公开(公告)号：US20110073968A1

公开(公告)日：2011-03-31

申请号：US12993536

申请日：2009-06-29

申请人： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

发明人： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

IPC分类号： H01L29/84 ,  H01L23/48 ,  H01L21/28

CPC分类号： H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

摘要： An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes.

摘要翻译： 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 所述第一电极通过凹槽被分隔成每个所述元件，绝缘连接基板被接合到所述第一电极，并且布线由每个所述元件分别通过所述连接基板与所述第一电极相对的一侧制成 到第一电极。

公开(公告)号：US08665672B2

公开(公告)日：2014-03-04

申请号：US12996749

申请日：2009-06-04

申请人： Yasuhiro Soeda ,  Takahiro Ezaki

发明人： Yasuhiro Soeda ,  Takahiro Ezaki

IPC分类号： G01S1/74

CPC分类号： G01S1/74 ,  B06B1/0292 ,  Y10T29/49002

摘要： A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.

摘要翻译： 一种电容式机电转换装置的制造方法，其特征在于，通过将基板和膜部件接合而形成密封在所述基板与所述膜部件之间的空腔的制造方法，所述制造电容式机电转换装置的工序包括以下步骤：提供气体释放路径 从衬底和膜构件之间的粘合界面穿透到外部，并且通过设置气体释放路径将膜构件与衬底接合而形成空腔; 气体释放路径设置在路径不与空腔连通的位置处。

公开(公告)号：US08466522B2

公开(公告)日：2013-06-18

申请号：US12993536

申请日：2009-06-29

申请人： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

发明人： Takahiro Ezaki ,  Chienliu Chang ,  Yasuhiro Soeda ,  Kenji Tamamori

IPC分类号： H01L29/84 ,  H01L21/00

CPC分类号： H01L23/5226 ,  B06B1/0292 ,  B81B2201/0257 ,  H01L21/76898 ,  H01L27/1203 ,  H01L29/84 ,  H01L2924/0002 ,  H01L2924/00

摘要： An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.

摘要翻译： 元件阵列包括具有第一电极和第二电极的多个元件，其间具有间隙; 通过沟槽将每个元件分离第一电极，将绝缘连接基板接合到第一电极，并且通过连接基板从相应的第一电极到与第一电极相对的一侧提供布线。

公开(公告)号：US20110084570A1

公开(公告)日：2011-04-14

申请号：US12996749

申请日：2009-06-04

申请人： Yasuhiro Soeda ,  Takahiro Ezaki

发明人： Yasuhiro Soeda ,  Takahiro Ezaki

IPC分类号： H02N1/08 ,  H05K13/00

CPC分类号： G01S1/74 ,  B06B1/0292 ,  Y10T29/49002

摘要： A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.

摘要翻译： 一种电容式机电转换装置的制造方法，其特征在于，通过将基板和膜部件接合而形成密封在所述基板与所述膜部件之间的空腔的制造方法，所述制造电容式机电转换装置的工序包括以下步骤：提供气体释放路径 从衬底和膜构件之间的粘合界面穿透到外部，并且通过设置气体释放路径将膜构件与衬底接合而形成空腔; 气体释放路径设置在路径不与空腔连通的位置处。

公开(公告)号：US20110140212A1

公开(公告)日：2011-06-16

申请号：US12956046

申请日：2010-11-30

申请人： Hideyuki Itoh ,  Takahiro Ezaki

发明人： Hideyuki Itoh ,  Takahiro Ezaki

IPC分类号： H01L29/84 ,  H01L21/02

CPC分类号： G01N29/2406 ,  B06B1/0292 ,  G01N29/0654

摘要： An electromechanical transducer includes: a conductive substrate; multiple elements which are disposed on a first face side of the substrate and which contain cells; grooves; and insulating films. The substrate has a second face which is opposite from the first face. The grooves run from the second face of the substrate to the first face of the substrate in a manner that electrically isolate the multiple elements from one another, thereby dividing the substrate and forming first electrodes. The insulating films are formed on opposing outer side walls of every two adjacent first electrodes across one of the grooves. The width between the insulating films is narrower on the second face side of the substrate than on the first face side of the substrate. The insulating films are thicker on the second face side than on the first face side.

摘要翻译： 机电换能器包括：导电基板; 多个元件，其设置在基板的第一表面侧并且包含单元; 凹槽 和绝缘膜。 基板具有与第一面相反的第二面。 凹槽从衬底的第二面延伸到衬底的第一面，以使多个元件彼此电隔离，从而划分衬底并形成第一电极。 绝缘膜形成在跨越其中一个凹槽的每两个相邻的第一电极的相对的外侧壁上。 绝缘膜之间的宽度在基板的第二面侧比在基板的第一面侧窄。 绝缘膜在第二面侧比在第一面侧更厚。

公开(公告)号：US20060054226A1

公开(公告)日：2006-03-16

申请号：US10537231

申请日：2004-03-01

申请人： Takeo Yamazaki ,  Atsumori Terasaki ,  Takeshi Imamura ,  Takahiro Ezaki ,  Susumu Yasuda ,  Toru Nakakubo

发明人： Takeo Yamazaki ,  Atsumori Terasaki ,  Takeshi Imamura ,  Takahiro Ezaki ,  Susumu Yasuda ,  Toru Nakakubo

IPC分类号： F15C1/04

CPC分类号： H01M8/04089 ,  B01L3/502738 ,  B01L2200/0605 ,  B01L2300/0816 ,  B01L2400/0418 ,  B01L2400/0487 ,  B01L2400/0638 ,  F16K99/0001 ,  F16K99/0009 ,  F16K99/0028 ,  F16K99/0057 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  G01N30/20 ,  G01N2030/205 ,  G01N2035/00247 ,  H01M8/04201 ,  H01M8/04216 ,  H01M8/065 ,  H01M2008/1095 ,  Y10T137/2191 ,  Y10T137/7869 ,  Y10T137/7895 ,  G01N30/10

摘要： A fluid delivery device is provided which comprises a microchannel device for cutting out a certain amount of a sample from a micorochannel by controlling a valve opening. The fluid delivery device has a valve for controlling a flow of a fluid, comprising a flow channel for the fluid, and a valve in the flow channel, wherein the valve operates in accordance with a pressure difference between the upstream side and downstream side of the valve caused by the flow of the fluid through the flow channel, allowing the fluid to flow when the pressure difference is lower than a prescribed value P0, and intercepting the fluid not to flow when the pressure difference is P0 or more.

摘要翻译： 提供一种流体输送装置，其包括用于通过控制阀开口从微通道切出一定量的样品的微通道装置。 流体输送装置具有用于控制流体流动的阀，包括用于流体的流动通道和流动通道中的阀，其中阀根据流体的上游侧和下游侧之间的压力差进行操作 由流体流过流道导致的阀门，当压力差低于规定值P 0 0 0时允许流体流动，并且当压力差为 P 0以上。

公开(公告)号：US20110115333A1

公开(公告)日：2011-05-19

申请号：US12915133

申请日：2010-10-29

申请人： Takahiro Ezaki

发明人： Takahiro Ezaki

IPC分类号： H02N1/08 ,  H01R43/00

CPC分类号： B06B1/0292 ,  Y10T29/49117

摘要： An electromechanical transducer, including: a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap; and an outer frame extending along an outer periphery of the plurality of devices, wherein the first electrode of each of the devices each includes a plurality of portions formed by electrically separating a device substrate with grooves, wherein the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves, wherein the first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and wherein the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.

摘要翻译： 一种机电换能器，包括：多个装置，每个装置包括至少一个电池，所述至少一个电池包括跨越间隙彼此面对的第一电极和第二电极; 以及沿着所述多个装置的外周延伸的外框，其中每个所述装置中的每一个的所述第一电极各自包括通过将装置基板与槽电气分离而形成的多个部分，其中所述外框架包括所述装置的一部分 基板包围多个部分，并通过沟槽与多个部分电分离，其中每个包括多个部分的第一电极经由多个电极连接部分分别与另一个基板的多个导电部分接合，其中 外框架通过环绕电极连接部分的圆形外框架连接部分接合到另一基板的对应部分。

公开(公告)号：US08836052B2

公开(公告)日：2014-09-16

申请号：US12956046

申请日：2010-11-30

申请人： Hideyuki Itoh ,  Takahiro Ezaki

发明人： Hideyuki Itoh ,  Takahiro Ezaki

IPC分类号： H01L27/14

CPC分类号： G01N29/2406 ,  B06B1/0292 ,  G01N29/0654

摘要： An electromechanical transducer includes multiple elements each having multiple cells, with each cell including a first electrode formed from a conductive substrate, and a second electrode opposed to a first face of the conductive substrate and across a gap. The multiple cells of each of the elements are electrically connected, and the conductive substrate is divided for each of the elements by grooves extending from the first face to a second face which is opposite from the first face. In addition, insulating films are formed on opposing side walls of the conductive substrate and define each of the grooves, wherein a gap width of each of the grooves is narrower on the second face side of the conductive substrate than on the first face side of the conductive substrate.

摘要翻译： 机电换能器包括多个元件，每个元件具有多个单元，每个单元包括由导电基板形成的第一电极，以及与导电基板的第一面相对并跨过间隙的第二电极。 每个元件的多个电池被电连接，并且通过从第一面延伸到与第一面相对的第二面的凹槽，为每个元件划分导电基板。 此外，绝缘膜形成在导电基板的相对侧壁上，并且限定每个凹槽，其中每个凹槽的间隙宽度在导电基板的第二表面侧比在第一面侧 导电基板。

公开(公告)号：US08378436B2

公开(公告)日：2013-02-19

申请号：US12915133

申请日：2010-10-29

申请人： Takahiro Ezaki

发明人： Takahiro Ezaki

IPC分类号： H01L29/82

CPC分类号： B06B1/0292 ,  Y10T29/49117

摘要： An electromechanical transducer includes a plurality of devices each including at least one cell including a first electrode and a second electrode facing each other across a gap, and an outer frame extending along an outer periphery of the plurality of devices. The first electrode of each of the devices includes a plurality of portions formed by electrically separating a device substrate with grooves, and the outer frame includes a part of the device substrate surrounding the plurality of portions and electrically separated from the plurality of portions by the grooves. The first electrodes each including the plurality of portions are respectively bonded to a plurality of conductive portions of another substrate via a plurality of electrode connection portions, and the outer frame is bonded to a corresponding portion of the another substrate via a circular outer frame connection portion which surrounds the electrode connection portions.

摘要翻译： 机电换能器包括多个装置，每个装置包括至少一个电池，所述电池包括跨越间隙彼此面对的第一电极和第二电极;以及沿着所述多个装置的外周延伸的外框架。 每个器件的第一电极包括通过将器件基板与沟槽电隔离而形成的多个部分，并且外框架包括围绕多个部分的器件基板的一部分并且通过凹槽与多个部分电分离 。 每个包括多个部分的第一电极分别通过多个电极连接部分接合到另一基板的多个导电部分，并且外框架经由圆形外框架连接部分接合到另一基板的对应部分 其围绕电极连接部分。

公开(公告)号：US20100051128A1

公开(公告)日：2010-03-04

申请号：US12528972

申请日：2008-02-18

申请人： Takahiro Ezaki

发明人： Takahiro Ezaki

IPC分类号： F15D1/00

CPC分类号： B01J19/0093 ,  B01F5/0256 ,  B01F13/0059 ,  B01J2219/00783 ,  B01J2219/00828 ,  B01J2219/0086 ,  B01J2219/00889 ,  B01J2219/00891 ,  Y10T137/8593 ,  Y10T137/87249

摘要： A fluid transport channel is provide including a flow inlet from which fluid flows in, a flow channel through which the fluid is transported, a branched portion provided in the flow channel to change the movement direction of the fluid, and flow outlets from which the fluid having passed through the branched portions flows out. A region where the movement direction of the fluid is changed is present between the flow inlet and the branched portion. In that region, the center line extending in the movement direction of the fluid in the flow channel extends along a range of two arcs having different centers, and the range is composed of such two arcs as to make the directions of the fluid turning along the arcs opposite to each other. Each of the arcs has a specific angle relative to an angle at which the movement direction of the fluid changes.

摘要翻译： 提供流体输送通道，其包括流体流入的流入口，流体通过其流动的流动通道，设置在流动通道中的分支部分以改变流体的移动方向，以及流出口，流体 已经通过分支部分流出。 在流入口和分支部之间存在流体的移动方向变化的区域。 在该区域中，沿着流路中的流体的移动方向延伸的中心线沿着具有不同中心的两个弧的范​​围延伸，并且该范围由这样的两个弧组成，以使流体沿着 相反的弧。 每个弧具有相对于流体移动方向变化的角度的特定角度。