利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

46 条记录 (耗时 0.018 秒)

    Linkage conduit for vacuum chamber applications
    2.
    发明授权
    Linkage conduit for vacuum chamber applications 有权
    真空室应用连接管道

    公开(公告)号：US09484183B2

    公开(公告)日：2016-11-01

    申请号：US14482761

    申请日：2014-09-10

    申请人： Varian Semiconductor Equipment Associates, Inc.

    发明人： Eric D. Hermanson ,  Robert J. Mitchell ,  Steven Anella ,  Jeffrey Charles Blahnik ,  William T. Weaver ,  Michael Rohrer ,  James P. Buonodono

    IPC分类号： H01J37/317 ,  H01J37/20 ,  H01J21/18

    CPC分类号： H01J37/20 ,  H01J21/18 ,  H01J37/3171 ,  H01J2237/2005 ,  H01J2237/202 ,  H01L21/18

    摘要： An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.

    摘要翻译： 一种离子注入装置，其包括限定处理室的外壳，可滑动地安装在处理室内的轴上并联接到适于沿着轴选择性地移动托架的驱动机构的托架。 压板组件可以联接到滑架，并且连接导管可以在外壳的侧壁和滑架之间延伸。 连接导管可以包括多个可枢转地互连的连接构件，其限定了与处理室密封的连续内部容积。 连续体积可以保持在与处理室的真空环境分开的期望的真空压力下。

    METHOD OF USE OF REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LOADING OF VERY SMALL WET SAMPLES
    3.
    发明申请
    METHOD OF USE OF REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LOADING OF VERY SMALL WET SAMPLES 失效
    使用可重复使用的样品保存装置的方法允许非常小的样品的准备加载

    公开(公告)号：US20120017415A1

    公开(公告)日：2012-01-26

    申请号：US13239632

    申请日：2011-09-22

    申请人： Charles P. MARSH ,  Eric OLSON ,  Todor I. DONCHEV ,  Ivan PETROV ,  Jianguo WEN ,  Ryan FRANKS ,  Dongxiang LIAO

    发明人： Charles P. MARSH ,  Eric OLSON ,  Todor I. DONCHEV ,  Ivan PETROV ,  Jianguo WEN ,  Ryan FRANKS ,  Dongxiang LIAO

    IPC分类号： B23P11/00

    CPC分类号： H01J37/26 ,  G02B21/34 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/28 ,  Y10T29/49826

    摘要： A method for using a reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. The method may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, the method provides a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

    摘要翻译： 一种使用可重复使用的样品保持装置的方法，用于容易地加载非常小的湿样品，以通过微观设备特别是在真空环境中观察样品。 该方法可以用扫描电子显微镜（SEM），透射电子显微镜（TEM），X射线显微镜，光学显微镜等来使用。 为了观察样品，该方法提供了在两个硅晶片的每一个的中心蚀刻的薄膜窗口，其邻接以将样品容纳在窗口之间形成的小的均匀间隙中。 该间隙可以通过使用间隔物来调节。 或者，通过其中包含样品的流体建立的膜的厚度确定了间隙而不需要间隔物。 为了优化分辨率，每个窗口可以具有大约50nm的厚度，并且间隙可以在50nm量级。

    HERMETIC SAMPLE HOLDER AND METHOD FOR PERFORMING MICROANALYSIS UNDER CONTROLLED ATMOSPHERE ENVIRONMENT
    4.
    发明申请
    HERMETIC SAMPLE HOLDER AND METHOD FOR PERFORMING MICROANALYSIS UNDER CONTROLLED ATMOSPHERE ENVIRONMENT 有权
    在控制的大气环境下进行微观分析的实例样品夹具和方法

    公开(公告)号：US20100294049A1

    公开(公告)日：2010-11-25

    申请号：US12471095

    申请日：2009-05-22

    申请人： Tracy Earl Kelley ,  John D. May ,  Vladimir Oleshko ,  Chariclea Scordilis-Kelley

    发明人： Tracy Earl Kelley ,  John D. May ,  Vladimir Oleshko ,  Chariclea Scordilis-Kelley

    IPC分类号： G01N1/00 ,  B01L3/00

    CPC分类号： G01N1/28 ,  G01N2035/00277 ,  H01J37/20 ,  H01J49/0409 ,  H01J2237/2002 ,  H01J2237/2005 ,  H01J2237/25 ,  H01J2237/26

    摘要： A hermetic sample holder for use in performing microanalysis of a sample under a controlled atmosphere environment. The sample holder comprises a sample holder body with a sample cavity to receive the sample and a cover movably mounted to the holder body between an open position to allow access to the cavity and a closed position to seal the cavity. The cover is secured in and released from the closed position at least in part by a pressure differential between the cavity and the ambient atmosphere. The cover may be biased toward the open position. The cover may be pivotally mounted about an axis that is perpendicular to a sealing surface of the cover and/or movable in a direction along the pivot axis. A valve may be provided to allow direct evacuation of the cavity to create a pressure differential. An adjustable clamp may be located in the cavity to secure the sample.

    摘要翻译： 一种用于在受控气氛环境下对样品进行微量分析的密封样品架。 样品保持器包括具有样品腔以容纳样品的样品保持器主体和可移动地安装到保持器主体的敞开位置以允许进入腔体的封闭位置和密封腔体的盖子。 至少部分地通过空腔和环境大气之间的压力差将盖子固定在关闭位置并从该位置释放。 盖子可能偏向打开位置。 盖可以围绕垂直于盖的密封表面的轴线枢转地安装和/或可沿着枢转轴线的方向移动。 可以设置阀以允许空腔的直接抽空以产生压力差。 可调节的夹具可以位于腔体中以固定样品。

    Method for Differentially Pumping Endblock Seal Cavity
    6.
    发明申请
    Method for Differentially Pumping Endblock Seal Cavity 审中-公开
    端塞密封腔差异泵送方法

    公开(公告)号：US20090095055A1

    公开(公告)日：2009-04-16

    申请号：US12274908

    申请日：2008-11-20

    申请人： James G. Rietzel

    发明人： James G. Rietzel

    IPC分类号： G01M3/28 ,  C23C14/34

    CPC分类号： H01J37/3405 ,  H01J2237/166 ,  H01J2237/18 ,  H01J2237/188 ,  H01J2237/2005

    摘要： A system for providing a seal between a rotating part and a stationary part that comprises two seals in series separated by a cavity is disclosed. The cavity may be at low pressure and failure of either seal may be detected by a change in cavity pressure. An alarm may be triggered when cavity pressure rises above a threshold, or when it remains above a threshold for more than a predetermined period of time. In a system comprising multiple cavities, a cavity may be selectively isolated to determine if a seal associated with that cavity is experiencing a leak.

    摘要翻译： 公开了一种用于在旋转部件和固定部件之间提供密封件的系统，该系统包括由空腔串联分离的两个密封件。 空腔可能处于低压状态，任何密封件的故障都可能通过腔体压力的变化来检测。 当腔体压力升高到高于阈值时，或者当腔体压力保持高于阈值超过预定时间段时，可以触发警报。 在包括多个空腔的系统中，空腔可以被选择性地隔离以确定与该空腔相关联的密封件是否经历泄漏。

    APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS
    7.
    发明申请
    APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS 审中-公开
    厚膜清洗过程中温度条件的装置及方法

    公开(公告)号：US20080188011A1

    公开(公告)日：2008-08-07

    申请号：US12019110

    申请日：2008-01-24

    申请人： Francois J. Henley

    发明人： Francois J. Henley

    IPC分类号： H01L21/268 ,  H01L21/687 ,  G21K5/00 ,  B23K26/38

    CPC分类号： H01J37/20 ,  B28D1/221 ,  B28D5/00 ,  H01J2237/2001 ,  H01J2237/2005 ,  H01J2237/2007 ,  H01J2237/31701 ,  H01L21/76254 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

    摘要： An apparatus for temperature control of manufacture of thick film materials includes a stage comprising a planar surface for supporting a bulk material to be implanted and subsequently cleaved. The bulk material has a surface region, a side region, and a bottom region which provides a volume of material and defines a length between the bottom region and the surface region. The apparatus further includes a mechanical clamp device adapted to engage the bottom region to the planar surface of the stage such that the bulk material is in physical contact with the planar surface for thermal energy to transfer through an interface region between the bulk material and the stage while the surface region is substantially exposed. Additionally, the apparatus includes a sensor device configured to measure a temperature value of the surface region and generate an input data. The apparatus further includes an implant device configured to perform implantation of a plurality of particles through one or more portions of the surface region of the bulk material and a controller configured to receive and process the input data to increase and/or decrease the temperature value of the surface region through at least the interface region between the planar surface of the stage and the bottom region of the bulk material.

    摘要翻译： 用于制造厚膜材料的温度控制装置包括一个平台，该平台用于支撑待植入的大块材料并随后被切割。 本体材料具有表面区域，侧面区域和底部区域，其提供一定体积的材料并限定了底部区域和表面区域之间的长度。 该装置还包括机械夹持装置，其适于将底部区域接合到平台的平面表面，使得散装材料与平面表面物理接触，以使热能通过散装材料和载物台之间的界面区域传递 而表面区域基本上是露出的。 另外，该装置包括被配置为测量表面区域的温度值并生成输入数据的传感器装置。 该装置还包括植入装置，其配置成执行多个粒子通过散装材料的表面区域的一个或多个部分的植入;以及控制器，被配置为接收和处理输入数据以增加和/或降低温度值 所述表面区域至少通过所述平台的平坦表面和所述散装材料的底部区域之间的界面区域。

    Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
    8.
    发明申请
    Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope 有权
    用于在带电粒子束显微镜内进行原位探针尖端置换的方法和装置

    公开(公告)号：US20060022135A1

    公开(公告)日：2006-02-02

    申请号：US11186073

    申请日：2005-07-21

    申请人： Thomas Moore ,  Lyudmilla Zaykova-Feldman

    发明人： Thomas Moore ,  Lyudmilla Zaykova-Feldman

    IPC分类号： G21K7/00

    CPC分类号： H01J37/20 ,  H01J37/26 ,  H01J2237/2005 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/204 ,  H01J2237/208 ,  H01J2237/26 ,  H01J2237/262 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： We disclose a gripper and associated apparatus and methods for delivering nano-manipulator probe tips inside a vacuum chamber. The gripper includes a tube; a compression cylinder inside of and coaxial with the tube; and at least one elastic ring adjacent to the compression cylinder. There is a vacuum seal coaxial with the compression cylinder for receiving and sealing against a probe tip. An actuator is connected to the compression cylinder for compressing the elastic ring and causing it to grip the probe tip. Thus the probe tip can be gripped, transferred to a different location in the vacuum chamber, and released there. Samples attached to the probe tips will be transferred to a TEM sample holder, shown in several embodiments, that includes a bar having opposed ends; an arm attached to each opposed end of the bar; one or more slots for receiving a probe tip; and, each slot having an inner part and an outer part, where the inner part is smaller than the outer part. The TEM sample holders just described are inserted into a carrier cassette. A cassette for transferring one or more TEM sample holders comprises a platform; at least one bar extending upwardly from the platform; the bar having a groove for receiving and holding a TEM sample holder. A rotatable magazine holds one or more probe tips and selectively releases the tips. The magazine includes a cartridge having a plurality of longitudinal openings for receiving probe tips and dispensing probe tips.

    摘要翻译： 我们公开了一种夹具和相关的装置和方法，用于在真空室内输送纳米机械手探针尖端。 夹具包括管; 压缩缸内部并与管同轴; 以及与压缩圆筒相邻的至少一个弹性环。 存在与压缩筒同轴的真空密封件，用于接收和密封探针尖端。 致动器连接到压缩气缸，用于压缩弹性环并使其夹持探针尖端。 因此，探针尖端可以被夹持，转移到真空室中的不同位置，并在那里释放。 附接到探针尖端的样品将转移到TEM样品保持器，如几个实施方案中所示，其包括具有相对端的棒; 连接到杆的每个相对端的臂; 用于接收探针尖端的一个或多个狭槽; 并且每个狭槽具有内部部分和外部部分，其中内部部分小于外部部分。 刚刚描述的TEM样品架被插入到载体盒中。 用于转移一个或多个TEM样品保持器的盒子包括平台; 从平台向上延伸的至少一个杆; 该棒具有用于容纳和保持TEM样品保持器的凹槽。 一个可旋转刀库可容纳一个或多个探针尖端并选择性地释放尖端。 该盒包括具有多个用于接收探针尖端并分配探针尖端的多个纵向开口的盒。