-
1.发明授权Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers 失效制造无定形沉积多晶硅热喷墨换能器的方法
公开(公告)号：US5169806A
公开(公告)日：1992-12-08
申请号：US589788
申请日：1990-09-26
申请人： William G. Hawkins , Olaf Muller
发明人： William G. Hawkins , Olaf Muller
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16 , H01L21/822 , H01L27/04
CPC分类号： B41J2/1628 , B41J2/14072 , B41J2/1604 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1642 , Y10S148/122 , Y10S148/154 , Y10S438/934
摘要： A resistive heating element is formed by depositing an amorphous silicon film on selected portions of a substrate and heating the deposited amorphous silicon film so that it undergoes solid phase epitaxy to form a (111) textured polycrystalline silicon film. The method is particularly useful for forming electro-thermal transducers for thermal ink jet printheads.
摘要翻译： 通过在衬底的选定部分上沉积非晶硅膜并加热沉积的非晶硅膜使其经历固相外延以形成（111）织构化的多晶硅膜来形成电阻加热元件。 该方法对于形成用于热喷墨打印头的电热换能器特别有用。
-
公开(公告)号：US4951063A
公开(公告)日：1990-08-21
申请号：US354941
申请日：1989-05-22
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642
摘要： A thermal ink jet printhead is improved by a specific heating element structure and method of manufacture. The heating elements each have a resistive layer, a high temperature deposited plasma or pyrolytic silicon nitride thereover of predetermined thickness to electrically isolate a subsequently formed cavitational stress protecting layer of tantalum thereon. The pyrolytic silicon nitride permits wet chemical or dry plasma etching delineation of the tantalum without deleterious impact on the silicon nitride, while the delineated tantalum can serve as mask for the wet etch delineation of the silicon nitride. Because of the high deposition temperatures, the aluminum electrodes are patterned and passivated last. Such a construction lowers the manufacturing cost and concurrently provides a more durable printhead.
摘要翻译： 通过特定的加热元件结构和制造方法来改进热喷墨打印头。 加热元件各自具有预定厚度的电阻层，高温沉积等离子体或热解氮化硅，以电隔离随后形成的钽的空穴应力保护层。 热解氮化硅允许钽的湿化学或干等离子体蚀刻描绘，而对氮化硅没有有害影响，而描绘的钽可以用作氮化硅的湿蚀刻描绘的掩模。 由于沉积温度高，铝电极最后被图案化和钝化。 这种结构降低了制造成本，同时提供了更耐用的打印头。
-
公开(公告)号：US11952410B2
公开(公告)日：2024-04-09
申请号：US16610433
申请日：2018-05-02
IPC分类号： C07K14/705 , A61K38/00 , A61P35/00 , C07K16/30
CPC分类号： C07K14/70575 , A61P35/00 , C07K16/30 , A61K38/00 , C07K2317/567 , C07K2317/622 , C07K2317/76 , C07K2319/30
摘要： The present disclosure provides constructs that comprise (a) a TNF-related apoptosis-inducing ligand (TRAIL) trimer comprising three consecutive extracellular TRAIL domains fused together in a head-to-tail configuration; (b) an epitope binding agent, and (c) optionally one or more additional components, wherein the epitope binding agent competitively inhibits binding of P4-TR3 or HN1-TR3 to cell surface human mesothelin. Constructs of the present disclosure induce apoptosis in cells expressing human mesothelin and a death receptor (DR4 or DR5) on the cell's surface.
-
公开(公告)号：US06315398B1
公开(公告)日：2001-11-13
申请号：US07963969
申请日：1992-10-21
申请人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
发明人： Cathie J. Burke , Narayan V. Desphande , William G. Hawkins , Dale R. Ims , Michael P. O'Horo , Gary A. Kneezel , Thomas A. Tellier , Ivan Rezanka
IPC分类号： B41J205
CPC分类号： B41J2/1604 , B41J2/14129 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1646
摘要： The new heater element design has a pit layer which protects the overglaze passivation layer, PSG step region, portions of the Ta layer and dielectric isolation layer and junctions or regions susceptible to the cavitational pressures. Further, the inner walls of the pit layer define the effective heater area and the dopant lines define the actual heater area. In alternative embodiments, the dopant lines define the actual and effective heater areas, and an inner wall and a dopant line define the actual and effective heater areas. Further, when the new heater element designs are incorporated into printheads having full pit channel geometry and open pit channel geometry, the operating lifetime of the printhead is extended because the added protection of the pit layer prevents: 1) passivation damage and cavitational damages of the heater elements; and 2) degradation of heater robustness, hot spot formations and heater failures well into the 109 pulse range. The printhead incorporating the new heater element design can be incorporated into drop-on-demand printing systems of a carriage type or a full width type.
摘要翻译： 新的加热器元件设计具有凹坑层，其保护釉面钝化层，PSG阶梯区域，Ta层和电介质隔离层的部分以及对空穴压力敏感的结或区域。 此外，凹坑层的内壁限定有效的加热器面积，并且掺杂剂线限定实际的加热器面积。 在替代实施例中，掺杂剂线限定实际和有效的加热器区域，并且内壁和掺杂剂线限定实际和有效的加热器区域。 此外，当新的加热器元件设计结合到具有全坑通道几何形状和露天通道几何形状的打印头中时，打印头的工作寿命延长，因为凹坑层的附加保护防止：1）钝化损伤和空穴损伤 加热元件; 和2）加热器鲁棒性，热点形成和加热器故障的恶化达到109脉冲范围。 包含新的加热器元件设计的打印头可以结合到托架型或全宽型的按需按需打印系统中。
-
公开(公告)号：US5371530A
公开(公告)日：1994-12-06
申请号：US55891
申请日：1993-05-04
CPC分类号： B41J2/04515 , B41J2/04541 , B41J2/0455 , B41J2/0457 , B41J2/0458 , B41J2/375
摘要： A thermal ink jet printhead includes a switched power supply for the intermediate voltage predriver sections. The power supply is switched by a MOSFET connected between an intermediate point of a voltage divider and ground. By switching the power supply, the predriver sections are turned off, unnecessary power consumption and overheating the printhead are avoided.
摘要翻译： 热喷墨打印头包括用于中间电压预驱动部分的开关电源。 电源由连接在分压器的中间点和地之间的MOSFET切换。 通过切换电源，预驱动部分被关闭，避免了不必要的功耗和打印头的过热。
-
公开(公告)号：US5010355A
公开(公告)日：1991-04-23
申请号：US456431
申请日：1989-12-26
CPC分类号： B41J2/14129 , B41J2/1604 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1646 , H01L23/291 , H01L23/3157 , B41J2202/13 , H01L2924/0002
摘要： An improved ink jet printhead is disclosed of the type having a plurality of parallel ink flow channels which terminate with an ink droplet emitting nozzle, a heating element with a cavitational protective layer thereover located in each channel, and MOS electronic circuitry monolithically integrated within the printhead for applying electrical pulses to the heating elements. The pulsed heating elements produce bubbles momentarily on the protective layer of the heating elements which expel ink droplets from the nozzles. The improvement is obtained by providing multi-layer ionic passivation of the MOS electronic circuitry which is exposable to the ink. This is accomplished through the deposition of a multi-layered, thin film insulative coating thereon consisting of a first layer of doped or undoped silicon dioxide having a thickness of 200 .ANG. to 2 .mu.m followed by a second layer of plasma nitride having a thickness of 1000 .ANG. to 3 .mu.m. The silicon nitride is etched from the protective layers of the heating elements and electrical contact pads for external connection to electrical power so that the first layer of silicon oxide is exposed, followed by etching of the silicon oxide to remove it from the protective layer and contact pads. Thus, the MOS circuitry is protected from mobile ions in the ink while the cost effective fabrication of a printhead is maintained. In an alternate embodiment, the multi-layered ionic passivation comprises three thin film layers comprising polyimide interfacing with the ink, followed by silicon nitride, and doped or undoped silicon dioxide directly interfacing with the metallization.
-
">7.发明授权
公开(公告)号：US4985710A
公开(公告)日：1991-01-15
申请号：US442641
申请日：1989-11-29
CPC分类号： B41J2/1623 , B41J2/155 , B41J2/1603 , B41J2/1626 , B41J2/1632 , Y10T156/1052
摘要： A "roofshooter" pagewidth printhead for use in a thermal ink jet printing device is fabricated by forming a plurality of subunits, each being produced by bonding a heater substrate having an architecture including an array of heater elements and an etched ink feed slot to a secondary substrate having a series of spaced feed hole openings to form a combined substrate in which said series of spaced feed hole openings communicates with said ink feed slot, and dicing said combined substrates through said ink feed slot to form a subunit. An array of butted subunits having a length equal to one pagewidth is formed by butting one of said subunits against an adjacent subunit. The array of butted subunits is bonded to a pagewidth support substrate. The secondary substrate provides an integral support structure for maintaining the alignment of the heater plate which, if diced through the feed hole without the secondary substrate, would separate into individual pieces, thereby complicating the alignment and assembly process.
-
公开(公告)号：US4899181A
公开(公告)日：1990-02-06
申请号：US303620
申请日：1989-01-30
CPC分类号： B41J2/1642 , B41J2/1604 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635
摘要： An improved thermal ink jet printhead and method of fabrication thereof is disclosed of the type formed by the mating and bonding of first and second substrates. The first substrate is silicon with {100} crystal plane surfaces and has anisotropically etched in one surface thereof a linear series of separate through recesses and a plurality of parallel, elongated ink channels grooves. The second substrate has a plurality of heating elements and addressing electrodes patterned on one surface thereof. The through recesses serve as a segmented ink reservoir with each segment having an ink inlet, and the elongated ink channel grooves having one end adjacent the segmented reservoir and the opposite end open to serve as ink droplet emitting nozzles. Each segment of the segmented reservoir is isolated from each other by dividing walls. The dividing walls strengthen the printhead, and the separate through recesses reduce the effects of angular misalignment between mask and first substrate crystal planes. In the preferred embodiment, a thick film insulative layer is sandwiched between the first and second substrates and patterned to form recesses therein to provide the means for placing the segmented reservoir into communication with the ink channel grooves. To produce a multicolor printing printhead, the thick film layer is patterned to form a linear series of recesses, each substantially equal in length to an associated one of the reservoir segments, so that each reservoir segment may have a different colored ink supplied thereto that cannot mix with the ink of the other reservoir segments.
摘要翻译： 公开了一种改进的热喷墨打印头及其制造方法，其通过第一和第二基板的配合和结合而形成。 第一衬底是具有{100}晶面表面的硅，并且在其一个表面中具有各向异性蚀刻线性系列的分离的通孔和多个平行的细长的墨水槽。 第二基板具有在其一个表面上图案化的多个加热元件和寻址电极。 贯通凹部用作分段墨水储存器，每个分段具有墨水入口，并且细长的墨水通道凹槽具有与分段的储存器相邻的一端，并且相对的端部打开以用作墨滴喷射。 分段储存器的每个段通过分隔壁彼此隔离。 分隔壁加强了打印头，并且单独的通孔减少了掩模和第一基板晶体平面之间的角度偏移的影响。 在优选实施例中，厚膜绝缘层被夹在第一和第二基板之间并被图案化以在其中形成凹槽，以提供用于将分段的储存器放置成与墨水通道槽连通的装置。 为了生产多色打印打印头，将厚膜层图案化以形成线性系列的凹槽，每个凹槽的长度与相关联的储存器段之间的长度基本上相等，使得每个储存器段可以具有供给其的不同颜色的墨水，不能 与其他水库段的油墨混合。
-
9.发明授权
公开(公告)号：US4863560A
公开(公告)日：1989-09-05
申请号：US234994
申请日：1988-08-22
申请人： William G. Hawkins
发明人： William G. Hawkins
IPC分类号： B41J2/05 , B41J2/16 , B81B1/00 , C30B29/06 , G02B6/36 , H01L21/302 , H01L21/306 , H01L21/3065 , H01L21/308
CPC分类号： B81C1/00126 , B41J2/1601 , B41J2/1626 , B41J2/1631 , H01L21/30608 , H01L21/3081 , H01L21/3085 , B81B2201/052 , B81B2203/0338 , G02B6/3644 , G02B6/3692
摘要： Three dimensional silicon structures are fabricated from (100) silicon wafers by a single side, multiple step ODE etching process. All etching masks are formed one on top of the other prior to the initiation of etching, with the coarsest mask formed last and used first. Once the coarse anisotropic etching is completed, the coarse mask is removed and the finer anisotropic etching is done. The preferred embodiment is described using a thermal ink jet channel plate as the three dimensional structure, where coarse etching step provides the reservoir and the fine etching step provides the ink channels.
-
公开(公告)号：US4822755A
公开(公告)日：1989-04-18
申请号：US185600
申请日：1988-04-25
IPC分类号： H01L21/302 , B41J2/16 , H01L21/301 , H01L21/306 , H01L29/06 , H01L21/00 , H01L21/02 , H01L21/72 , H01L21/98
CPC分类号： B41J2/1628 , B41J2/1601 , B41J2/1623 , B41J2/1629 , B41J2/1642 , H01L21/30604 , B41J2202/13 , H01L29/0657 , Y10S438/928
摘要： A method for separating chips formed on a silicon substrate is provided which uses a combination of reactive ion etching techniques combined with orientation etching to yield integrated chips having edges which can be more precisely butted together to form large area arrays.
-
-
-
-
-
-
-
-
-
搜索结果
63 条记录 (耗时 0.024 秒)
