公开(公告)号：US08941968B2

公开(公告)日：2015-01-27

申请号：US13152735

申请日：2011-06-03

申请人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

发明人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

IPC分类号： H01L21/687 ,  H01L21/683

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

摘要翻译： 提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。 施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。 还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。 提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面， 至少部分地基于工件的温度。

公开(公告)号：US08797706B2

公开(公告)日：2014-08-05

申请号：US13154836

申请日：2011-06-07

申请人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

发明人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

摘要翻译： 提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。 具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。 非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。 提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。 环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

公开(公告)号：US6065499A

公开(公告)日：2000-05-23

申请号：US217677

申请日：1998-12-21

申请人： Alexander F. Pless ,  Gary J. Rosen ,  Allan D. Weed ,  Ernest E. Allen ,  Victor M. Benveniste ,  Perry J. I. Justesen

发明人： Alexander F. Pless ,  Gary J. Rosen ,  Allan D. Weed ,  Ernest E. Allen ,  Victor M. Benveniste ,  Perry J. I. Justesen

IPC分类号： H01L21/265 ,  F16J3/04 ,  F16L51/02 ,  F16L11/00 ,  F16L11/16

CPC分类号： F16L51/025 ,  H01J37/16 ,  H01J37/3171

摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.

摘要翻译： 改进的波纹管组件（18）被提供用于例如离子注入机（10）。 波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（52），用于将波纹管组件可滑动地安装到第二真空室（15）; 和位于第一和第二安装部之间的钢质波纹管（54）。 波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。 第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。 第二安装部分包括用于维持真空的至少一个滑动密封子组件（80）以及位于滑动密封子组件的相对端上的支撑环（78）和滑动板（82）。 滑板和滑动密封子组件在其间提供可滑动的真空密封配合表面。

公开(公告)号：US06231054B1

公开(公告)日：2001-05-15

申请号：US09217383

申请日：1998-12-21

申请人： Ernest E. Allen, Jr. ,  Robert J. Mitchell ,  Perry J. I. Justesen ,  Alexander F. Pless

发明人： Ernest E. Allen, Jr. ,  Robert J. Mitchell ,  Perry J. I. Justesen ,  Alexander F. Pless

IPC分类号： F16J300

CPC分类号： F16J3/047

摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (54) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (60) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises a first sliding plate (74) having a first wear plate (78), a second sliding plate (76) having a second wear plate (80), and an elastomeric seal (82) for maintaining a vacuum condition at the slidable mating surface provided between the first and second wear plates.

摘要翻译： 改进的波纹管组件（18）被提供用于例如离子注入机（10）。 波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（54），用于将波纹管组件可滑动地安装到第二真空室（15）上; 和位于第一和第二安装部之间的钢质波纹管（60）。 波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。 第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。 第二安装部分包括具有第一耐磨板（78）的第一滑动板（74），具有第二耐磨板（80）的第二滑动板（76）和用于将真空条件保持在 设置在第一和第二耐磨板之间的可滑动配合表面。