Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same
    1.
    发明授权
    Microelectromechanical heating apparatus and fluid preconcentrator device utilizing same 失效
    微机电加热装置和利用其的流体预浓缩装置

    公开(公告)号:US06914220B2

    公开(公告)日:2005-07-05

    申请号:US10396929

    申请日:2003-03-25

    摘要: A microelectromechanical heating apparatus and fluid preconcentrator device utilizing same wherein heating elements of the apparatus are sized and spaced to substantially uniformly heat a heating chamber within a heater of the apparatus. Tall, thermally-isolated heating elements are fabricated in Si using high aspect ratio etching technology. These tall heating elements have large surface area to provide large adsorbent capacity needed for high efficiency preconcentrators in a micro gas chromatography system (μGC). The tall heating elements are surrounded by air gaps to provide good thermal isolation, which is important for a low power preconcentrator in the μGC system.

    摘要翻译: 一种微机电加热装置和利用其的流体预浓缩器装置,其中装置的加热元件的尺寸和间隔尺寸以基本均匀地加热装置的加热器内的加热室。 使用高纵横比蚀刻技术在Si中制造高,热隔离的加热元件。 这些高加热元件具有较大的表面积,以提供微气相色谱系统(muGC)中高效预浓缩器所需的大的吸附剂能力。 高温加热元件被气隙包围以提供良好的热隔离,这对于muGC系统中的低功率预浓缩器是重要的。