METHOD AND APPARATUS FOR SUPPRESSING METAL-GATE CROSS-DIFFUSION IN SEMICONDUCTOR TECHNOLOGY
    1.
    发明申请
    METHOD AND APPARATUS FOR SUPPRESSING METAL-GATE CROSS-DIFFUSION IN SEMICONDUCTOR TECHNOLOGY 有权
    用于在半导体技术中抑制金属栅极交叉扩散的方法和装置

    公开(公告)号:US20150054085A1

    公开(公告)日:2015-02-26

    申请号:US13973616

    申请日:2013-08-22

    Applicant: Xilinx, Inc.

    Abstract: An inverter includes: a PMOS comprising: a p-type source region, a p-type drain region, a p-channel region between the p-type source region and the p-type drain region, and a PMOS metal gate region; a NMOS, comprising: an n-type source region, an n-type drain region, an n-channel region between the n-type source region and the n-type drain region, and a NMOS metal gate region; an insulating layer above the p-channel region and the n-channel region, wherein the PMOS metal gate region and the NMOS metal gate region are above the insulating layer; and a gate contact between the NMOS metal gate region and the PMOS metal gate region.

    Abstract translation: 反相器包括:PMOS,包括:p型源极区域,p型漏极区域,p型源极区域和p型漏极区域之间的p沟道区域以及PMOS金属栅极区域; NMOS,包括:n型源极区域,n型漏极区域,n型源极区域和n型漏极区域之间的n沟道区域以及NMOS金属栅极区域; 在p沟道区域和n沟道区域上方的绝缘层,其中PMOS金属栅极区域和NMOS金属栅极区域在绝缘层之上; 以及NMOS金属栅极区域和PMOS金属栅极区域之间的栅极接触。

    Method and apparatus for suppressing metal-gate cross-diffusion in semiconductor technology
    3.
    发明授权
    Method and apparatus for suppressing metal-gate cross-diffusion in semiconductor technology 有权
    用于抑制半导体技术中金属栅极交叉扩散的方法和装置

    公开(公告)号:US09385127B2

    公开(公告)日:2016-07-05

    申请号:US13973616

    申请日:2013-08-22

    Applicant: Xilinx, Inc.

    Abstract: An inverter includes: a PMOS comprising: a p-type source region, a p-type drain region, a p-channel region between the p-type source region and the p-type drain region, and a PMOS metal gate region; a NMOS, comprising: an n-type source region, an n-type drain region, an n-channel region between the n-type source region and the n-type drain region, and a NMOS metal gate region; an insulating layer above the p-channel region and the n-channel region, wherein the PMOS metal gate region and the NMOS metal gate region are above the insulating layer; and a gate contact between the NMOS metal gate region and the PMOS metal gate region.

    Abstract translation: 反相器包括:PMOS,包括:p型源极区域,p型漏极区域,p型源极区域和p型漏极区域之间的p沟道区域以及PMOS金属栅极区域; NMOS,包括:n型源极区域,n型漏极区域,n型源极区域和n型漏极区域之间的n沟道区域以及NMOS金属栅极区域; 在p沟道区域和n沟道区域上方的绝缘层,其中PMOS金属栅极区域和NMOS金属栅极区域在绝缘层之上; 以及NMOS金属栅极区域和PMOS金属栅极区域之间的栅极接触。

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