公开(公告)号：US08941968B2

公开(公告)日：2015-01-27

申请号：US13152735

申请日：2011-06-03

申请人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

发明人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

IPC分类号： H01L21/687 ,  H01L21/683

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

摘要翻译： 提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。 施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。 还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。 提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面， 至少部分地基于工件的温度。

公开(公告)号：US08797706B2

公开(公告)日：2014-08-05

申请号：US13154836

申请日：2011-06-07

申请人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

发明人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

摘要翻译： 提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。 具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。 非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。 提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。 环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

公开(公告)号：US20110299218A1

公开(公告)日：2011-12-08

申请号：US13154836

申请日：2011-06-07

申请人： William Davis Lee ,  Gary M. Cook ,  Perry J.I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

发明人： William Davis Lee ,  Gary M. Cook ,  Perry J.I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

摘要翻译： 提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。 具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。 非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。 提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。 环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

公开(公告)号：US20110299217A1

公开(公告)日：2011-12-08

申请号：US13152735

申请日：2011-06-03

申请人： Perry J.I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

发明人： Perry J.I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

摘要翻译： 提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。 施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。 还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。 提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面， 至少部分地基于工件的温度。

公开(公告)号：US08344337B2

公开(公告)日：2013-01-01

申请号：US12764540

申请日：2010-04-21

申请人： William Davis Lee

发明人： William Davis Lee

IPC分类号： G21G5/00

CPC分类号： H01L21/26513 ,  H01L21/2658

摘要： Methods for implanting an silaborane molecule or a selected ionized lower mass byproduct into a workpiece generally includes vaporizing and ionizing silaborane molecule in an ion source to create a plasma and produce silaborane molecules and its ionized lower mass byproducts. The ionized silaborane molecules and lower mass byproducts within the plasma are then extracted to form an ion beam. The ion beam is mass analyzed with a mass analyzer magnet to permit selected ionized silaborane molecules or selected ionized lower mass byproducts to pass therethrough and implant into a workpiece.

摘要翻译： 将硅砂分子或选择的离子化的下质量副产物植入工件中的方法通常包括在离子源中蒸发并离子化硅沙硼烷分子以产生等离子体并产生硅氮烷分子及其离子化的较低质量副产物。 然后将离子化的硅烷烃分子和等离子体内的较低质量副产物萃取以形成离子束。 使用质量分析器磁体对离子束进行质量分析，以允许选定的电离硅烷分子或选定的离子化的下质量副产物通过其并植入工件中。

公开(公告)号：US20110297845A1

公开(公告)日：2011-12-08

申请号：US13150822

申请日：2011-06-01

申请人： Kan Ota ,  William Davis Lee

发明人： Kan Ota ,  William Davis Lee

IPC分类号： G21K5/00

CPC分类号： H01J37/3171 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/20278 ,  H01J2237/31701

摘要： A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

摘要翻译： 用于在离子注入环境中加热旋转界面的方法提供了扫描臂，该扫描臂被配置为通过电动机围绕第一轴线和与扫描臂耦合的端部执行器旋转以选择性地固定工件。 末端执行器构造成围绕具有与第二轴和马达相关联的轴承和密封件的第二轴线旋转。 电动机被激活，并且电动机的旋转在预定时间之后或当电动机由于端部执行器围绕第二轴线的旋转而故障时被反转。 确定端部执行器围绕第二轴线的旋转是否可接受，并且当端部执行器的旋转不可接受时，扫描臂围绕第一轴线往复运动，其中末端执行器的惯性导致旋转 末端执行器围绕第二轴。

公开(公告)号：US20110260047A1

公开(公告)日：2011-10-27

申请号：US12764540

申请日：2010-04-21

申请人： William Davis Lee

发明人： William Davis Lee

IPC分类号： H01J37/317 ,  H01J49/26

CPC分类号： H01L21/26513 ,  H01L21/2658

摘要： Methods for implanting an silaborane molecule or a selected ionized lower mass byproduct into a workpiece generally includes vaporizing and ionizing silaborane molecule in an ion source to create a plasma and produce silaborane molecules and its ionized lower mass byproducts. The ionized silaborane molecules and lower mass byproducts within the plasma are then extracted to form an ion beam. The ion beam is mass analyzed with a mass analyzer magnet to permit selected ionized silaborane molecules or selected ionized lower mass byproducts to pass therethrough and implant into a workpiece.

摘要翻译： 将硅砂分子或选择的离子化的下质量副产物植入工件中的方法通常包括在离子源中蒸发并离子化硅沙硼烷分子以产生等离子体并产生硅氮烷分子及其离子化的较低质量副产物。 然后将离子化的硅烷烃分子和等离子体内的较低质量副产物萃取以形成离子束。 使用质量分析器磁体对离子束进行质量分析，以允许选定的电离硅烷分子或选定的离子化的下质量副产物通过其并植入工件中。

公开(公告)号：US08481969B2

公开(公告)日：2013-07-09

申请号：US13150822

申请日：2011-06-01

申请人： Kan Ota ,  William Davis Lee

发明人： Kan Ota ,  William Davis Lee

IPC分类号： H01J37/18 ,  G21K5/00

CPC分类号： H01J37/3171 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/002 ,  H01J2237/166 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/20278 ,  H01J2237/31701

摘要： A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

摘要翻译： 用于在离子注入环境中加热旋转界面的方法提供了扫描臂，该扫描臂被配置为通过电动机围绕第一轴线和与扫描臂耦合的端部执行器旋转以选择性地固定工件。 末端执行器构造成围绕具有与第二轴和马达相关联的轴承和密封件的第二轴线旋转。 电动机被激活，并且电动机的旋转在预定时间之后或当电动机由于端部执行器围绕第二轴线的旋转而故障时被反转。 确定末端执行器围绕第二轴线的旋转是否可接受，并且当端部执行器的旋转是不可接受的时，扫描臂围绕第一轴线往复运动，其中末端执行器的惯性导致旋转 末端执行器围绕第二轴。