公开(公告)号：US20150316667A1

公开(公告)日：2015-11-05

申请号：US14104806

申请日：2013-12-12

Applicant: WESTERNGECO L.L.C.

Inventor： MAXIME PROJETTI ,  OLIVIER VANCAUWENBERGHE ,  NICOLAS GOUJON ,  HANS PAULSON

IPC: G01V1/16 ,  G01V1/00 ,  G01V1/38 ,  G01P15/125

CPC classification number: G01V1/164 ,  G01C19/5712 ,  G01P15/125 ,  G01V1/003 ,  G01V1/18 ,  G01V1/189 ,  G01V1/38 ,  G01V1/3808

Abstract: The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.

Abstract translation: 本公开涉及用于地震数据采集的基于MEMS的旋转传感器和具有其的传感器单元。 基于MEMS的旋转传感器包括衬底，设置在衬底上的锚和通过多个弯曲弹簧联接到锚固件的校验物质。 证明物质具有连接到其上并从其延伸的第一电极。 第二电极被固定到基板，并且第一和第二电极中的一个被配置为接收致动信号，并且第一和第二电极中的另一个被配置为产生具有对应于角度运动程度的幅度的电信号 的第一电极相对于第二电极。 基于MEMS的旋转传感器还包括闭环电路，其被配置为接收电信号并提供致动信号。 还描述了在地震数据采集中使用基于MEMS的旋转传感器的相关方法。