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    Charged particle system including segmented detection elements
    1.
    发明授权
    Charged particle system including segmented detection elements 失效
    带电粒子系统包括分段检测元件

    公开(公告)号：US07928383B2

    公开(公告)日：2011-04-19

    申请号：US12204282

    申请日：2008-09-04

    申请人： Joe Wang ,  Xu Zhang ,  Zhong-Wei Chen

    发明人： Joe Wang ,  Xu Zhang ,  Zhong-Wei Chen

    IPC分类号： H01J49/00 ,  B01D59/44

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/24465

    摘要： A charged particle detector consists of a plurality independent light guide modules assembled together to form a segmented in-lens on-axis annular detector, with a center hole for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.

    摘要翻译： 带电粒子检测器由多个独立的光导模块组成，组合在一起以形成分段的透镜内轴环形探测器，其中心孔用于允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

    Charged particle detection devices
    2.
    发明授权
    Charged particle detection devices 失效
    带电粒子检测装置

    公开(公告)号：US07872236B2

    公开(公告)日：2011-01-18

    申请号：US11668846

    申请日：2007-01-30

    申请人： Xu Zhang ,  Joe Wang ,  Zhong-Wei Chen

    发明人： Xu Zhang ,  Joe Wang ,  Zhong-Wei Chen

    IPC分类号： G01T1/20

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2443 ,  H01J2237/24435 ,  H01J2237/2445 ,  H01J2237/24465

    摘要： A charged particle detector consists of four independent light guide modules assembled together to form a segmented on-axis annular detector, with a center opening for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface. The outer region of the light guide block is shaped into four separate light guide output channels and each light guide output channel is coupled to a photomultiplier tube to allow light signal output from each channel to be amplified and processed separately.

    摘要翻译： 带电粒子检测器由四个独立的光导模块组成，组合在一起以形成分段的轴上环形探测器，其中心开口允许初级带电粒子束通过。 面向样品的组件的一侧作为带电粒子检测表面涂覆或结合到闪烁体材料。 每个光导模块耦合到光电倍增管，以允许通过每个光导模块传输的光信号被单独放大和处理。 带电粒子检测器由一块光导材料制成，被处理成具有从一个面的锥形圆形切口，终止在与开口相对的面上以允许初级带电粒子束通过。 相反的面被涂覆或与闪烁体材料结合，作为带电粒子检测表面。 导光块的外部区域被成形为四个分开的光导输出通道，并且每个光导输出通道耦合到光电倍增管，以允许来自每个通道的光信号输出被单独放大和处理。

    SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM
    3.
    发明申请
    SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM 有权
    充电颗粒束的系统和方法

    公开(公告)号：US20100270468A1

    公开(公告)日：2010-10-28

    申请号：US12832127

    申请日：2010-07-08

    申请人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    发明人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    IPC分类号： H01J37/145 ,  H01J37/28

    CPC分类号： H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

    摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

    摘要翻译： 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

    SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM
    4.
    发明申请
    SYSTEM AND METHOD FOR A CHARGED PARTICLE BEAM 有权
    充电颗粒束的系统和方法

    公开(公告)号：US20080121810A1

    公开(公告)日：2008-05-29

    申请号：US11923012

    申请日：2007-10-24

    申请人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    发明人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    IPC分类号： H01J1/50

    CPC分类号： H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

    摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

    摘要翻译： 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

    Charged particle beam detection unit with multi type detection subunits
    5.
    发明授权
    Charged particle beam detection unit with multi type detection subunits 有权
    带多个检测子单元的带电粒子束检测单元

    公开(公告)号：US08350213B2

    公开(公告)日：2013-01-08

    申请号：US12715766

    申请日：2010-03-02

    申请人： Joe Wang ,  Xu Zhang ,  Zhongwei Chen

    发明人： Joe Wang ,  Xu Zhang ,  Zhongwei Chen

    IPC分类号： H01J37/26

    CPC分类号： G01N23/00 ,  G01N23/04 ,  G01N23/225 ,  H01J37/26

    摘要： A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.

    摘要翻译： 带电粒子成像系统的检测单元在Wien滤波器（也称为E×B带电粒子分析器）的帮助下，包括带电粒子成像系统中的多类型检测子单元。 该成像系统适用于低光束电流，高分辨率模式和高光束电流，高通量模式。 该单元可以应用于扫描电子检查系统以及使用带电粒子束作为观察工具的其他系统。

    Charged Particle Beam Detection Unit with Multi Type Detection Subunits
    6.
    发明申请
    Charged Particle Beam Detection Unit with Multi Type Detection Subunits 有权
    带多种检测子单元的带电粒子束检测单元

    公开(公告)号：US20110215241A1

    公开(公告)日：2011-09-08

    申请号：US12715766

    申请日：2010-03-02

    申请人： Joe Wang ,  Xu Zhang ,  Zhongwei Chen

    发明人： Joe Wang ,  Xu Zhang ,  Zhongwei Chen

    IPC分类号： G01N23/00 ,  G01N23/225 ,  G01N23/04 ,  H01J37/26

    CPC分类号： G01N23/00 ,  G01N23/04 ,  G01N23/225 ,  H01J37/26

    摘要： A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.

    摘要翻译： 带电粒子成像系统的检测单元在Wien滤波器（也称为E×B带电粒子分析器）的帮助下，包括带电粒子成像系统中的多类型检测子单元。 该成像系统适用于低光束电流，高分辨率模式和高光束电流，高通量模式。 该单元可以应用于扫描电子检查系统以及使用带电粒子束作为观察工具的其他系统。

    System and method for a charged particle beam
    7.
    发明授权
    System and method for a charged particle beam 有权
    带电粒子束的系统和方法

    公开(公告)号：US08164060B2

    公开(公告)日：2012-04-24

    申请号：US12832127

    申请日：2010-07-08

    申请人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    发明人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    IPC分类号： H01J37/244 ,  H01J37/145

    CPC分类号： H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

    摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

    摘要翻译： 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

    System and method for a charged particle beam
    8.
    发明授权
    System and method for a charged particle beam 有权
    带电粒子束的系统和方法

    公开(公告)号：US07825386B2

    公开(公告)日：2010-11-02

    申请号：US11923012

    申请日：2007-10-24

    申请人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    发明人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

    IPC分类号： H01J37/244

    CPC分类号： H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

    摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

    摘要翻译： 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。