摘要:
A microelectromechanical heating apparatus and fluid preconcentrator device utilizing same wherein heating elements of the apparatus are sized and spaced to substantially uniformly heat a heating chamber within a heater of the apparatus. Tall, thermally-isolated heating elements are fabricated in Si using high aspect ratio etching technology. These tall heating elements have large surface area to provide large adsorbent capacity needed for high efficiency preconcentrators in a micro gas chromatography system (μGC). The tall heating elements are surrounded by air gaps to provide good thermal isolation, which is important for a low power preconcentrator in the μGC system.
摘要:
A device for accumulation of vapor analytes incorporating nanotubes grown by CVD is described. The devices are used in sensors and as a preconcentrator for a gas chromatograph.
摘要:
A two-dimensional gas chromatography system having first and second separation columns, a thermal modulator disposed between the first and second columns and having a plurality of stage channels, and a micro heater monolithically integrated in the thermal modulator. The thermal modulator is operable to trap and focus gas/vapor species within the plurality of stage channels upon cooling and release the gas/vapor species to the second column upon heating by the micro heater.
摘要:
A two-dimensional gas chromatography system having first and second separation columns, a thermal modulator disposed between the first and second columns and having a plurality of stage channels, and a micro heater monolithically integrated in the thermal modulator. The thermal modulator is operable to trap and focus gas/vapor species within the plurality of stage channels upon cooling and release the gas/vapor species to the second column upon heating by the micro heater.