公开(公告)号：US20070195423A1

公开(公告)日：2007-08-23

申请号：US11657925

申请日：2007-01-25

申请人： Vladimir Kamenov ,  Daniel Kraehmer ,  Michael Totzeck ,  Toralf Gruner ,  Aurelian Dodoc ,  David Shafer ,  Wilhelm Ulrich ,  Rudolf Buenau ,  Hans-Juergen Mann ,  Alexander Epple

发明人： Vladimir Kamenov ,  Daniel Kraehmer ,  Michael Totzeck ,  Toralf Gruner ,  Aurelian Dodoc ,  David Shafer ,  Wilhelm Ulrich ,  Rudolf Buenau ,  Hans-Juergen Mann ,  Alexander Epple

IPC分类号： G02B3/00

CPC分类号： G02B27/0012 ,  G02B1/02 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70966 ,  G03F7/70975

摘要： A method of determining materials of lenses contained in an optical system of a projection exposure apparatus is described. First, for each lens of a plurality of the lenses, a susceptibility factor KLT/LH is determined. This factor is a measure of the susceptibility of the respective lens to deteriorations caused by at least one of lifetime effects and lens heating effects. Then a birefringent fluoride crystal is selected as a material for each lens for which the susceptibility factor KLT/LH is above a predetermined threshold. Theses lenses are assigned to a first set of lenses. For these lenses, measures are determined for reducing adverse effects caused by birefringence inherent to the fluoride crystals.

公开(公告)号：US20070236674A1

公开(公告)日：2007-10-11

申请号：US11653366

申请日：2007-01-16

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

IPC分类号： G02B17/08 ,  G03F7/20

CPC分类号： G02B17/0816 ,  G02B13/16 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G02B21/02 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1

摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的折反射投射物镜具有用于将设置在物平面中的图案成像为第一中间图像的第一折射目标部分; 第二目标部分，包括用于将第一中间成像成像成第二中间图像的至少一个凹面镜; 以及第三折射物镜部分，用于将所述第二中间成像成像到所述图像平面上; 其中所述投影物镜具有最大透镜直径D max max，最大图像场高度Y'和像侧数值孔径NA; 其中COMP1 = D最大/（Y'NANA 2），并且其中条件COMP1 <10成立。

公开(公告)号：US20050146701A1

公开(公告)日：2005-07-07

申请号：US10975496

申请日：2004-10-29

申请人： Hubert Holderer ,  Christian Hembd-Soellner ,  Rudolf Buenau ,  Ulrich Haag

发明人： Hubert Holderer ,  Christian Hembd-Soellner ,  Rudolf Buenau ,  Ulrich Haag

IPC分类号： G02B5/10 ,  G02B17/08 ,  G02B26/06 ,  G02B27/58 ,  G03F7/20 ,  H01L21/027 ,  G03B27/54

CPC分类号： G02B17/0892 ,  G02B17/08 ,  G02B26/06 ,  G02B27/58 ,  G03F7/70225 ,  G03F7/70258 ,  G03F7/70308 ,  G03F7/70825

摘要： A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.

摘要翻译： 一种具有光学元件的反射折射透镜，其沿光轴布置并且具有位于投影透镜的瞳面附近的至少一个凹面镜。 凹面镜被细分成许多环形或蜂窝状镜片段，它们可以通过压电驱动元件相对于彼此独立地移位。 反射镜可以用作相移瞳孔过滤器，由此可以通过镜元件相对于彼此的相对位移来调节过滤功能。