公开(公告)号：US06641932B1

公开(公告)日：2003-11-04

申请号：US09892626

申请日：2001-06-28

申请人： Weilu Xu ,  Yuanda R. Cheng ,  Taesun Ernest Kim ,  Chung Shih ,  Liji Huang ,  Kueir Weii Chour ,  Steve Hwang ,  Roger Shih

发明人： Weilu Xu ,  Yuanda R. Cheng ,  Taesun Ernest Kim ,  Chung Shih ,  Liji Huang ,  Kueir Weii Chour ,  Steve Hwang ,  Roger Shih

IPC分类号： G11B566

CPC分类号： G11B5/72 ,  G11B5/66 ,  Y10T428/12847 ,  Y10T428/12854 ,  Y10T428/265 ,  Y10T428/31678

摘要： A flash chromium capping layer is deposited on a magnetic layer for improved corrosion resistance, reduced poisoning due to the absence of a protective overcoat or presence of discontinuities in a protective overcoat, and for reduced media noise do to inter-granular exchange coupling. Embodiments include depositing a flash chromium layer having a thickness up to about 10 Å on an upper magnetic layer and depositing an overlying lubricant topcoat. An optional protective overcoat, such as a carbon-containing protective overcoat, can also be deposited on the chromium capping layer. The chromium capping layer forms a protective oxide coating where exposed, as due to the absence of or at discontinuities in the protective overcoat.

摘要翻译： 闪光铬覆盖层沉积在磁性层上以提高耐腐蚀性，由于不存在保护性外涂层而减少中毒或在保护性外涂层中存在不连续性，并且对于颗粒间交换耦合来降低介质噪声。 实施例包括在上部磁性层上沉积厚度约为10埃的闪光铬层并沉积上覆的润滑剂面漆。 任选的保护性外涂层，例如含碳保护外涂层也可以沉积在铬覆盖层上。 铬覆盖层形成保护性氧化物涂层，其中暴露的是由于保护性外涂层中不存在或不连续的。

公开(公告)号：US06815054B1

公开(公告)日：2004-11-09

申请号：US09986863

申请日：2001-11-13

申请人： Wen Hong Liu ,  Yao-Tzung Roger Shih ,  Taesun Ernest Kim ,  Chung Yuang Shih

发明人： Wen Hong Liu ,  Yao-Tzung Roger Shih ,  Taesun Ernest Kim ,  Chung Yuang Shih

IPC分类号： G11B572

CPC分类号： G11B11/10584 ,  G11B5/656 ,  G11B5/72 ,  G11B5/8408 ,  G11B11/10586 ,  Y10T428/30

摘要： A method of forming a layer of a hard, abrasion, and corrosion-resistant hydrogenated carbon (C:H) material on a substrate surface comprises steps of: (a) providing a vacuum chamber including a carbon sputtering target in the interior space thereof; (b) providing a substrate in the chamber interior space, a surface of the substrate the sputtering target; (c) supplying the vacuum chamber with at least one hydrocarbon gas and at least one inert gas at separately controllable flow rates and applying a sufficient negative potential to the carbon target to generate a plasma in said interior space to deposit a layer of the C:H material on the substrate surface by a process comprising simultaneous sputtering of the carbon sputtering target and plasma enhanced chemical vapor deposition (PECVD) of carbon and hydrogen from the hydrocarbon gas, wherein: step (c) includes separately controlling the flow rates of each of the hydrocarbon and inert gases such that the amount of C atoms in the C:H which are contributed by the PECVD component of the process is less than about 50 at. %. Embodiments of the invention include utilizing the C:H material as a protective overcoat layer for magnetic and magneto-optical recording media.

摘要翻译： 在基材表面上形成硬质，耐磨和耐腐蚀氢化碳（C：H）材料层的方法包括以下步骤：（a）在其内部空间中提供包括碳溅射靶的真空室; （b）在所述室内部空间中提供衬底，所述衬底的所述溅射靶的表面;（c）以独立可控的流速向所述真空室提供至少一种烃气体和至少一种惰性气体，并施加足够的负极 通过包括碳溅射靶的同时溅射和碳的等离子体增强化学气相沉积（PECVD）的方法，在所述内部空间中产生等离子体的潜力以沉积在衬底表面上的C：H材料层，以及 来自烃气体的氢，其中：步骤（c）包括分别控制每种烃和惰性气体的流速，使得C：H中的C原子的量为 由PECVD组件重新贡献的过程小于约50。 本发明的实施例包括利用C：H材料作为磁和磁光记录介质的保护性外涂层。

公开(公告)号：US06886244B1

公开(公告)日：2005-05-03

申请号：US10212699

申请日：2002-08-07

申请人： Paul Stephen McLeod ,  Taesun Ernest Kim

发明人： Paul Stephen McLeod ,  Taesun Ernest Kim

IPC分类号： C23C14/50 ,  C23C14/56 ,  H01L21/00 ,  H05K3/20

CPC分类号： H01L21/67236 ,  C23C14/50 ,  C23C14/568 ,  Y10T29/49128 ,  Y10T29/49155 ,  Y10T29/53187 ,  Y10T29/532 ,  Y10T29/53261 ,  Y10T29/53265

摘要： An apparatus for performing treatments to the surface of disk-shaped workpieces/substrates, as in the manufacture of multi-layer, thin-film recording media. The apparatus includes treatment stations for performing treatments to a surface of each of the disk-shaped workpieces/substrates; a pallet adapted for mounting the disk-shaped workpieces/substrates, a plurality of bias potential sources; and a transporting source to transport the pallet past the treatment stations. The pallet includes electrically conductive segments and each segment is electrically insulated from other segments; is adapted to mount and expose at lest one surface of a disk-shaped workpiece; and includes an electrical contact for providing electrical contact with the bias potential source of the apparatus.

摘要翻译： 如在多层薄膜记录介质的制造中那样对盘状工件/基板的表面进行处理的装置。 该设备包括用于对每个盘状工件/基板的表面进行处理的处理站; 适于安装盘状工件/基板的托盘，多个偏置电位源; 以及用于将托盘运送经过处理站的运送源。 托盘包括导电段，每个段与其它段电绝缘; 适于在盘形工件的至少一个表面处安装和暴露; 并且包括用于提供与设备的偏置电位源的电接触的电接触。

公开(公告)号：US20090211898A1

公开(公告)日：2009-08-27

申请号：US12391938

申请日：2009-02-24

申请人： Charles Changqing Chen ,  Thanh Thien Ha ,  Abebe Hailu ,  Taesun Ernest Kim ,  Mariana Rodica Munteanu ,  Steve Kuo-Hsing Hwang

发明人： Charles Changqing Chen ,  Thanh Thien Ha ,  Abebe Hailu ,  Taesun Ernest Kim ,  Mariana Rodica Munteanu ,  Steve Kuo-Hsing Hwang

IPC分类号： C23C14/34

CPC分类号： G11B5/7325 ,  G11B5/656 ,  G11B5/66 ,  G11B5/851

摘要： CoCrPtB is a conventional material used in some of the layers of a thin film magnetic media structure used for recording data in data storage devices such as hard drives. Typically the CoCrPtB layers used for magnetic media have high Cr and low B in bottom magnetic layers and low Cr and high B in top magnetic layers. In accordance with one embodiment of this invention and to improve media electrical performance, fifth elements, such as Ta, Nb and Hf, etc. were added to the CoCrPtB materials, resulting in CoCrPtB-X, to enhance the grain segregation. The five element CoCrPtB-X layers were deposited using a pulsed direct current sputter technique instead of conventional direct current sputtering techniques. The resulting magnetic media structure having CoCrPtB-X alloy layers exhibits an increase in coercivity Hc and improvement in recording performance.

摘要翻译： CoCrPtB是用于在诸如硬盘驱动器的数据存储设备中记录数据的薄膜磁性介质结构的一些层中的常规材料。 通常用于磁性介质的CoCrPtB层在底部磁性层中具有高Cr和低B，在顶部磁性层中具有低Cr和高B。 根据本发明的一个实施例，为了改善介质电性能，向CoCrPtB材料中添加了诸如Ta，Nb和Hf等第五元素，产生CoCrPtB-X，以增强晶粒分离。 使用脉冲直流溅射技术代替传统的直流溅射技术沉积五个元素CoCrPtB-X层。 所得到的具有CoCrPtB-X合金层的磁性介质结构表现出矫顽力Hc的提高和记录性能的提高。

公开(公告)号：US06878460B1

公开(公告)日：2005-04-12

申请号：US10396365

申请日：2003-03-26

申请人： Abebe Hailu ,  Charles Changqing Chen ,  Taesun Ernest Kim

发明人： Abebe Hailu ,  Charles Changqing Chen ,  Taesun Ernest Kim

IPC分类号： G11B5/64 ,  G11B5/73

CPC分类号： G11B5/732 ,  G11B5/656 ,  G11B5/7325 ,  Y10T428/12986

摘要： A thin film magnetic according medium with enhanced coercivity is provided. The magnetic recording medium comprises a non-magnetic substrate having a surface and a layer stack atop the substrate surface. The layer stack comprises a magnetic recording layer and a dual intermediate layer structure below the magnetic recording layer comprising a base layer and a non-magnetic layer between the base layer and the magnetic recording layer. The non-magnetic layer has a thickness less than that necessary for RKKY coupling between the base layer and the magnetic recording layer, and provides the medium with increased coercivity.

摘要翻译： 提供了具有增强矫顽力的薄膜磁性介质。 磁记录介质包括在基板表面上方具有表面和层叠层的非磁性基板。 层叠体包括磁记录层和位于磁记录层下面的双层中间层结构，包括在基层和磁记录层之间的基层和非磁性层。 非磁性层的厚度小于基底层与磁记录层之间的RKKY耦合所必需的厚度，并为介质提供增加的矫顽力。

公开(公告)号：US07504166B2

公开(公告)日：2009-03-17

申请号：US10856209

申请日：2004-05-27

申请人： Charles Changqing Chen ,  Thanh Thien Ha ,  Abebe Hailu ,  Taesun Ernest Kim ,  Mariana Rodica Munteanu ,  Steve Kuo-Hsing Hwang

发明人： Charles Changqing Chen ,  Thanh Thien Ha ,  Abebe Hailu ,  Taesun Ernest Kim ,  Mariana Rodica Munteanu ,  Steve Kuo-Hsing Hwang

IPC分类号： G11B5/66

CPC分类号： G11B5/7325 ,  G11B5/656 ,  G11B5/66 ,  G11B5/851

摘要： CoCrPtB is a conventional material used in some of the layers of a thin film magnetic media structure used for recording data in data storage devices such as hard drives. Typically the CoCrPtB layers used for magnetic media have high Cr and low B in bottom magnetic layers and low Cr and high B in top magnetic layers. In accordance with one embodiment of this invention and to improve media electrical performance, fifth elements, such as Ta, Nb and Hf, etc. were added to the CoCrPtB materials, resulting in CoCrPtB—X, to enhance the grain segregation. The five element CoCrPtB—X layers were deposited using a pulsed direct current sputter technique instead of conventional direct current sputtering techniques. The resulting magnetic media structure having CoCrPtB—X alloy layers exhibits an increase in coercivity Hc and improvement in recording performance.

摘要翻译： CoCrPtB是用于在诸如硬盘驱动器的数据存储设备中记录数据的薄膜磁性介质结构的一些层中的常规材料。 通常用于磁性介质的CoCrPtB层在底部磁性层中具有高Cr和低B，在顶部磁性层中具有低Cr和高B。 根据本发明的一个实施例，为了改善介质电性能，向CoCrPtB材料中添加了诸如Ta，Nb和Hf等第五元素，产生CoCrPtB-X，以增强晶粒分离。 使用脉冲直流溅射技术代替传统的直流溅射技术沉积五个元素CoCrPtB-X层。 所得到的具有CoCrPtB-X合金层的磁性介质结构表现出矫顽力Hc的提高和记录性能的提高。