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1.
公开(公告)号:US08735225B2
公开(公告)日:2014-05-27
申请号:US12415986
申请日:2009-03-31
IPC分类号: H01L23/31
CPC分类号: B81B7/0038 , B81C2203/019 , G02B26/001
摘要: Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.
摘要翻译: 公开了用于封装诸如干涉式调制器阵列之类的MEMS装置的方法和系统。 MEMS器件封装结构的一个实施例包括具有化学反应物吸气剂的密封。 MEMS器件封装的另一实施例包括具有吸气剂的主密封件和靠近主密封件的外周边的次级密封件。 MEMS器件封装的另一个实施例包括位于MEMS器件封装内部并且靠近封装密封件的内周边的吸气剂。
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公开(公告)号:US20120002266A1
公开(公告)日:2012-01-05
申请号:US13231640
申请日:2011-09-13
申请人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
发明人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
CPC分类号: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译: 用于干涉式调制器的封装结构和封装方法。 在干涉式调制器和透明衬底上沉积薄膜材料以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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公开(公告)号:US08045835B2
公开(公告)日:2011-10-25
申请号:US12192908
申请日:2008-08-15
申请人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
发明人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
IPC分类号: G02B6/00
CPC分类号: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译: 用于干涉式调制器的封装结构和封装方法。 在干涉式调制器和透明衬底上沉积薄膜材料以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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公开(公告)号:US20090059342A1
公开(公告)日:2009-03-05
申请号:US12192908
申请日:2008-08-15
申请人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
发明人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
IPC分类号: G02F1/00
CPC分类号: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译: 用于干涉式调制器的封装结构和封装方法。 在干涉式调制器和透明衬底上沉积薄膜材料以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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公开(公告)号:US08682130B2
公开(公告)日:2014-03-25
申请号:US13231640
申请日:2011-09-13
申请人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
发明人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
CPC分类号: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译: 用于干涉式调制器的封装结构和封装方法。 在干涉式调制器和透明衬底上沉积薄膜材料以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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公开(公告)号:US07580176B2
公开(公告)日:2009-08-25
申请号:US12041618
申请日:2008-03-03
申请人: William J Cummings , Brian Gally , Manish Kothari
发明人: William J Cummings , Brian Gally , Manish Kothari
CPC分类号: G09G3/006 , G02B26/001 , G09G3/3466
摘要: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.
摘要翻译: 本文公开了用于测试反射显示器的电气特性的方法和系统,包括干涉式调制器显示器。 在一个实施例中,将受控电压施加到显示器中的导电引线,并且测量所得到的电流。 可以控制电压以确保在电阻测量期间干涉式调制器不起动。 还公开了通过施加使显示器中的干涉式调制器致动的电压波形来调节干涉式调制器显示的方法。
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公开(公告)号:US07289256B2
公开(公告)日:2007-10-30
申请号:US11097511
申请日:2005-04-01
申请人: William J. Cummings , Brian Gally , Manish Kothari
发明人: William J. Cummings , Brian Gally , Manish Kothari
IPC分类号: G02B26/00
CPC分类号: G09G3/006 , G02B26/001 , G09G3/3466
摘要: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.
摘要翻译: 本文公开了用于测试反射显示器的电气特性的方法和系统,包括干涉式调制器显示器。 在一个实施例中,将受控电压施加到显示器中的导电引线,并且测量所得到的电流。 可以控制电压以确保在电阻测量期间干涉式调制器不起动。 还公开了通过施加使显示器中的干涉式调制器致动的电压波形来调节干涉式调制器显示的方法。
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公开(公告)号:US20100321761A1
公开(公告)日:2010-12-23
申请号:US12869494
申请日:2010-08-26
申请人: William J. Cummings , Brian Gally , Manish Kothari
发明人: William J. Cummings , Brian Gally , Manish Kothari
IPC分类号: G02B26/00
CPC分类号: G09G3/006 , G02B26/001 , G09G3/3466
摘要: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.
摘要翻译: 本文公开了用于测试反射显示器的电气特性的方法和系统,包括干涉式调制器显示器。 在一个实施例中,将受控电压施加到显示器中的导电引线,并且测量所得到的电流。 可以控制电压以确保在电阻测量期间干涉式调制器不起动。 还公开了通过施加使显示器中的干涉式调制器致动的电压波形来调节干涉式调制器显示的方法。
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公开(公告)号:US07424198B2
公开(公告)日:2008-09-09
申请号:US11045738
申请日:2005-01-28
申请人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
发明人: Lauren Palmateer , William J. Cummings , Brian Gally , Mark Miles , Jeffrey B. Sampsell , Clarence Chui , Manish Kothari
IPC分类号: G02B6/00
CPC分类号: G02B26/007 , B81B2201/047 , B81C1/00285 , B81C1/00333 , B81C2203/0136 , B81C2203/0145 , G02B26/001 , G02B26/0825 , G02B26/0833
摘要: A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
摘要翻译: 用于干涉式调制器的封装结构和封装方法。 在干涉式调制器和透明衬底上沉积薄膜材料以封装干涉式调制器。 干涉式调制器和薄膜之间的间隙或腔提供干涉式调制器的机械部分可以移动的空间。 通过去除沉积在干涉式调制器上的牺牲层产生间隙。
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公开(公告)号:US20080158646A1
公开(公告)日:2008-07-03
申请号:US12041618
申请日:2008-03-03
申请人: William J Cummings , Brian Gally , Manish Kothari
发明人: William J Cummings , Brian Gally , Manish Kothari
IPC分类号: G02B26/00
CPC分类号: G09G3/006 , G02B26/001 , G09G3/3466
摘要: Disclosed herein are methods and systems for testing the electrical characteristics of reflective displays, including interferometric modulator displays. In one embodiment, a controlled voltage is applied to conductive leads in the display and the resulting current is measured. The voltage may be controlled so as to ensure that interferometric modulators do not actuate during the resistance measurements. Also disclosed are methods for conditioning interferometric modulator display by applying a voltage waveform that causes actuation of interferometric modulators in the display.
摘要翻译: 本文公开了用于测试反射显示器的电气特性的方法和系统,包括干涉式调制器显示器。 在一个实施例中,将受控电压施加到显示器中的导电引线,并且测量所得到的电流。 可以控制电压以确保在电阻测量期间干涉式调制器不起动。 还公开了通过施加使显示器中的干涉式调制器致动的电压波形来调节干涉式调制器显示的方法。
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