公开(公告)号：US6065499A

公开(公告)日：2000-05-23

申请号：US217677

申请日：1998-12-21

申请人： Alexander F. Pless ,  Gary J. Rosen ,  Allan D. Weed ,  Ernest E. Allen ,  Victor M. Benveniste ,  Perry J. I. Justesen

发明人： Alexander F. Pless ,  Gary J. Rosen ,  Allan D. Weed ,  Ernest E. Allen ,  Victor M. Benveniste ,  Perry J. I. Justesen

IPC分类号： H01L21/265 ,  F16J3/04 ,  F16L51/02 ,  F16L11/00 ,  F16L11/16

CPC分类号： F16L51/025 ,  H01J37/16 ,  H01J37/3171

摘要： An improved bellows assembly (18) is provided for use in, for example, an ion implanter (10). The bellows assembly comprises a first mounting portion (56) located at one end of the bellows assembly for fixedly mounting the bellows assembly to a first vacuum chamber (16); a second mounting portion (52) located at an opposite end of the bellows assembly for slidably mounting the bellows assembly to a second vacuum chamber (15); and a steel bellows (54) located between the first and second mounting portions. The bellows extends generally along a longitudinal axis (64) and is expansible and contractible along this axis. The second mounting portion permits radial slidable movement of the bellows assembly with respect to the second chamber in a first plane substantially perpendicular to this axis. The second mounting portion comprises at least one sliding seal subassembly (80) for maintaining the vacuum, and a support ring (78) and a slide plate (82) located on opposite ends of the sliding seal subassembly. The slide plate and the sliding seal subassembly provide a slidable vacuum-tight mating surface therebetween.

摘要翻译： 改进的波纹管组件（18）被提供用于例如离子注入机（10）。 波纹管组件包括位于波纹管组件一端的第一安装部分（56），用于将波纹管组件固定地安装到第一真空室（16）上; 位于波纹管组件的相对端的第二安装部分（52），用于将波纹管组件可滑动地安装到第二真空室（15）; 和位于第一和第二安装部之间的钢质波纹管（54）。 波纹管大致沿着纵向轴线（64）延伸并且沿该轴线可膨胀和收缩。 第二安装部分允许波纹管组件在基本上垂直于该轴线的第一平面中相对于第二腔室径向滑动运动。 第二安装部分包括用于维持真空的至少一个滑动密封子组件（80）以及位于滑动密封子组件的相对端上的支撑环（78）和滑动板（82）。 滑板和滑动密封子组件在其间提供可滑动的真空密封配合表面。

公开(公告)号：US08941968B2

公开(公告)日：2015-01-27

申请号：US13152735

申请日：2011-06-03

申请人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

发明人： Perry J. I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

IPC分类号： H01L21/687 ,  H01L21/683

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

摘要翻译： 提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。 施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。 还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。 提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面， 至少部分地基于工件的温度。

公开(公告)号：US08797706B2

公开(公告)日：2014-08-05

申请号：US13154836

申请日：2011-06-07

申请人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

发明人： William Davis Lee ,  Gary M. Cook ,  Perry J. I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

摘要翻译： 提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。 具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。 非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。 提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。 环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

公开(公告)号：US07954627B2

公开(公告)日：2011-06-07

申请号：US12052110

申请日：2008-03-20

申请人： Brian C. Weed ,  Steven D. Weed ,  Allan D. Weed

发明人： Brian C. Weed ,  Steven D. Weed ,  Allan D. Weed

IPC分类号： B65G37/00

CPC分类号： B65G13/11 ,  B65G1/08 ,  B65G21/06 ,  B65G2201/0258

摘要： A bin transporter system is used for moving bins or trays from the exit end of a security checkpoint conveyor to the entrance end of the conveyor. The system includes one or more support stands and a roller assembly attached to the stands. The roller assembly includes an elongate bin guide and roller conveyors attached to the inside of the bin guide. The roller assembly is held in a longitudinally inclined orientation, for gravity-actuated movement of the bin along the bin guide, as facilitated by the roller conveyors. Additionally, when bins are placed in the bin guide against the roller conveyors for movement along the bin guide, the bins lie at a laterally tilted orientation, either generally horizontally or generally vertically. This prevents the bins from falling out the front of the roller assembly, in cases where the bin guide has an open front portion.

摘要翻译： 垃圾箱运输系统用于将垃圾箱或托盘从安全检查点输送机的出口端移动到输送机的入口端。 该系统包括一个或多个支撑架和连接到支架的滚子组件。 滚筒组件包括连接到箱导向件内部的细长箱导向件和辊式输送机。 滚筒组件被保持在纵向倾斜的方向上，用于由滚筒输送机方便地沿着箱导向器重新启动箱的移动。 此外，当将箱体放置在箱子导向件中以抵靠辊子传送器沿着箱子引导件移动时，箱体处于横向倾斜的方向，大致水平或大致垂直。 这样，在箱子导向件具有敞开的前部的情况下，这可以防止箱子从滚筒组件的前部掉落。

公开(公告)号：US20110299217A1

公开(公告)日：2011-12-08

申请号：US13152735

申请日：2011-06-03

申请人： Perry J.I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

发明人： Perry J.I. Justesen ,  Allan D. Weed ,  William Davis Lee ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Gary M. Cook

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece.

摘要翻译： 提供了一种具有夹板的静电夹具，其中夹持板的夹紧表面构造成接触工件。 施加到一个或多个电极的电压选择性地静电将工件吸引到夹紧表面。 还提供了一个或多个辅助夹紧构件，其中一个或多个辅助夹紧构件构造成选择性地将至少一部分工件固定到夹紧表面。 提供了一种被配置为确定工件的温度的温度监视装置，并且控制器被配置为经由对一个或多个电极和一个或多个辅助夹紧构件的电压的控制来选择性地将工件夹紧到夹紧表面， 至少部分地基于工件的温度。

公开(公告)号：US20110299218A1

公开(公告)日：2011-12-08

申请号：US13154836

申请日：2011-06-07

申请人： William Davis Lee ,  Gary M. Cook ,  Perry J.I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

发明人： William Davis Lee ,  Gary M. Cook ,  Perry J.I. Justesen ,  Ashwin M. Purohit ,  Robert D. Rathmell ,  Allan D. Weed

IPC分类号： H01L21/687

CPC分类号： H01L21/68728 ,  H01L21/6831

摘要： A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion.

摘要翻译： 提供一种夹紧装置和方法，用于将具有不同尺寸的第一和第二工件固定到夹紧装置并且向其提供热调节。 具有与第一工件相关联的直径的静电夹持板围绕夹具的中心部分。 非静电中心部分在环形空间内提供加热器，其中中心部分具有与第二工件相关联的直径。 提供了工件载体，其中工件载体构造成将第二工件保持在加热器上方，并且其中工件载体的直径与静电夹持板环相关联。 环形空间选择性地将工件载体或第一工件的圆周部分夹持到其夹紧表面，其中选择性地保持第一或第二工件相对于环形或非静电中心部分的位置。

公开(公告)号：US20080232938A1

公开(公告)日：2008-09-25

申请号：US12052110

申请日：2008-03-20

申请人： Brian C. Weed ,  Steven D. Weed ,  Allan D. Weed

发明人： Brian C. Weed ,  Steven D. Weed ,  Allan D. Weed

IPC分类号： B65H1/00

CPC分类号： B65G13/11 ,  B65G1/08 ,  B65G21/06 ,  B65G2201/0258

摘要： A bin transporter system is used for moving bins or trays from the exit end of a security checkpoint conveyor to the entrance end of the conveyor. The system includes one or more support stands and a roller assembly attached to the stands. The roller assembly includes an elongate bin guide and roller conveyors attached to the inside of the bin guide. The roller assembly is held in a longitudinally inclined orientation, for gravity-actuated movement of the bin along the bin guide, as facilitated by the roller conveyors. Additionally, when bins are placed in the bin guide against the roller conveyors for movement along the bin guide, the bins lie at a laterally tilted orientation, either generally horizontally or generally vertically. This prevents the bins from falling out the front of the roller assembly, in cases where the bin guide has an open front portion.

摘要翻译： 垃圾箱运输系统用于将垃圾箱或托盘从安全检查点输送机的出口端移动到输送机的入口端。 该系统包括一个或多个支撑架和连接到支架的滚子组件。 滚筒组件包括连接到箱导向件内部的细长箱导向件和辊式输送机。 滚筒组件被保持在纵向倾斜的方向上，用于由滚筒输送机方便地沿着箱导向器重新启动箱的移动。 此外，当将箱体放置在箱子导向件中以抵靠辊子传送器沿着箱子引导件移动时，箱体处于横向倾斜的方向，大致水平或大致垂直。 这样，在箱子导向件具有敞开的前部的情况下，这可以防止箱子从滚筒组件的前部掉落。

公开(公告)号：US07010388B2

公开(公告)日：2006-03-07

申请号：US10444019

申请日：2003-05-22

申请人： Robert J. Mitchell ,  Allan D. Weed ,  Richard Gueler

发明人： Robert J. Mitchell ,  Allan D. Weed ,  Richard Gueler

IPC分类号： G06F7/00

CPC分类号： H01L21/67763 ,  H01L21/67213 ,  H01L21/67745 ,  Y10S414/139 ,  Y10S414/141

摘要： A transfer system for use with a tool for treating a work-piece at sub-atmospheric pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for treatment of work-pieces placed at a work-piece treatment station within the low pressure region. Multiple work-piece isolation load locks transfer work-pieces, one or two at a time, from a higher pressure region to the lower pressure for treatment and back to said higher pressure subsequent to said treatment. A first robot transfers work-pieces within the low pressure region from the load locks to a treatment station within the low pressure region. Multiple other robots positioned outside the low pressure region transfers work-pieces to and from the multiple work-piece isolation load locks from a source of said work-pieces prior to treatment and to a destination of said work-pieces after said treatment.

摘要翻译： 一种用于处理亚大气压下的工件的工具的转移系统，例如用于植入硅晶片的离子注入机。 外壳限定了用于处理放置在低压区域内的工件处理站的工件的低压区域。 多个工件隔离负载锁将工件一次一个或两个从较高压力区域传递到较低压力以进行处理，并在所述处理之后返回到所述较高压力。 第一机器人将低压区域内的工件从负载锁转移到低压区域内的处理站。 定位在低压区域之外的多个其它机器人在处理之前将工件从多个工件隔离负载锁转移到所述工件的源并在所述处理之后传送到所述工件的目的地。

公开(公告)号：US06914251B1

公开(公告)日：2005-07-05

申请号：US10383410

申请日：2003-03-07

申请人： Steven D. Weed ,  Allan D. Weed

发明人： Steven D. Weed ,  Allan D. Weed

IPC分类号： H01L21/677 ,  G01J1/00 ,  B65G65/34 ,  G01N21/00 ,  G01N23/00 ,  B65G000/00

CPC分类号： H01L21/67775 ,  Y10S414/137 ,  Y10S414/14

摘要： Apparatus and method for placement of workpieces such as silicon wafers in relation to an integrated circuit fabrication tool. A robotic arm mounted in relation to the tool moves workpieces in and out of the tool. A spacer has an exposed spacer surface facing away from the tool. The relative position of this exposed spacer surface is adjustable with respect to the tool. A movable cassette support supports one or more workpieces and is placed in abutting relationship with the spacer surface. It is onto this cassette support surface that a conveyor system such as an overhead transport delivers cassettes containing workpieces such as wafers for subsequent treatment by the tool.

摘要翻译： 相对于集成电路制造工具放置诸如硅晶片的工件的装置和方法。 相对于工具安装的机器人手臂将工件移入和移出工具。 间隔件具有背离工具的暴露的间隔件表面。 该暴露的间隔件表面的相对位置相对于工具是可调节的。 可移动的盒式支架支撑一个或多个工件并且与间隔件表面邻接地放置。 在该盒支撑表面上，诸如架空运输的输送机系统输送包含诸如晶片的工件的盒，用于随后由工具处理。

公开(公告)号：US06727509B2

公开(公告)日：2004-04-27

申请号：US10023516

申请日：2001-12-17

申请人： Michel Pharand ,  Allan D. Weed

发明人： Michel Pharand ,  Allan D. Weed

IPC分类号： A61N500

CPC分类号： H01L21/68764 ,  G21K5/08 ,  H01J37/20 ,  H01J37/3171 ,  H01J2237/31701

摘要： The invention provides a wafer pad assembly and actuation system for use in an ion implanter, preferably a batch-type ion implanter. The wafer pad assembly includes a rotatable wafer support pad having an upper surface for mounting the wafer, and a lower surface rotationally mounted to a housing of the wafer pad assembly. The lower surface of the wafer support pad further comprises a flange connected to a rotatable shaft. The shaft is connected to an actuator for selectively indexing the shaft so that the wafer support pad is rotationally indexed about its geometric center. The lower surface of the wafer support pad is also connected to a frame having an outer curved surface rotatably mounted within a mating bearing surface of a housing. The curved frame is connected to a plurality of linkages for moving the wafer support pad within the curved frame so that the wafer is pivotable or tiltable about its geometric center.

摘要翻译： 本发明提供了一种用于离子注入机，优选分批式离子注入机的晶圆垫组件和致动系统。 晶片垫组件包括可旋转晶片支撑垫，其具有用于安装晶片的上表面，以及可旋转地安装到晶片垫组件的壳体的下表面。 晶片支撑垫的下表面还包括连接到可旋转轴的凸缘。 轴连接到致动器以选择性地分度轴，使得晶片支撑垫围绕其几何中心旋转地分度。 晶片支撑垫的下表面还连接到具有可旋转地安装在壳体的配合支承表面内的外曲面的框架。 弯曲框架连接到多个联动装置，用于在晶片框架内移动晶片支撑垫，使得晶片围绕其几何中心可枢转或可倾斜。