公开(公告)号：US20080138721A1

公开(公告)日：2008-06-12

申请号：US11987631

申请日：2007-12-03

申请人： Yasuo Hiramoto ,  Kousuke Nakajima ,  Yoshiyuki Owari ,  Toshikazu Oshiro ,  Shinji Takagi

发明人： Yasuo Hiramoto ,  Kousuke Nakajima ,  Yoshiyuki Owari ,  Toshikazu Oshiro ,  Shinji Takagi

IPC分类号： G03F1/00

CPC分类号： B82Y40/00 ,  B82Y10/00 ,  G03F1/24 ,  G03F1/60 ,  G21K2201/067

摘要： An object of the present invention is to provide a method of fabricating a substrate, and the like which excels in flatness, ten-point average roughness and surface roughness of substrates and flattens and smoothes the substrate surface. The method of fabricating a substrate includes a step of correcting flatness, a step of correcting surface unevenness in which the substrate surface is polished by means of a polishing pad with a hardness defined by JIS K 6253 of 70 or more, and a step of finishing surface roughness, to therefore achieve the above objectives. Such a substrate can be used for masks and mirrors of semiconductor exposure, discs for flying height tests of the hard-disk magnetic heads, and pharmaceutical test preparation, and the like.

摘要翻译： 本发明的目的是提供一种制造基板的平面度，十点平均粗糙度和基板的表面粗糙度以及平坦化的基板的制造方法，并平滑基板表面。 制造基板的方法包括校正平坦度的步骤，通过JIS K 6253定义的硬度为70以上的研磨垫将基板表面进行抛光的表面凹凸进行修正的步骤，以及整理步骤 表面粗糙度，从而达到上述目的。 这样的基板可以用于半导体曝光的掩模和反射镜，用于硬盘磁头的飞行高度测试的盘和药物测试准备等。

公开(公告)号：US06429160B1

公开(公告)日：2002-08-06

申请号：US09577720

申请日：2000-05-23

申请人： Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Naoyuki Goto ,  Takayuki Kishi

发明人： Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Naoyuki Goto ,  Takayuki Kishi

IPC分类号： C03C1004

CPC分类号： G11B5/7315 ,  C03C10/0045

摘要： A high rigidity glass-ceramic substrate is provided which contains, as a predominant crystal phase or phases, at least one crystal phase selected from the group consisting of enstatite (MgSiO3), enstatite solid solution (MgSiO3 solid solution), magnesium titanate (MgTi2O) and magnesium titanate solid solution (MgTi2O5 solid solution), has fine crystal grains (preferably globular crystal grains) of precipitated crystal phases, has excellent melting property of a base glass, high resistivity to devitrification, easiness in polishing, excellent smoothness in the surface after polishing and has high Young's modulus capable of coping with a high speed rotation.

摘要翻译： 提供了一种高刚性玻璃陶瓷基片，其包含作为主要结晶相或相的至少一种选自顽辉石（MgSiO 3），顽辉石固溶体（MgSiO 3固溶体），钛酸镁（MgTi 2 O） 和钛酸镁固溶体（MgTi 2 O 5固溶体）具有析出的结晶相的微细晶粒（优选球状晶粒），具有优异的基底玻璃熔融性，高失透性，抛光性，表面光滑度优异 抛光，并具有高的杨氏模量，能够应付高速旋转。

公开(公告)号：US06503857B2

公开(公告)日：2003-01-07

申请号：US09947960

申请日：2001-09-06

申请人： Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Naoyuki Goto ,  Takayuki Kishi

发明人： Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Naoyuki Goto ,  Takayuki Kishi

IPC分类号： C03C1002

CPC分类号： G11B5/7315 ,  C03C10/0045

摘要： A high rigidity glass-ceramic substrate is provided which contains, as a predominant crystal phase or phases, at least one crystal phase selected from the group consisting of enstatite (MgSiO3), enstatite solid solution (MgSiO3 solid solution), magnesium titanate (MgTi2O5) and magnesium titanate solid solution (MgTi2O5 solid solution), has fine crystal grains (preferably globular crystal grains) of precipitated crystal phases, has excellent melting property of a base glass, high resistivity to devitrification, easiness in polishing, excellent smoothness in the surface after polishing and has high Young's modulus capable of coping with a high speed rotation.

摘要翻译： 提供了一种高刚性玻璃陶瓷基片，其包含作为主要晶相或相的至少一种选自顽辉石（MgSiO 3），顽辉石固溶体（MgSiO 3固溶体），钛酸镁（MgTi 2 O 5） 和钛酸镁固溶体（MgTi 2 O 5固溶体）具有析出的结晶相的微细晶粒（优选球状晶粒），具有优异的基底玻璃熔融性，高失透性，抛光性，表面光滑度优异 抛光，并具有高的杨氏模量，能够应付高速旋转。

公开(公告)号：US06344423B2

公开(公告)日：2002-02-05

申请号：US09201333

申请日：1998-11-30

申请人： Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka

发明人： Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka

IPC分类号： C03C1014

CPC分类号： G11B5/7315 ,  C03C10/0045 ,  C03C10/0054 ,  C03C10/0081 ,  G11B5/8404 ,  Y10S428/90 ,  Y10T428/24355

摘要： A high rigidity glass-ceramic substrate for a magnetic information storage medium has a ratio of Young's modulus to specific gravity within a range from 37 to 63 and comprises Al2O3 within a range from 10% to less than 20%. A predominant crystal phase of the glass-ceramic substrate consists of one or more crystals selected from the group consisting of &bgr;-quartz, &bgr;-quartz solid solution, enstatite, enstatite solid solution, forsterite and forsterite solid solution.

摘要翻译： 用于磁信息存储介质的高刚性玻璃陶瓷基片具有在37至63的范围内的杨氏模量与比重的比率，并且包括在10％至小于20％的范围内的Al 2 O 3。 玻璃陶瓷衬底的主要晶相由一种或多种选自β-石英，β-石英固溶体，顽辉石，顽辉石固溶体，镁橄榄石和镁橄榄石固溶体的晶体组成。

公开(公告)号：US20060226124A1

公开(公告)日：2006-10-12

申请号：US11398703

申请日：2006-04-06

申请人： Kazuyoshi Nakamura ,  Toshihide Nakajima ,  Kousuke Nakajima ,  Takahisa Oonami

发明人： Kazuyoshi Nakamura ,  Toshihide Nakajima ,  Kousuke Nakajima ,  Takahisa Oonami

IPC分类号： C03C15/00 ,  H01L21/461 ,  H01L21/302 ,  C23F1/00

CPC分类号： B24B37/24

摘要： A substrate having flatness of less than 230 nmPV and surface roughness at RMS of less than 0.20 nm. is obtained by a method comprising: a process of polishing an object to be polished with a polishing pad comprising at least one layer having compressibility of 5% or below in a base layer of the polishing pad.

公开(公告)号：US06245411B1

公开(公告)日：2001-06-12

申请号：US09203187

申请日：1998-11-30

申请人： Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka

发明人： Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka

IPC分类号： G11B0582

CPC分类号： G11B5/7315 ,  C03C10/0045 ,  C03C10/0054 ,  C03C10/0081 ,  G11B5/8404 ,  Y10S428/90 ,  Y10T428/24355

摘要： A high rigidity glass-ceramic substrate for a magnetic information storage medium has a ratio of Young's modulus to specific gravity within a range from 37 to 63 and comprises Al2O3 within a range from 10% to less than 20%. Predominant crystal phases of the glass-ceramic substrate consist of (1) cordierite or cordierite solid solution and (2) one or more crystals selected from the group consisting of Spinel crystal, Spinel crystal solid solution, enstatite, enstatite solid solution, &bgr;-quartz and &bgr;-quartz solid solution.

摘要翻译： 用于磁信息存储介质的高刚性玻璃陶瓷基片具有在37至63的范围内的杨氏模量与比重的比率，并且包括在10％至小于20％的范围内的Al 2 O 3。 玻璃陶瓷基体的主要晶相由（1）堇青石或堇青石固溶体组成，（2）选自尖晶石，尖晶石固溶体，顽辉石，顽辉石固溶体，β-石英 和β-石英固溶体。

公开(公告)号：US07553768B2

公开(公告)日：2009-06-30

申请号：US11398703

申请日：2006-04-06

申请人： Kazuyoshi Nakamura ,  Toshihide Nakajima ,  Kousuke Nakajima ,  Takahisa Oonami

发明人： Kazuyoshi Nakamura ,  Toshihide Nakajima ,  Kousuke Nakajima ,  Takahisa Oonami

IPC分类号： H01L21/302

CPC分类号： B24B37/24

摘要： A substrate having flatness of less than 230 nmPV and surface roughness at RMS of less than 0.20 nm. is obtained by a method comprising: a process of polishing an object to be polished with a polishing pad comprising at least one layer having compressibility of 5% or below in a base layer of the polishing pad.

摘要翻译： 平面度小于230nmPV的基板，RMS的表面粗糙度小于0.20nm。 是通过以下方法获得的：包括在抛光垫的基底层中用包括至少一层具有5％或更低的压缩率的层的抛光垫抛光待抛光物体的方法。

公开(公告)号：US20080289365A1

公开(公告)日：2008-11-27

申请号：US12219803

申请日：2008-07-29

申请人： Kousuke Nakajima

发明人： Kousuke Nakajima

IPC分类号： C03B32/00

CPC分类号： C03C10/0045 ,  C03C3/097 ,  C03C4/0085 ,  C03C2204/08

摘要： Glass-ceramics includes Li2O, Al2O3 and SiO2, have an average crystal grain diameter of a predominant crystal phase of 90 nm or below and have crystal grain diameter distribution of 20 nm or below. The glass-ceramics can be manufactured by heat treating glass comprising Li2O, Al2O3 and SiO2 under a temperature within a range from 650° C. to 750° C. and then further heat treating the glass under a temperature within a range from 700° C. to 800° C. for 100-200 hours.

摘要翻译： 玻璃陶瓷包括Li 2 O，Al 2 O 3和SiO 2，其主晶相的平均晶粒直径为90nm以下，晶粒直径分布为20nm以下。 玻璃陶瓷可以通过在650℃至750℃的温度范围内热处理包含Li 2 O，Al 2 O 3和SiO 2的玻璃来制造，然后在700℃以下的温度下进一步热处理玻璃 至800℃，持续100-200小时。

公开(公告)号：US06819526B2

公开(公告)日：2004-11-16

申请号：US10069737

申请日：2002-02-26

申请人： Mariko Kataoka ,  Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Toshitaka Yagi

发明人： Mariko Kataoka ,  Naoyuki Goto ,  Kousuke Nakajima ,  Junko Ishioka ,  Katsuhiko Yamaguchi ,  Toshitaka Yagi

IPC分类号： G11B1702

CPC分类号： G11B5/7315 ,  C03C10/0027 ,  C03C10/0045 ,  G11B5/012 ,  G11B5/82 ,  G11B17/00 ,  G11B23/00

摘要： An information storage disk holding member for holding an information storage disk in position in an information storage disk drive device, the holding member being made of glass-ceramics in which a crystal phase is dispersed in a glass matrix. The holding member has specific rigidity (Young's modulus/specific gravity) of not greater than 37 GPa, specific gravity of not greater than 3.0, coefficient of thermal expansion within a range from −50° C. to +70° C. which is within a range from +35×10−7/° C. to +130×10−7/° C., Young's modulus within a range from 95 GPa to 130 GPa, specific gravity within a range from 2.40 to 2.60 and bending strength within a range from 400 MPa to 800 MPa. There is provided an information storage disk holding member which is capable of coping with a high speed rotation of a disk in conformity with tendencies toward high speed transmission of information, increasing mechanical strength for adaptation to mobile uses, having a thermal expansion property matching that of other drive component parts and eliminating defects caused by solving out of alkali. There is also provided an information storage disk drive device using this holding member.

摘要翻译： 一种信息存储盘保持构件，用于将信息存储盘保持在信息存储盘驱动装置中的适当位置，所述保持构件由将晶相分散在玻璃基体中的玻璃陶瓷制成。 保持构件具有不大于37GPa，比重不大于3.0的比刚度（杨氏模量/比重），在-50℃至+ 70℃的范围内的热膨胀系数 在+ 35×10 -7 /℃至+ 130×10 -7 /℃的范围内，杨氏模量在95GPa至130GPa的范围内，比重在2.40至2.60范围内，弯曲强度在 范围从400MPa到800MPa。提供了一种信息存储盘保持构件，其能够适应于高速传输信息的趋势，提高了盘的高速旋转，增加了适应移动用途的机械强度 具有与其他驱动部件的热膨胀特性相匹配的特征，并且消除由碱析出而引起的缺陷。 还提供了使用该保持构件的信息存储盘驱动装置。

公开(公告)号：US07678720B2

公开(公告)日：2010-03-16

申请号：US11545513

申请日：2006-10-11

申请人： Kousuke Nakajima

发明人： Kousuke Nakajima

IPC分类号： C03C10/14 ,  C03C10/12

CPC分类号： C03C10/0045 ,  C03C3/097 ,  C03C4/0085 ,  C03C2204/08

摘要： Glass-ceramics includes Li2O, Al2O3 and SiO2, have an average crystal grain diameter of a predominant crystal phase of 90 nm or below and have crystal grain diameter distribution of 20 nm or below. The glass-ceramics can be manufactured by heat treating glass comprising Li2O, Al2O3 and SiO2 under a temperature within a range from 650° C. to 750° C. and then further heat treating the glass under a temperature within a range from 700° C. to 800° C. for 100-200 hours.

摘要翻译： 玻璃陶瓷包括Li 2 O，Al 2 O 3和SiO 2，其主晶相的平均晶粒直径为90nm以下，晶粒直径分布为20nm以下。 玻璃陶瓷可以通过在650℃至750℃的温度范围内热处理包含Li 2 O，Al 2 O 3和SiO 2的玻璃来制造，然后在700℃以下的温度下进一步热处理玻璃 至800℃，持续100-200小时。