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公开(公告)号：US12078829B2
公开(公告)日：2024-09-03
申请号：US18349404
申请日：2023-07-10
申请人： VIAVI Solutions Inc.
发明人： Georg J. Ockenfuss , Tim Gustafson , Jeffrey James Kuna , Markus Bilger , Richard A. Bradley, Jr.
IPC分类号： G02B5/28 , G02B1/10 , H01L27/146
CPC分类号： G02B5/285 , G02B1/10 , G02B5/281 , G02B5/283 , H01L27/14621 , H01L27/14685
摘要： An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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公开(公告)号：US11782199B2
公开(公告)日：2023-10-10
申请号：US17248285
申请日：2021-01-19
申请人： VIAVI Solutions Inc.
发明人： Georg J. Ockenfuss , Tim Gustafson , Jeffrey James Kuna , Markus Bilger , Richard A. Bradley, Jr.
IPC分类号： G02B5/28 , H01L27/146 , G02B1/10
CPC分类号： G02B5/285 , G02B1/10 , G02B5/281 , G02B5/283 , H01L27/14621 , H01L27/14685
摘要： An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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公开(公告)号：US11131018B2
公开(公告)日：2021-09-28
申请号：US16103632
申请日：2018-08-14
申请人： VIAVI Solutions Inc.
发明人： Andrew Clark , Georg J. Ockenfuss
摘要： A sputtering system may include a substrate. The sputtering system may include at least one target. The at least one target may include at least one coating material to coat at least one layer onto the substrate. The at least one coating material may be sputtered onto the substrate in a presence of an inert gas. The inert gas may include argon gas and helium gas.
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公开(公告)号：US10948640B2
公开(公告)日：2021-03-16
申请号：US16103625
申请日：2018-08-14
申请人： VIAVI Solutions Inc.
摘要： A sensor window may include a substrate and a set of layers disposed onto the substrate. The set of layers may include a first subset of layers of a first refractive index and a second set of layers of a second refractive index different from the first refractive index. The set of layers may be associated with a threshold transmissivity in a sensing spectral range. The set of layers may be configured to a particular color in a visible spectral range and may be associated with a threshold opacity in the visible spectral range.
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公开(公告)号：US10782460B2
公开(公告)日：2020-09-22
申请号：US15601753
申请日：2017-05-22
申请人： Viavi Solutions Inc.
发明人： Georg J. Ockenfuss
摘要： An optical filter may include a substrate. The optical filter may include a first mirror and a second mirror. Each of the first mirror and the second mirror may include a plurality of quarterwave stacks. The plurality of quarterwave stacks may include a plurality of layers comprising a first material, a second material, and a third material. The optical filter may include a spacer disposed between the first mirror and the second mirror.
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公开(公告)号：US20200033517A1
公开(公告)日：2020-01-30
申请号：US16591849
申请日：2019-10-03
申请人： VIAVI Solutions Inc.
发明人： Georg J. Ockenfuss
摘要： An optical filter may include a first group of layers. The first group of layers may include alternating layers of a first dielectric material, of a group of dielectric materials, and a second dielectric material of the group of dielectric materials. The optical filter may include a second group of layers. The second group of layers may include alternating layers of a third dielectric material, of the group of dielectric materials, and a fourth dielectric material of the group of dielectric materials. The optical filter may include a third group of layers. The third group of layers may include alternating layers of a fifth dielectric material, of the group of dielectric materials, a sixth dielectric material, of the group of dielectric materials, and a metal material. The third group of layers may be disposed between the first group of layers and the second group of layers.
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公开(公告)号：US20170336544A1
公开(公告)日：2017-11-23
申请号：US15617654
申请日：2017-06-08
CPC分类号： G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要： An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
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公开(公告)号：US20170227695A9
公开(公告)日：2017-08-10
申请号：US14308343
申请日：2014-06-18
申请人： Viavi Solutions Inc.
IPC分类号： G02B5/28 , G02B1/10 , H01L27/146
CPC分类号： G02B5/285 , G02B1/10 , G02B5/281 , G02B5/283 , H01L27/14621 , H01L27/14685
摘要： An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.
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公开(公告)号：US09588269B2
公开(公告)日：2017-03-07
申请号：US15158191
申请日：2016-05-18
CPC分类号： G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要： An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
摘要翻译： 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3，在800nm至1100nm的波长范围内的消光系数小于0.0005。
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公开(公告)号：US09354369B2
公开(公告)日：2016-05-31
申请号：US13943596
申请日：2013-07-16
申请人： Viavi Solutions Inc.
CPC分类号： G02B5/281 , G01J5/0862 , G02B1/11 , G02B5/207 , G02B5/285 , G06K9/00335 , H04N5/33 , H04N13/254
摘要： An optical filter having a passband at least partially overlapping with a wavelength range of 800 nm to 1100 nm is provided. The optical filter includes a filter stack formed of hydrogenated silicon layers and lower-refractive index layers stacked in alternation. The hydrogenated silicon layers each have a refractive index of greater than 3 over the wavelength range of 800 nm to 1100 nm and an extinction coefficient of less than 0.0005 over the wavelength range of 800 nm to 1100 nm.
摘要翻译： 提供具有与800nm至1100nm的波长范围至少部分重叠的通带的滤光器。 滤光器包括由氢化硅层和交替堆叠的低折射率层形成的滤光片叠层。 氢化硅层在800nm至1100nm的波长范围内的折射率大于3，在800nm至1100nm的波长范围内的消光系数小于0.0005。
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