Semiconductor package and fabrication method thereof
    2.
    发明授权
    Semiconductor package and fabrication method thereof 有权
    半导体封装及其制造方法

    公开(公告)号:US08928098B2

    公开(公告)日:2015-01-06

    申请号:US13714218

    申请日:2012-12-13

    Applicant: Xintec Inc.

    CPC classification number: B81B7/007 B81C1/0023 B81C1/00301

    Abstract: A semiconductor package includes: a chip having a first portion and a second portion disposed on the first portion, wherein the second portion has at least a through hole therein for exposing a portion of the first portion, and the first portion and/or the second portion has a MEMS; and an etch stop layer formed between the first portion and the second portion and partially exposed through the through hole of the second portion. The invention allows an electronic element to be received in the through hole so as for the semiconductor package to have integrated functions of the MEMS and the electronic element. Therefore, the need to dispose the electronic element on a circuit board as in the prior art can be eliminated, thereby saving space on the circuit board.

    Abstract translation: 半导体封装包括:具有第一部分和设置在第一部分上的第二部分的芯片,其中第二部分至少在其中具有用于暴露第一部分的一部分的通孔,以及第一部分和/或第二部分 部分具有MEMS; 以及形成在所述第一部分和所述第二部分之间并且部分地暴露于所述第二部分的通孔的蚀刻停止层。 本发明允许电子元件被容纳在通孔中,以便半导体封装具有MEMS和电子元件的集成功能。 因此,可以消除如现有技术那样将电子元件配置在电路板上,从而节省了电路板上的空间。

    SEMICONDUCTOR PACKAGE AND FABRICATION METHOD THEREOF
    3.
    发明申请
    SEMICONDUCTOR PACKAGE AND FABRICATION METHOD THEREOF 有权
    半导体封装及其制造方法

    公开(公告)号:US20130168784A1

    公开(公告)日:2013-07-04

    申请号:US13714218

    申请日:2012-12-13

    Applicant: Xintec Inc.

    CPC classification number: B81B7/007 B81C1/0023 B81C1/00301

    Abstract: A semiconductor package includes: a chip having a first portion and a second portion disposed on the first portion, wherein the second portion has at least a through hole therein for exposing a portion of the first portion, and the first portion and/or the second portion has a MEMS; and an etch stop layer formed between the first portion and the second portion and partially exposed through the through hole of the second portion. The invention allows an electronic element to be received in the through hole so as for the semiconductor package to have integrated functions of the MEMS and the electronic element. Therefore, the need to dispose the electronic element on a circuit board as in the prior art can be eliminated, thereby saving space on the circuit board.

    Abstract translation: 半导体封装包括:具有第一部分和设置在第一部分上的第二部分的芯片,其中第二部分至少在其中具有用于暴露第一部分的一部分的通孔,以及第一部分和/或第二部分 部分具有MEMS; 以及形成在所述第一部分和所述第二部分之间并且部分地暴露于所述第二部分的通孔的蚀刻停止层。 本发明允许电子元件被容纳在通孔中,以便半导体封装具有MEMS和电子元件的集成功能。 因此,可以消除如现有技术那样将电子元件配置在电路板上,从而节省了电路板上的空间。

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