公开(公告)号：US20150042208A1

公开(公告)日：2015-02-12

申请号：US14446602

申请日：2014-07-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi YOSHIDA ,  Takeshi MISHIMA ,  Shigeto IWAI ,  Yuusaku YOSHIDA

IPC: H01L41/083 ,  H01L41/331

CPC classification number: H01L41/083 ,  H01L41/331 ,  H03H3/0072 ,  H03H9/1057 ,  Y10T29/42

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.

Abstract translation: 谐振换能器包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅构成的外壳，围绕谐振器间隙，并与硅单晶衬底一起形成腔室，令人兴奋的 模块，其被配置为激励所述谐振器;振动检测模块，被配置为检测所述谐振器的振动;第一层，设置在所述腔室上，所述第一层在所述谐振器上方具有通孔;第二层，设置在所述第一层上， 所述间隙覆盖位于所述通孔的上方且与所述通孔连通的间隙，以及覆盖所述第一层和所述第二层的第三层，所述第三层密封所述间隙。

公开(公告)号：US20180138887A1

公开(公告)日：2018-05-17

申请号：US15808227

申请日：2017-11-09

Applicant: Yokogawa Electric Corporation

Inventor： Takeshi MISHIMA ,  Hiroshi SUZUKI

IPC: H03H9/02 ,  H03H9/24 ,  H03H9/10 ,  B81B7/00

CPC classification number: H03H9/02448 ,  B81B7/0041 ,  B81B2201/0271 ,  B81B2203/04 ,  B81C1/00182 ,  B81C1/00698 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/1057 ,  H03H9/2405 ,  H03H9/2463 ,  H03H2009/02472

Abstract: A vibration transducer includes a silicon substrate, a first oxide film formed on the silicon substrate, an activation layer formed on the first oxide film, a second oxide film formed on the activation layer, a polysilicon layer formed on the second oxide film, and a substrate contact part. A vibrator, a vibrator electrode electrically conducted with the vibrator, a fixed electrode close to the vibrator and a vacuum chamber configured to surround the vibrator are formed in the activation layer. The polysilicon layer forms a shell. The substrate contact part is configured to electrically conduct the polysilicon layer and the silicon substrate, and is formed to continuously surround the vacuum chamber in a region, in which the vibrator, the vibrator electrode and the fixed electrode of the activation layer are not formed, of the activation layer.