公开(公告)号：US20160160387A1

公开(公告)日：2016-06-09

申请号：US14997180

申请日：2016-01-15

Applicant: Veeco Instruments Inc.

Inventor： William E. Quinn ,  Alexander Gurary ,  Ajit Paranjpe ,  Maria D. Ferreira ,  Roger P. Fremgen ,  Eric A. Armour

IPC: C30B25/02 ,  C30B25/10 ,  H01L21/677 ,  C30B25/14 ,  C30B29/40 ,  H01L21/02 ,  C30B25/08 ,  C30B25/12

Abstract: A linear cluster deposition system includes a plurality of reaction chambers positioned in a linear horizontal arrangement. First and second reactant gas manifolds are coupled to respective process gas input port of each of the reaction chambers. An exhaust gas manifold having a plurality of exhaust gas inputs is coupled to the exhaust gas output port of each of the plurality of reaction chambers. A substrate transport vehicle transports at least one of a substrate and a substrate carrier that supports at least one substrate into and out of substrate transfer ports of each of the reaction chambers. At least one of a flow rate of process gas into the process gas input port of each of the reaction chambers and a pressure in each of the reaction chambers being chosen so that process conditions are substantially the same in at least two of the reaction chambers.

Abstract translation: 线性簇沉积系统包括以线性水平布置定位的多个反应室。 第一和第二反应气体歧管连接到每个反应室的相应工艺气体输入口。 具有多个排气输入的废气歧管与多个反应室中的每一个的废气输出端口连接。 基板输送车辆将基板和基板载体中的至少一个输送到每个反应室的基板输送口中并至少支撑至少一个基板。 选择每个反应室的工艺气体进入工艺气体输入口的流量和每个反应室中的压力中的至少一个，使得工艺条件在至少两个反应室中基本相同。

公开(公告)号：US09804126B2

公开(公告)日：2017-10-31

申请号：US13705650

申请日：2012-12-05

Applicant: Veeco Instruments Inc.

Inventor： Raymond C. Logue ,  Don N. Sirota ,  William E. Quinn ,  Owan C. Watkins ,  Maria D. Ferreira ,  Wei Zhang

IPC: G01N29/00 ,  G01N29/036 ,  G01N29/22 ,  G01N29/24 ,  G01N29/28 ,  G10K11/02

CPC classification number: G01N29/00 ,  G01N29/036 ,  G01N29/222 ,  G01N29/2437 ,  G01N29/28 ,  G01N2291/022 ,  G10K11/02

Abstract: An acoustical transformer having a last matching section that includes a protective barrier of low permeability. The protective barrier is in contact with a test medium. In one embodiment, the protective barrier comprises one or more low permeability layers, such as a metallic foil or metallic coating(s) disposed on a low impedance layer such as polyimide, so that the low impedance layer and the protective barrier constitute the last matching section of the acoustical transformer. In other embodiments, the protective barrier comprises a fluoropolymer. A method for determining the thicknesses of the various layers of the acoustical transformer for enhanced performance is also disclosed.

公开(公告)号：US20140060153A1

公开(公告)日：2014-03-06

申请号：US13705650

申请日：2012-12-05

Applicant: VEECO INSTRUMENTS INC.

Inventor： Raymond C. Logue ,  Don N. Sirota ,  William E. Quinn ,  Owan C. Watkins ,  Maria D. Ferreira ,  Wei Zhang

IPC: G01N29/00

CPC classification number: G01N29/00 ,  G01N29/036 ,  G01N29/222 ,  G01N29/2437 ,  G01N29/28 ,  G01N2291/022 ,  G10K11/02

Abstract: An acoustical transformer having a last matching section that includes a protective barrier of low permeability. The protective barrier is in contact with a test medium. In one embodiment, the protective barrier comprises one or more low permeability layers, such as a metallic foil or metallic coating(s) disposed on a low impedance layer such as polyimide, so that the low impedance layer and the protective barrier constitute the last matching section of the acoustical transformer. In other embodiments, the protective barrier comprises a fluoropolymer. A method for determining the thicknesses of the various layers of the acoustical transformer for enhanced performance is also disclosed.

Abstract translation: 一种具有最后匹配部分的声变压器，其包括低渗透性的保护屏障。 保护屏障与测试介质接触。 在一个实施例中，保护屏障包括一个或多个低渗透性层，例如设置在诸如聚酰亚胺的低阻抗层上的金属箔或金属涂层，使得低阻抗层和保护屏障构成最后匹配 声变压器部分。 在其它实施方案中，保护屏障包含含氟聚合物。 还公开了一种用于确定用于增强性能的声变换器的各个层的厚度的方法。