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公开(公告)号:US07635651B2
公开(公告)日:2009-12-22
申请号:US11208612
申请日:2005-08-23
申请人: Wen-Long Lee , Jun Wu , Shih-Chi Lin , Chyi-Tsong Ni
发明人: Wen-Long Lee , Jun Wu , Shih-Chi Lin , Chyi-Tsong Ni
IPC分类号: H01L21/31 , H01L21/469
CPC分类号: H01L21/31051 , H01L21/31053
摘要: A method of smoothening a dielectric layer. First, a substrate is provided. Next, a dielectric layer is formed on the semiconductor substrate. Finally, the dielectric layer is smoothened by a plasma treatment employing a silane based gas and a nitrogen based gas.
摘要翻译: 一种平滑电介质层的方法。 首先,提供基板。 接下来,在半导体衬底上形成电介质层。 最后,通过使用硅烷类气体和氮气体气体的等离子体处理使介电层平滑化。
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公开(公告)号:US20060252258A1
公开(公告)日:2006-11-09
申请号:US11122393
申请日:2005-05-05
申请人: Jun Wu , Wen-Long Lee , Chyi-Tsong Ni , Shih-Chi Lin
发明人: Jun Wu , Wen-Long Lee , Chyi-Tsong Ni , Shih-Chi Lin
IPC分类号: H01L21/4763 , H01L21/44
CPC分类号: H01L21/76877 , H01L21/76801 , H01L21/76883
摘要: A method of fabricating a copper interconnect on a substrate is disclosed in which the interconnect and substrate are subjected to a low temperature anneal subsequent to polarization of the interconnect and prior to deposition of an overlying dielectric layer. The low temperature anneal inhibits the formation of hillocks in the copper material during subsequent high temperature deposition of the dielectric layer. Hillocks can protrude through passivation layer, thus causing shorts within the connections of the semiconductor devices formed on the substrate. In one example, the interconnect and substrate are annealed at a temperature of about 200 ° C. for a period of about 180 seconds in a forming gas environment comprising hydrogen (5 parts per hundred) and nitrogen (95 parts per hundred).
摘要翻译: 公开了一种在衬底上制造铜互连的方法,其中互连和衬底在互连的极化之后并且在沉积上覆的电介质层之前经受低温退火。 低温退火在随后的介电层的高温沉积期间抑制铜材料中的小丘的形成。 小丘可以突出穿过钝化层,从而在形成在衬底上的半导体器件的连接之内引起短路。 在一个实例中,在包含氢气(5份/百份)和氮气(95份/百份)的形成气体环境中,在大约200℃的温度下将互连和衬底退火约180秒的时间。
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公开(公告)号:US07851358B2
公开(公告)日:2010-12-14
申请号:US11122393
申请日:2005-05-05
申请人: Jun Wu , Wen-Long Lee , Chyi-Tsong Ni , Shih-Chi Lin
发明人: Jun Wu , Wen-Long Lee , Chyi-Tsong Ni , Shih-Chi Lin
IPC分类号: H01L21/44
CPC分类号: H01L21/76877 , H01L21/76801 , H01L21/76883
摘要: A method of fabricating a copper interconnect on a substrate is disclosed in which the interconnect and substrate are subjected to a low temperature anneal subsequent to polarization of the interconnect and prior to deposition of an overlying dielectric layer. The low temperature anneal inhibits the formation of hillocks in the copper material during subsequent high temperature deposition of the dielectric layer. Hillocks can protrude through passivation layer, thus causing shorts within the connections of the semiconductor devices formed on the substrate. In one example, the interconnect and substrate are annealed at a temperature of about 200° C. for a period of about 180 seconds in a forming gas environment comprising hydrogen (5 parts per hundred) and nitrogen (95 parts per hundred).
摘要翻译: 公开了一种在衬底上制造铜互连的方法,其中互连和衬底在互连的极化之后并且在沉积上覆的电介质层之前经受低温退火。 低温退火在随后的介电层的高温沉积期间抑制铜材料中的小丘的形成。 小丘可以突出穿过钝化层,从而在形成在衬底上的半导体器件的连接之内引起短路。 在一个实例中,在包含氢气(5份/百份)和氮气(95份/百份)的形成气体环境中,在大约200℃的温度下将互连和衬底退火约180秒的时间。
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公开(公告)号:US07611589B2
公开(公告)日:2009-11-03
申请号:US11072114
申请日:2005-03-04
申请人: Jun Wu , Dong-Xuan Lu , Shih-Chi Lin , Wen-Long Lee , Yi-An Jian , Guang-Cheng Wang , Shiu-Ko JangJian , Chyi-Tsong Ni , Szu-An Wu , Ying-Lang Wang
发明人: Jun Wu , Dong-Xuan Lu , Shih-Chi Lin , Wen-Long Lee , Yi-An Jian , Guang-Cheng Wang , Shiu-Ko JangJian , Chyi-Tsong Ni , Szu-An Wu , Ying-Lang Wang
CPC分类号: B08B1/04 , B08B3/02 , H01L21/67051
摘要: A method for spin-on wafer cleaning. The method comprises controlling spin speed and vertical water jet pressure. The vertical jet pressure and the spin speed are substantially maintained in inverse proportion. Wafer spin speed is between 50 to 1200 rpm. Vertical wafer jet pressure is between 0.05 to 100 KPa.
摘要翻译: 旋转晶片清洗的方法。 该方法包括控制旋转速度和垂直喷水压力。 垂直喷射压力和旋转速度基本保持成反比例。 晶圆转速在50至1200rpm之间。 垂直晶片喷射压力为0.05至100KPa。
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公开(公告)号:US20060189149A1
公开(公告)日:2006-08-24
申请号:US11208612
申请日:2005-08-23
申请人: Wen-Long Lee , Jun Wu , Shih-Chi Lin , Chyi-Tsong Ni
发明人: Wen-Long Lee , Jun Wu , Shih-Chi Lin , Chyi-Tsong Ni
IPC分类号: H01L21/31
CPC分类号: H01L21/31051 , H01L21/31053
摘要: A method of smoothening a dielectric layer. First, a substrate is provided. Next, a dielectric layer is formed on the semiconductor substrate. Finally, the dielectric layer is smoothened by a plasma treatment employing a silane based gas and a nitrogen based gas.
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公开(公告)号:US20060196526A1
公开(公告)日:2006-09-07
申请号:US11072114
申请日:2005-03-04
申请人: Jun Wu , Dong-Xuan Lu , Shih-Chi Lin , Wen-Long Lee , Yi-An Jian , Guang-Cheng Wang , Shiu-Ko JangJian , Chyi-Tsong Ni , Szu-An Wu , Ying-Lang Wang
发明人: Jun Wu , Dong-Xuan Lu , Shih-Chi Lin , Wen-Long Lee , Yi-An Jian , Guang-Cheng Wang , Shiu-Ko JangJian , Chyi-Tsong Ni , Szu-An Wu , Ying-Lang Wang
CPC分类号: B08B1/04 , B08B3/02 , H01L21/67051
摘要: A method for spin-on wafer cleaning. The method comprises controlling spin speed and vertical water jet pressure. The vertical jet pressure and the spin speed are substantially maintained in inverse proportion. Wafer spin speed is between 50 to 1200 rpm. Vertical wafer jet pressure is between 0.05 to 100 KPa.
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公开(公告)号:US10062117B2
公开(公告)日:2018-08-28
申请号:US13489597
申请日:2012-06-06
申请人: Leif A. Roll , Jun Wu , John F. Johnson , Kimberly D. Leigh
发明人: Leif A. Roll , Jun Wu , John F. Johnson , Kimberly D. Leigh
CPC分类号: G06Q40/08
摘要: Providing a property replacement loan offer to a customer that has lost property in a total loss event where the offer is provided automatically in response to an indication of the total loss event. The invention includes computer-based processes that collect customer-specific data for the customer whose property is involved in the total loss event and using this data to prequalify the customer for the property replacement loan. The processing includes accessing a credit bureau to receive data related to the customer's credit.
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公开(公告)号:US20170247083A1
公开(公告)日:2017-08-31
申请号:US15597924
申请日:2017-05-17
申请人: Jun Wu
发明人: Jun Wu
CPC分类号: B62M11/06 , B62M1/36 , B62M6/55 , B62M9/10 , F16D41/10 , F16D41/185 , F16D41/26 , F16D41/32 , F16D41/36 , F16H37/043
摘要: A directional transmission mechanism, a directional sprocket apparatus using the directional transmission mechanism, and a pedal device using the directional sprocket apparatus are disclosed. The directional transmission mechanism includes a driving shaft, an output shaft, a co-rotating wheel, a reverse-rotating wheel, and a switching mechanism. The co-rotating wheel set drives the output shaft to rotate in a direction that is the same as that of the driving shaft. The reverse-rotating wheel set drives the output shaft to rotate in a direction opposite to that of the driving shaft. The switching mechanism switches the driving shaft to drive the co-rotating wheel set or drive the reverse-rotating wheel set to rotate, so as to enable the output shaft to rotate directionally. The co-rotating wheel set is connected with the driving shaft and the output shaft, and the reverse-rotating wheel set is connected with the driving shaft and the output shaft.
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公开(公告)号:US09020924B2
公开(公告)日:2015-04-28
申请号:US13615518
申请日:2012-09-13
申请人: Jun Wu , Dekang Lin , Zhe Qian , Jie Zhou
发明人: Jun Wu , Dekang Lin , Zhe Qian , Jie Zhou
IPC分类号: G06F17/30
CPC分类号: G06F17/3097 , G06F17/30389 , G06F17/3053 , G06F17/3064
摘要: Systems and methods to generate modified/refined user inputs based on the original user input, such as a search query, are disclosed. The method may be implemented for Roman-based and/or non-Roman based language such as Chinese. The method may generally include receiving an original user input and identifying core terms therein, determining potential alternative inputs by replacing core term(s) in the original input with another term according to a similarity matrix and/or substituting a word sequence in the original input with another word sequence according to an expansion/contraction table where one word sequence is a substring of the other, computing likelihood of each potential alternative input, and selecting most likely alternative inputs according to a predetermined criteria, e.g., likelihood of the alternative input being at least that of the original input. A cache containing pre-computed original user inputs and corresponding alternative inputs may be provided.
摘要翻译: 公开了基于原始用户输入(例如搜索查询)生成修改/改进的用户输入的系统和方法。 该方法可以用于基于罗马语和/或非罗马语言的中文。 该方法通常可以包括接收原始用户输入并识别其中的核心术语,通过根据相似度矩阵替换原始输入中的核心项与另一项来确定潜在替代输入和/或替换原始输入中的单词序列 根据扩展/收缩表的另一个字序列,其中一个单词序列是另一个单词序列是另一个单词的子串,计算每个潜在替代输入的可能性,并根据预定标准选择最可能的替代输入,例如替代输入的可能性为 至少是原来的输入。 可以提供包含预先计算的原始用户输入和相应的备选输入的缓存。
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公开(公告)号:US08836230B2
公开(公告)日:2014-09-16
申请号:US13521236
申请日:2010-12-29
申请人: Jun Wu
发明人: Jun Wu
摘要: This invention relates to a power factor correction circuit of an electronic ballast. The electronic ballast includes a rectification circuit, a first capacitive element and an inverter. The power factor correction circuit comprises a unidirectional element, an inductive element and a second capacitive element. The unidirectional element is connected in series with the inductive element, and the second capacitive element is connected in parallel with the unidirectional element and the inductive element. A junction of the unidirectional element and the second capacitive element is coupled to a first output terminal of the rectification circuit, a junction of the inductive element and the second capacitive element is coupled to an input terminal of the inverter, and the first capacitive element is coupled between a second output terminal of the rectification circuit and a junction of the unidirectional element and the inductive element.
摘要翻译: 本发明涉及电子镇流器的功率因数校正电路。 电子镇流器包括整流电路,第一电容元件和逆变器。 功率因数校正电路包括单向元件,电感元件和第二电容元件。 单向元件与电感元件串联连接,第二电容元件与单向元件和电感元件并联连接。 单向元件和第二电容元件的结点耦合到整流电路的第一输出端,电感元件和第二电容元件的结点耦合到反相器的输入端,第一电容元件是 耦合在整流电路的第二输出端子和单向元件与感应元件的接点之间。
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