公开(公告)号：US06350360B1

公开(公告)日：2002-02-26

申请号：US09544703

申请日：2000-04-07

申请人： William D. Bonivert ,  John T. Hachman

发明人： William D. Bonivert ,  John T. Hachman

IPC分类号： C25D100

CPC分类号： B82Y10/00 ,  B41C3/00 ,  B41N1/06 ,  B81C99/009 ,  B82Y40/00 ,  C25D1/10 ,  G03F7/0002 ,  H05K3/0002 ,  H05K3/0014 ,  H05K3/005 ,  Y10T428/24942

摘要： The invention is a method for the fabrication of an imprint tool master. The process begins with a metallic substrate. A layer of photoresist is placed onto the metallic substrate and a image pattern mask is then aligned to the mask. The mask pattern has opaque portions that block exposure light and “open” or transparent portions which transmit exposure light. The photoresist layer is then exposed to light transmitted through the “open” portions of the first image pattern mask and the mask is then removed. A second layer of photoresist then can be placed onto the first photoresist layer and a second image pattern mask may be placed on the second layer of photoresist. The second layer of photoresist is exposed to light, as before, and the second mask removed. The photoresist layers are developed simultaneously to produce a multi-level master mandrel upon which a conductive film is formed. A tool master can now be formed onto the conductive film. An imprint tool is then produced from the tool master. In one embodiment, nickel is electroplated onto the tool master to produce a three-dimensional imprint tool.

摘要翻译： 本发明是用于制造压印工具母版的方法。 该过程开始于金属基底。 将一层光致抗蚀剂放置在金属基底上，然后将图像图案掩模与掩模对准。 掩模图案具有不透明部分，其阻挡曝光光和“打开”或透射曝光光的透明部分。 然后将光致抗蚀剂层暴露于通过第一图案掩模的“打开”部分透射的光，然后除去掩模。 然后可以将第二层光致抗蚀剂放置在第一光致抗蚀剂层上，并且可以在第二层光致抗蚀剂上放置第二图案掩模。 如前所述，第二层光致抗蚀剂暴露于光，并移除第二掩模。 光致抗蚀剂层被同时显影以产生形成导电膜的多级主心轴。 现在可以在导电膜上形成工具主体。 然后从工具主机生成压印工具。 在一个实施例中，将镍电镀到工具主体上以产生三维压印工具。

公开(公告)号：US4812210A

公开(公告)日：1989-03-14

申请号：US109008

申请日：1987-10-16

申请人： William D. Bonivert ,  Joseph C. Farmer ,  John T. Hachman

发明人： William D. Bonivert ,  Joseph C. Farmer ,  John T. Hachman

IPC分类号： G01N27/416 ,  G01N27/46

CPC分类号： G01N27/416

摘要： An arrangement for measuring the concentration of surfactants in a electrolyte containing metal ions includes applying a DC bias voltage and a modulated voltage to a counter electrode. The phase angle between the modulated voltage and the current response to the modulated voltage at a working electrode is correlated to the surfactant concentration.

摘要翻译： 用于测量含有金属离子的电解质中的表面活性剂的浓度的装置包括向对电极施加DC偏置电压和调制电压。 调制电压和电流对工作电极的调制电压响应的相位角与表面活性剂浓度有关。