METHOD OF MAKING OPTICAL TRANSDUCERS
    4.
    发明申请
    METHOD OF MAKING OPTICAL TRANSDUCERS 审中-公开
    制造光学传感器的方法

    公开(公告)号:US20100104768A1

    公开(公告)日:2010-04-29

    申请号:US12260228

    申请日:2008-10-29

    IPC分类号: B05D3/06 B05D5/12

    摘要: A process for making an optical transducer that includes depositing a lower molecular weight first layer and a higher molecular weight second layer. E-beam radiation is applied to the first and second layers which are developed to form an aperture. The aperture includes a resist protrusion in the second layer. The resist protrusion protrudes outward beyond the first layer. Metal is evaporated through the aperture to form the optical transducer. The resist protrusion defines a shape of a concave metal transducer corner.

    摘要翻译: 一种制造光学换能器的方法,包括沉积较低分子量的第一层和较高分子量的第二层。 将电子束辐射施加到被显影以形成孔的第一和第二层。 孔包括在第二层中的抗蚀剂突起。 抗蚀剂突起向外突出超出第一层。 金属通过孔被蒸发以形成光学换能器。 抗蚀剂突起限定凹形金属转换器角的形状。