coupler methodology. In an exemplary embodiment of the invention, the invention is used to provide a low insertion loss optical connection between laterally-coupled DFB laser operating in first order mode and passive waveguide operating in the zero order optical mode. The integrated arrangement fabricated by using one-step epitaxial growth allows for a launch of the laser's light into the waveguide circuitry operating in the zero order lateral mode or efficiently coupling it to single-mode fiber, an otherwise high loss interface due to the difference in laser and optical fiber modes.

公开(公告)号：US20080138008A1

公开(公告)日：2008-06-12

申请号：US11984759

申请日：2007-11-21

申请人： Valery Tolstikhin ,  Yury Logvin ,  Kirill Pimenov

发明人： Valery Tolstikhin ,  Yury Logvin ,  Kirill Pimenov

IPC分类号： G02B6/12

CPC分类号： G02B6/1228 ,  G02B6/125 ,  G02B2006/12097 ,  G02B2006/12119

摘要： The invention describes an integrated-photonics arrangement, implementable in a multi-guide vertical integration structure composed from III-V semiconductors and grown in one epitaxial growth run, that allows for vertical and lateral splitting of optical signals co- or bi-directionally propagating in the common passive waveguide into plurality of the vertically integrated passive or active wavelength-designated waveguides, therefore, enabling the wavelength-designated waveguides operating in different wavelengths to be monolithically integrated onto the same substrate and connected to the shared passive waveguide. In the exemplary embodiments of the invention, two active wavelength-designated waveguides, each of which either laser or photodetector, are vertically integrated with a common passive waveguide connected to the input/output optical port shared by both operating wavelengths, to form a single-fiber, two-wavelength receiver (both wavelength-designated waveguides are waveguide photodetectors) or transmitter (both wavelength-designated waveguides are edge-emitting semiconductor injection lasers) or transceiver (one wavelength-designated waveguide is waveguide photodetector and the other—edge-emitting semiconductor injection laser). Advantageously to the previous art, the proposed vertical splitting and lateral routing allows for a reduced footprint size while greatly improving design flexibility and/or device performance.

摘要翻译： 本发明描述了一种集成光子学布置，其可以在由III-V半导体构成并且在一个外延生长运行中生长的多导向垂直整合结构中实现，其允许垂直和横向分裂光信号共同或双向传播 将普通的无源波导分为多个垂直集成的无源或有源波长指定的波导，因此能使波长指定的在不同波长下工作的波导单片集成在同一基板上并连接到共用无源波导。 在本发明的示例性实施例中，两个有源波长指定的波导（其中的每个激光器或光电检测器）与连接到由两个工作波长共用的输入/输出光学端口的公共无源波导垂直集成， 光纤，双波长接收器（两个波长指定的波导是波导光电检测器）或发射器（两个波长指定的波导都是边缘发射半导体注入激光器）或收发器（一个波长指定的波导是波导光电检测器，另一个边缘发射 半导体注入激光）。 有利的是，与先前技术相比，所提出的垂直分割和横向布线允许减小占地面积的大小，同时大大提高设计灵活性和/或设备性能。

公开(公告)号：US07444055B2

公开(公告)日：2008-10-28

申请号：US11984759

申请日：2007-11-21

申请人： Valery Tolstikhin ,  Yury Logvin ,  Kirill Pimenov

发明人： Valery Tolstikhin ,  Yury Logvin ,  Kirill Pimenov

IPC分类号： G02B6/10 ,  H04J14/02 ,  H01L21/82

CPC分类号： G02B6/1228 ,  G02B6/125 ,  G02B2006/12097 ,  G02B2006/12119

摘要： The invention describes an integrated-photonics arrangement, implementable in a multi-guide vertical integration structure composed from III-V semiconductors and grown in one epitaxial growth run, that allows for vertical and lateral splitting of optical signals co- or bi-directionally propagating in the common passive waveguide into plurality of the vertically integrated passive or active wavelength-designated waveguides, therefore, enabling the wavelength-designated waveguides operating in different wavelengths to be monolithically integrated onto the same substrate and connected to the shared passive waveguide. In the exemplary embodiments of the invention, two active wavelength-designated waveguides, each of which either laser or photodetector, are vertically integrated with a common passive waveguide connected to the input/output optical port shared by both operating wavelengths, to form a single-fiber, two-wavelength receiver (both wavelength-designated waveguides are waveguide photodetectors) or transmitter (both wavelength-designated waveguides are edge-emitting semiconductor injection lasers) or transceiver (one wavelength-designated waveguide is waveguide photodetector and the other—edge-emitting semiconductor injection laser). Advantageously to the previous art, the proposed vertical splitting and lateral routing allows for a reduced footprint size while greatly improving design flexibility and/or device performance.

摘要翻译： 本发明描述了一种集成光子学布置，其可以在由III-V半导体构成并且在一个外延生长运行中生长的多导向垂直整合结构中实现，其允许垂直和横向分裂光信号共同或双向传播 将普通的无源波导分为多个垂直集成的无源或有源波长指定的波导，因此能使波长指定的在不同波长下工作的波导单片集成在同一基板上并连接到共用无源波导。 在本发明的示例性实施例中，两个有源波长指定的波导（其中的每个激光器或光电检测器）与连接到由两个工作波长共用的输入/输出光学端口的公共无源波导垂直集成， 光纤，双波长接收器（两个波长指定的波导是波导光电检测器）或发射器（两个波长指定的波导都是边缘发射半导体注入激光器）或收发器（一个波长指定的波导是波导光电检测器，另一个边缘发射 半导体注入激光）。 有利的是，与先前技术相比，所提出的垂直分割和横向布线允许减小占地面积的大小，同时大大提高设计灵活性和/或设备性能。

公开(公告)号：US20070031083A1

公开(公告)日：2007-02-08

申请号：US11473242

申请日：2006-06-23

申请人： Yury Logvin ,  Serge Grabtchak ,  Kirill Pimenov

发明人： Yury Logvin ,  Serge Grabtchak ,  Kirill Pimenov

IPC分类号： G02B6/42 ,  G02F1/295 ,  G02F1/01 ,  G02B6/26 ,  G02B6/10

CPC分类号： G02B6/125 ,  G02B2006/12097

摘要： Ridge and buried waveguide structures feature a plurality of trenches disposed proximate the waveguides in order to enhance confinement of an optical signal propagating within the waveguide are described. Additionally, an adiabatic transition region where the distance between trenches and waveguide is featured.

摘要翻译： 描述了脊和掩埋波导结构，其特征在于设置在波导附近的多个沟槽，以便增强在波导内传播的光信号的约束。 另外，其中特征在于沟槽和波导之间的距离的绝热过渡区域。

公开(公告)号：US07796656B2

公开(公告)日：2010-09-14

申请号：US11979510

申请日：2007-11-05

申请人： Chris Watson ,  Kirill Pimenov ,  Valery Tolstikhin ,  Greg Letal ,  Ron Moore

发明人： Chris Watson ,  Kirill Pimenov ,  Valery Tolstikhin ,  Greg Letal ,  Ron Moore

IPC分类号： H01S3/098 ,  H01S3/08

CPC分类号： H01S5/12 ,  H01S5/0655 ,  H01S5/1014 ,  H01S5/1221 ,  H01S5/1237 ,  H01S5/22

摘要： The invention describes the method and apparatus for enhanced efficiency in a laterally-coupled distributed feedback (LC-DFB) laser. In a device featuring the effective ridge design, lateral confinement of the guided optical modes is provided by a surface etched grating, which also serves as a DFB element of the laser. Coupling and quantum efficiency of such a LC-DFB laser both improve with an increase of the lateral mode order. In accordance with this invention, a dramatic enhancement of the laser efficiency is achievable by designing it to operate in one of the higher order modes, notably the first order mode, while all the other lateral modes, including the zero order mode, are suppressed through gain-loss discrimination. In the exemplary embodiment of the invention, this enhanced efficiency technique is applied to the design of a single-mode LC-DFB laser suitable for a monolithic integration with other active and passive functional elements of photonic integrated circuits fabricated by using one-step epitaxial growth.

摘要翻译： 本发明描述了用于增强侧向耦合分布反馈（LC-DFB）激光器的效率的方法和装置。 在具有有效脊设计的装置中，引导光学模式的横向限制由表面蚀刻光栅提供，其也用作激光的DFB元件。 这种LC-DFB激光器的耦合和量子效率随着横向模式顺序的增加而改善。 根据本发明，激光效率的显着提高可以通过将其设计成以较高阶模式（特别是一阶模式）中的一种工作来实现，而包括零级模式的所有其它横向模式通过 损益歧视。 在本发明的示例性实施例中，该增强效率技术被应用于单模LC-DFB激光器的设计，其适用于通过使用一步外延生长制造的光子集成电路的其它有源和无源功能元件的单片集成 。

公开(公告)号：US20080069496A1

公开(公告)日：2008-03-20

申请号：US11898398

申请日：2007-09-12

申请人： Valery Tolstikhin ,  Kirill Pimenov

发明人： Valery Tolstikhin ,  Kirill Pimenov

IPC分类号： G02B6/34

CPC分类号： G02B6/124

摘要： The invention describes the method and apparatus for enhancement of coupling efficiency in effective-ridge laterally-coupled surface-etched grating waveguide structures, where a slab waveguide has a sequence of the periodic parallel segmented trenches etched from its top surface, such that the segments of intact material having higher refractive index than that in the surrounding segments of periodic trenches form the effective ridges which confine the optical field in and around these ridges, on one hand, and provide bidirectional coupling for the confined modes experiencing Bragg reflection from the segments of the periodic trenches, on the other. The invention discloses the designs of the multiple effective ridge laterally coupled surface-etched grating waveguide structures, which enhances the coupling efficiency as compared to a conventional single effective ridge grating design because of an intended dilution of the lateral confinement caused by the multiple effective ridges, resulting in an increase of the optical mode's overlap with the surface etched grating formed everywhere outside the effective ridges.

摘要翻译： 本发明描述了用于增强有效脊横向耦合表面蚀刻光栅波导结构中的耦合效率的方法和装置，其中平板波导具有从其顶表面蚀刻的周期性平行分段沟槽的序列，使得 具有比周期性沟槽的周围段中的折射率高的折射率的完整材料一方面形成将光场限制在这些脊内和周围的有效脊，一方面，为经受来自该段的段的布拉格反射提供双向耦合 周期性的沟渠，另一方面。 本发明公开了多个有效脊侧向耦合表面蚀刻光栅波导结构的设计，与传统的单一有效脊格栅设计相比，由于由多个有效脊引起的横向约束的预期稀释，增强了耦合效率， 导致光学模式与在有效脊之外形成的表面蚀刻光栅的重叠的增加。